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Plasma lab Ie P 180 Oxford Instruments Plasma Technology WARNING Equipment Manual BEFORE PROCEEDING WITH ANY MAINTENANCE WORK, READ SECTION 1 - HEALTH AND SAFETY. 6.3.2 Weekly Vacuum Check Weekly, or as dictated by proce…

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Equipment
Manual
Oxford
Instruments
Plasma
Technology
WARNING
Plasma
lab
Ie
P180
BEFORE
PROCEEDING WITH
ANY
MAINTENANCE WORK, READ SECTION 1 - HEALTH
AND
SAFETY.
6.3
Routine
maintenance
&.
WARNING
PINCH POINT - WHEN
THE
CHAMBER LID IS OPENED
OR
CLOSED, LIMBS,
FINGERS
ETC
CAN BECOME TRAPPED BETWEEN
THE
LID
AND
THE
PROCESS
1-------------1
CHAMBER BASE RESULTING
IN
SEVERE INJURY.
Ensure
that
all
personnel
are
kept
clear
of
the
chamber
lid
when
it
is
opened
or
closed.
When
opening
or
closing
the
chamber
lid,
ensure
that
both
of
your
hands
are
kept
clear
of
the
pinch
point.
When
the
process
chamber
lid
is
to
be
kept
in
its
raised
position
for
prolonged
periods,
ensure
that
it
is
held
safely
in
its
open
position
without
relying
entirely
on
the
gas
support
struts.
6.3.1
As
required
ICP
dielectric
tube
cleaning
WARNING
IF
VENTING
AND
OPENING
THE
ICP180 FULLY AFTER USING HALOGENATED GASES
(CONTAINING
CL-
F-
Br-
OR
1-),
THE
RESIDUAL GAS
IN
THE
CHAMBER
IS
LIKELY
TO
EXCEED LONG TERM EXPOSURE LIMITS FOR
THE
EQUIVALENT ANHYDROUS ACID
(HCI, HF, HBr, HI) IN GASEOUS FORM. RUNNING
THE
DEFAULT CLEANING
RECIPE
AND
PUMPING FOR
30
MINUTES MORE WILL REDUCE THE RESIDUAL GAS
CONSIDERABLY
BUT
USERS
SHOULD
MAKE
THEIR
OWN
SAFETY ASSESSMENTS ON
THE
NEED
FOR
PERSONAL PROTECTIVE EQUIPMENT
IN
SUCH SITUATIONS.
Processes
capable
of
generating
hydrocarbon
or
fluorocarbon
monomers can
coat
the
inside
of
the
ICP
dielectric
tube
with
polymer.
An
optimised
cleaning process
would
need
to
be developed
for
each
application,
but
as
a
default
process use:
Gas:
Pressure:
RF
power:
Time:
Oxygen (50-100
seem).
2Pa
(15
mTorr).
1000W.
1 hour.
Printed: 18-Jan-06, 8:44
ICP
180 Source
Page 17
of
26
Issue
4:
January 06
Plasma
lab
Ie
P180
Oxford
Instruments
Plasma
Technology
WARNING
Equipment
Manual
BEFORE
PROCEEDING WITH
ANY
MAINTENANCE
WORK, READ SECTION 1 - HEALTH
AND
SAFETY.
6.3.2
Weekly
Vacuum
Check
Weekly,
or
as
dictated
by
process constraints,
perform
a system vacuum check, recording:
a)
The base pressure
after
a standard
pumping
time.
b)
The
rate
of
pressure rise
in
an isolated system.
Experience suggests
that
the
O-ring
seals
at
each end
of
the
ICP
dielectric
tube
are
the
most likely source
of
leaks in a
new
or
freshly reassembled
ICP180,
but
once sealed
the
source remains leak
tight
unless an
O-ring seal fails. The design minimises exposure
of
the
seals
to
the
plasma,
but
tolerances
in
the
tube
construction (especially
of
quartz
tubes) may mean
the
tube
is
not
automatically
concentric
with
the
0-
ring
seals.
This
will
reduce
O-ring
seal life, and
require
more
care in assembly
to
obtain
a
good
vacuum
seal.
6.3.3
3-Monthly
Water
cooling
circuit
1)
Turn
off
the
RF
supply,
then
vent
the
ICP180 source.
2)
Open
the
RF
enclosure and
automatch,
then
inspect
the
fluid
cooling
path
carefully
for
signs
of
leaks, blockage, corrosion,
overheating
or
melting
of
plastic pipes.
3)
Repair
or
replace any defective sections.
4)
Pay
attention
to
the
layout
of
the
cooling
pipes:
the
design provides
for
minimum
clearances
between
a
water-cooled
RF
live
component
and
the
first
point
a plastic pipe rests against a
grounded
surface.
5)
Ensure
that
the
cooling
flow
rate
is
at
least 2 litres/minute in
the
3/
8
inch circuit and
at
least
1
litre/minute
in
the
% inch circuit.
6)
Check
the
function
of
any
water
flow
switches in
the
cooling
path.
RF
enclosure
exhaust
flow
1)
Turn
off
the
RF
supply,
then
vent
the
ICP180 source.
2)
Open
the
RF
enclosure.
3)
Remove any accumulations
of
dust
or
particles
from
the
exhaust
port
and air
inlet
holes.
4)
Wipe
down
the
outside
of
the
ICP
dielectric
tube
and
the
RF
coil
to
remove any material
which
may
eventually
lead
to
an
RF
arc.
RF
emissions
1)
Check
that
the
RF
emissions are
within
specification.
See
AppendiX A in
the
Plasma
lab
System
100 manual
for
details.
Issue
4:
January 06
fCP
180Source
Page 18
of
26
Printed: 18-Jan-D6, 8:44
Equipment
Manual
Oxford
Instruments
Plasma
Technology
WARNING
Plasmalab
ICP
180
BEFORE
PROCEEDING WITH
ANY
MAINTENANCE WORK, READ SECTION 1 • HEALTH
AND
SAFETY.
6.4
Changing
the
ICP180
dielectric
tube
This sub-section applies
to
ICP180 second series builds
('floating
top'
version)
with
the
following
part
numbers:
100-6-54
100-6-54/1
100-6-55
100-6-55/1
100-6-56
100-6-56/1
100-6-57
100-6-57/1
ICP
180-FLOAT.TOP ASY(QUARTZ)
ICP180-FLOAT.TOP-ANOD.(QUARTZ)
ICP180-FLO.TOP
ANG.VP(QUARTZ)
ICP180-FL.TOP-AN.VP-ANOD QU'TZ
ICP180 FLOAT
TOP
ASSY
ALUMINA
ICP180 FLOAT
TOP
ASY
ANOD ALUM
ICP180FLO.TOP ANG V/P(ALUMINA)
ICP180
FLO.TOP
VIP
ANOD ALUM.
Refer
to
assembly
drawing
MAOOA23815
These instructions are given
to
assist personnel
who
are skilled in
the
maintenance
of
vacuum process
equipment.
The task includes
operating
the
vacuum
equipment
and mechanical assembly. There
is
some
lifting
from
the
top
of
the
equipment
which
may be easier
with
two
persons.
Parts
required:
MDOOC18541
QUARTZ
TUBE
(lCP
SOURCE)
Or
MDOOC18542
ALUMINA
TUBE
(lCP
SOURCE)
G/SEUO-K/264
KALREZ
O'RING
BS
264
X2
G/GAS/FIT/614C %
INCH
VCR
GASKET
X1
Safety
Risks
associated
with
this procedure include:
• Toxic gas. Pump
the
system
long
enough
to
reduce residual toxic gases
to
an acceptable
level.
If
halogen
gases have been used
in
the
chamber,
run
a plasma clean
(1
hour
10
mTorr
0250
seem,
1000W
ICP,
50 W bias
or
similar process)
then
pump
for
at
least
one
hour.
Follow
local practice concerning risk assessment and personal protective
equipment.
OIPT
practice
is
to
use chemical
filter
masks
when
working
on
halogen
process chambers.
• Glass
splinters.
Quartz
tubes may have sharp edges. Damaged tubes
make
leave glass
splinters. Take
due
care.
•
Implosion.
There
is
a small risk
of
catastrophic
tube
failure, especially
the
first
time
it
is
put
under
vacuum. Put
the
shielding in place
before
pumping
the
system. Always
vent
the
system
before
removing
the
covers.
•
RF
radiation.
The ICP180 coil
is
connected
to
a
high
power
RF
source
which
can cause
burns
or
interfere
with
other
equipment.
Make
sure
the
RF
generator
is
switched
off
before
removing
any covers.
After
completing
the
following
procedure,
perform
an
RF
leakage test
as
detailed
in
Appendix
A
of
this system manual.
Printed: 18-Jan-06, 8:44
ICP
180 Source
Page 19
of
26
Issue
4:
January 06