Oxford-100-Manual.pdf - 第27页

Health and Safety Oxford Instruments Plasma Technology Plasma lab and lonfab 1.3.12.9 Never smoke or eat in the 'clean room' or where gases are stored. In addition to the fire risks and particulate contaminatio…

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Plasma
lab
and
lonfab
Oxford
Instruments
Plasma
Technology
Health and Safety
WARNING
PINCH
POINT·
LIMBS, FINGERS
ETC
CAN BECOME TRAPPED RESULTING
IN
SEVERE
INJURY.
Ensure
that
all
personnel
are
kept
clear
of
pinch
points,
e.g.
chamber
doors,
hoist
mechanisms,
variable
heiQht
electrodes
etc,
while
these
components
are
movinQ.
1.3.11.4 Close chamber doors carefully; ensure
that
personnel vacate
the
vicinity
of
the
door
and its
operating
mechanism
before
it
is
closed
to
avoid
trapped
fingers etc.
1.3.11.5 Handle sprung components
under
compression
or
tension carefully, Take suitable
precautions, including eye
protection,
before
maintaining
small sprung items.
1.3.11.6 Beware
of
machinery
in
motion
such
as
robotic
arms, substrate
lifting
mechanisms
and shutters. Remember
that
machinery can
start
suddenly. Ensure
that
all safety
guards are correctly
fitted
before
use.
1.3.11.7 Beware
of
deposition
layers
under
stress.
Wear
eye
protection
before
cleaning
surfaces
which
are coated
with
layers
of
material,
as
particles can be
~ected
with
considerable force.
1.3.11.8 Handle
embrittled
wire, e.g. filaments, carefully. They can break and become
embedded
in
the
skin.
1.3.12
General
1.3.12.1 Ensure
that
local and
national
Health and Safety standards are studied and
followed.
It
is
the
customer's responsibility
to
carry
out
their
own
risk assessment
and
to
develop a safe system
of
work.
1.3.12.2 Ensure
that
all personnel
who
operate
this
equipment
are
trained
to
use
the
equipment,
and are
alerted
to
the
range
of
hazards present.
1.3.12.3
When
working
with
the
equipment,
ensure
that
there
are always
at
least
two
persons present.
1.3.12.4
If
a
tool
is
used
to
access
or
alter
any
part
of
the
equipment.
this
is
classed
as
a
maintenance action. Persons
performing
maintenance tasks must
be
skilled and
trained
to
know
and avoid
the
hazards present. Before carrying
out
any
maintenance
work,
read
the
relevant manuals supplied
by
manufacturers
of
proprietary
components.
1.3.12.5 Ensure
that
the
main electrical supply, compressed air, all
other
gases and
the
water
supply are disconnected
before
starting
maintenance
work
(Also see sub-section
1.3.9).
1.3.12.6 Consult
Oxford
Instruments Plasma Technology
before
making
any
alterations
to
the
system
or
changing
the
process
gases.
1.3.12.7 Ensure
that
all personnel
who
may be expected
to
have
access
to
the
system
during
an emergency, such
as
firemen, paramedics etc. are
familiar
with
the
location
of
the
main
circuit
breakers and valves.
1.3.12.8
Whenever
any
component
is
returned
to
Oxford
Instruments Plasma Technology
or
to
any
of
their
agents,
it
must be accompanied by copies
of
the
Goods Return Form
(OCF
60).
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11:
August
2004
Health and Safety
Page 1-14
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18
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May
2005, 06:31
Health and Safety
Oxford
Instruments
Plasma
Technology
Plasma
lab
and
lonfab
1.3.12.9 Never smoke
or
eat
in
the
'clean
room'
or
where
gases are stored.
In
addition
to
the
fire
risks and
particulate
contamination
presented by smoking, some chemicals
when
burnt
generate
carcinogenic
or
toxic
compounds.
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2005. 06:31
Health and Safety
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Issue
11:
August
2004
Plasma
lab
and
lonfab
Oxford
Instruments Plasma Technology
Health and Safety
1.4
Warning
and
advisory
labels
During
manufacture,
warning
and advisory labels are
attached
to
the
system
to
indicate
potential
hazards and components,
which
should
not
be
operated
or
maintained
without
first
reading
the
relevant
manual. Typical labels and
their
meanings are
as
follows:
~
DANGER
-----
,-,.----".-
RF
ENERGY
«t
l
-.»
Disconnect
electrical
supply
before
servicing
Danger
of
physical
injury
from
RF
radiation
or
from
touching
components
within
the
labelled
equipment.
~
WARNING
PINCH POINT
....
.
Keep
hands
away
Danger
of
trapping
limbs, fingers etc.
In
the
labelled
equipment.
from
chamber
lid
when
closing.
Lfi\
WARNING
~------
STRONG
MAGNETIC
FIELD
n
Avoid
contact
with
this
area.
Danger
of
physical
injury
from
the
Strong
Magnetic
Field generated by
the
labelled
equipment.
&
WARNI~G
Caution,
hot
surface
IEC
417, No.
5041
( (
('
HOT
SURFACE
) ) )
Do
not
touch
-
~
DANGER
,
~-~---
lOW
TEMPERATURE
Wear
thermal
*
protective
gloves
Danger
of
physical injury,
from
the
labelled
equipment.
WARNING
SERVICE BY
QUALIFIED STAFF
ONLY
Refer
to
manual
Read
the
relevant
manual
before
proceeding
to
operate
or
maintain
the
labelled
equipment.
!AI
WARNING
~-~.~-----
RF
&
UV
RADIATION.
DO
NOT
USE
THIS
PORT
~.~
FOR
VIEWING
WITH
THE
a
WI~~~~~
~:SH
SHIELD
IN
PLACE
&I
~J\RNING
._-,-----
LASER
BEAM
Disconnect
~
electrical
supply
before
servicing
Danger
of
physical
injury
from
RF
and UV
radiation
from
the
labelled
components.
Danger
of
physical
injury
from
Laser Beam
generated
by
the
labelled
components.
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2004
Health and Safety
Page 1-16
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2005, 06:31