Oxford-100-Manual.pdf - 第274页
All OIPT Systems Oxford Instruments Plasma Technology System Manual 3. Test and setting up WARNING HAZARDOUS RF VOLTAGE· CONTACT CAN CAUSE DEATH, SEVERE INJURY OR BURNS. ANY WORK REQUIRING THE REMOVAL OF COVERS OR PANELS…
System Manual
Oxford
Instruments
Plasma
Technology
All
OIPT Systems
2.4
Sense
and
control
PCB
Refer
to
drawing
94-SEOOA
17801
for
a circuit diagram
of
the
AMU. The
layout
of
the
Sense
and Control
PCB
is
shown in Fig 4 .
TP.
..1.ED1
ba
_LK7
LK6
~I
2
Ii
Iii.
LK104
b_a
LK1061bla
-.LK102
a b
em
LK107211'!1
Iii
LK105
".
• LED 102
TP41
TP20
TP30e
TP3e
LED 3
•
LK3
I~
• LED
101
eTP101
4i\mDmI:mI
LED 5
eTP7
e
LED4
TP6.
Fig 4: Sense
and
control PCB layout
Printed: 5-Jan-06, 8:03
DIPT
Automatch
Unit
Page 7
of
20
Issue
6:
February
05
All
OIPT Systems
Oxford
Instruments
Plasma
Technology
System Manual
3. Test
and
setting
up
WARNING
HAZARDOUS
RF
VOLTAGE·
CONTACT CAN CAUSE DEATH,
SEVERE
INJURY
OR BURNS.
ANY
WORK REQUIRING
THE
REMOVAL
OF
COVERS
OR
PANELS MUST
ONLY
BE
PERFORMED BY AUTHORISED PERSONNEL WHO
ARE
AWARE
OF
THE HAZARDS INVOLVED.
NOTE:
Detailed test instructions are contained in
Oxford
Instruments Plasma Technology
Work
Instruction No.
39.
The
following
is
a summary
for
the
benefit
of
skilled service
engineers.
It
should
not
be necessary
for
operators
to
perform
these setting
up
operations.
3.1
Overview
Steps 1-8:
RF
POWER
SUPPLY
OFF
Connect
AMU
to
system
Set mechanical
movement
range
Confirm
end-stop points
Steps 1
to
5
Step 6
Step 7
I
Set gain levels
1
I
Find manual match
I
!
I
Set
park
positions
I
!
I
Set
RV1
and
RV2
I
I
!
Confirm
auto-match
for
low
power
operation
!
Confirm
auto-match
for
high
power
operation
Step 8
Steps 9
to
12
Step
13
Step 14
Step
15
Issue
6:
February 05
OIPT
Automatch
Unit
Page 8
of
20
Printed: 5-Jan-06. 8:03
System
Manual
3.2
Procedure
Oxford
Instruments
Plasma
Technology
All OIPT Systems
WARNING
HAZARDOUS
RF
VOLTAGE·
CONTACT CAN CAUSE DEATH,
SEVERE
INJURY
OR
BURNS.
ENSURE THAT
THE
RF
SUPPLY IS SWITCHED
OFF
WHILE CARRYING OUT
STEPS
1 TO
8.
1)
Connect
the
AMU
to
the
system.
Make
a
good
earth
bond
between
the
vacuum
chamber and
the
AMU
chassis.
2) Connect
the
output
strap
to
the
plasma electrode
with
at
least a 25
mm
wide
copper
strap,
with
at
least
10
mm
clearance
between
the
live strap and any earthed part.
3)
Confirm
the
polarity
and
voltage
of
the
dc
power
source
before
connecting
to
the
Sense and
Control
PCB:
JP7
pin
1
JP7
pin
2
+24 Vdc
OV
4)
Ensure
the
ventilation
fans are all
pulling
air
out
of
the
automatch
case
and check
the
system
cooling
is
turned
on. For sense
board
cooling, check
one
fan
is
pulling
air
out
and
one
is
pulling
air in
to
the
sense board section.
5)
Confirm
the
operation
of
each
motor
using
the
manual drive.
An
increase in
capacitor
position
should
make
the
vanes overlap more. In
the
case
of
a vacuum
capacitor, an increase in
position
should
turn
the
capacitor
shaft
anti-clockwise,
when
looking
at
it
from
the
motor
end
(see
Fig
5).
Check
with
a capacitance
meter
in
case
of
doubt.
If
the
motors
do
not
turn
in
the
correct
direction
check
the
plug
in connector on
the
board,
refer
to
DIPT
Work
Instruction No.
39.
6a) Calibrate
the
motors
and
their
respective positions
as
follows:
For
gear
driven
capacitors: Loosen screws
retaining
the
motors
to
the
AMU
box,
but
don't
remove
completely
and ensure
the
gears
don't
mesh.
For
direct
drive
capacitors: Unscrew
the
motor
plate
attached
to
the
side
of
the
AMU
box
and pull
the
coupling
apart.
Then,
For
Air
Vane
Capacitor
AMU:
Keeping gears separated, overlap
the
vanes fully. Then,
making
sure
that
the
gears
don't
mesh,
drive
both
motors
to
maximum
(999), using
the
AMU
control
panel.
For
Vacuum
Capacitor
AMU
(AMU
board
REV05
and
earlier):
Set
the
capacitor positions and drive
motors
to
their
required position according
to
the
system
type
as
shown
in
the
following
table:
Printed: 5-Jan-06, 8:03
DIPT
Automatch
Unit
Page 9
of
20
Issue
6:
February
05