Oxford-100-Manual.pdf - 第292页

Plasma lab System 100 (ICP 180) REAR VIEW Oxford Instruments Plasma Technology Illustrated Parts Catalogue Services panel (see Sub-sections 0.5 - Pneumatics 0.6 - Nitrogen purge and 0.7 - Cooling water) Vacuum interlock …

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Plasma
lab
System
100
(ICP
180)
Oxford
Instruments
Plasma
Technology
Illustrated Parts Catalogue
Location
of
major
components
FRONT VIEW
II
VAT APC
controller
(see
Sub
section
8.2)
Control
panel
(see
Sub-section
0.2)
AMU
controller
(see
Sub
section
6.3)
Turbo
pump
controller
(see
Sub
section
8.2)
Vacuum
capacitance AMU
(see
Sub
section
6.2)
Process
Chamber
(see
Section
3)
Capacitance
manometer
(see
Section
7)
/
~acuum
capacitor
AMU
/ (see
Sub
section
6.1)
/
Wafer
handling
(see
Section
10)
Pump
down
pipe
heater
(see
Sub
section
0.8)
RFG3001
RF
generator
(see
Sub
section
6.4)
RFX600A
RF
generator
(inside)
(see
Sub
section
6.4)
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2:
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02
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Page v
of
vi
Plasma
lab
System
100
(ICP
180)
REAR
VIEW
Oxford
Instruments
Plasma Technology
Illustrated Parts Catalogue
Services
panel
(see
Sub-sections
0.5 -
Pneumatics
0.6 -
Nitrogen
purge
and
0.7 -
Cooling
water)
Vacuum
interlock
switch
(see
Sub
section
8.2)
Pumping
pipework
(see
Sub
section
8.2)
Temperature
controllers
(see
Sub-section
0.8)
\
PLC
No.2
(inside
door)
(see
Sub-section
0.4)
PLC
No.1
(inside
door)
(see
Sub-section
0.4)
Base
of
table
(see Section 5)
Helium
pipe
run
(see
Sub-section
5.4)
Interface PCB
(inside
door)
(see
Sub-section
0.3)
Page vi
of
vi
Penning
unit
(see
Sub
section
7.1)
Power
box
(see
Sub-section
0.1)
Issue
2:
November02
Printed:
16-Jan-06. 15:55
Plasma
lab
System
100
(lep
180)
Oxford
Instruments
Plasma Technology
Illustrated Parts Catalogue
Section 0 -
System
Common
Components
Section 0 -
System
Common
Components
1
100-0-RIE
Base
unit
2
0.1
Power
box
2
0.2
Control
panel 4
0.3
PCBs
5
0.4 Programmable Logic Controllers
(PLCs)
6
0.5 Pneumatic
control
components
7
0.5 Pneumatic
control
components
(continued) 8
0.6
Nitrogen
purge
line
9
0.7
Water
cooling
circuits 10
0.8
Heating
circuits
11
0.9 System
common
components
option
spares 12
Issue
2:
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02
Printed: 16-Jan-06,15:55
Section 0 Page 1
of
12
System Common Components