Oxford-100-Manual.pdf - 第293页

Plasma lab System 100 (lep 180) Oxford Instruments Plasma Technology Illustrated Parts Catalogue Section 0 - System Common Components Section 0 - System Common Components 1 100-0-RIE Base unit 2 0.1 Power box 2 0.2 Contr…

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Plasma
lab
System
100
(ICP
180)
REAR
VIEW
Oxford
Instruments
Plasma Technology
Illustrated Parts Catalogue
Services
panel
(see
Sub-sections
0.5 -
Pneumatics
0.6 -
Nitrogen
purge
and
0.7 -
Cooling
water)
Vacuum
interlock
switch
(see
Sub
section
8.2)
Pumping
pipework
(see
Sub
section
8.2)
Temperature
controllers
(see
Sub-section
0.8)
\
PLC
No.2
(inside
door)
(see
Sub-section
0.4)
PLC
No.1
(inside
door)
(see
Sub-section
0.4)
Base
of
table
(see Section 5)
Helium
pipe
run
(see
Sub-section
5.4)
Interface PCB
(inside
door)
(see
Sub-section
0.3)
Page vi
of
vi
Penning
unit
(see
Sub
section
7.1)
Power
box
(see
Sub-section
0.1)
Issue
2:
November02
Printed:
16-Jan-06. 15:55
Plasma
lab
System
100
(lep
180)
Oxford
Instruments
Plasma Technology
Illustrated Parts Catalogue
Section 0 -
System
Common
Components
Section 0 -
System
Common
Components
1
100-0-RIE
Base
unit
2
0.1
Power
box
2
0.2
Control
panel 4
0.3
PCBs
5
0.4 Programmable Logic Controllers
(PLCs)
6
0.5 Pneumatic
control
components
7
0.5 Pneumatic
control
components
(continued) 8
0.6
Nitrogen
purge
line
9
0.7
Water
cooling
circuits 10
0.8
Heating
circuits
11
0.9 System
common
components
option
spares 12
Issue
2:
November
02
Printed: 16-Jan-06,15:55
Section 0 Page 1
of
12
System Common Components
Plasmalab
System
100
(ICP
180)
100-0-RIE Base
unit
0.1
Power
box
Oxford
Instruments
Plasma
Technology
Illustrated Parts Catalogue
(1
)
CB13
Load
lock
pump
(5)
CB11
Pumpdown
heater
(6)
CB9
Heated
backing
valve
(4)
CB7
Vat
valve
cont.
(4)
CBS
Turbo
cont.
(13)
K4 -
RF
generator
K8 - ICP
generator
(behind
CB2)
(2)
CB 14
ICP
generator
(7)
24V,
±1SV
Power
supply
unit
(8)
Fan and
filter
(13+15)
K6
Loadlock
pump
(13 + 14)
K3
Blower
pump
(13 + 14)
K2
Roots
pump
(9)
K1
Mains
IN
(10)
CB1
Mains
IN
(3)
CB4
RF
generator
(11
)
F1,F2
&F3
fuses
(4)
CB2
24V,
±1SV
Power
suppl
unit
(12)
Mains
filter
System Common Components
Section 0 Page 2
of
12
Issue
2:
November
02
Printed: 16-Jan-06, 15:55