Oxford-100-Manual.pdf - 第294页
Plasmalab System 100 (ICP 180) 100-0-RIE Base unit 0.1 Power box Oxford Instruments Plasma Technology Illustrated Parts Catalogue (1 ) CB13 Load lock pump (5) CB11 Pumpdown heater (6) CB9 Heated backing valve (4) CB7 Vat…
Plasma
lab
System
100
(lep
180)
Oxford
Instruments
Plasma Technology
Illustrated Parts Catalogue
Section 0 -
System
Common
Components
Section 0 -
System
Common
Components
1
100-0-RIE
Base
unit
2
0.1
Power
box
2
0.2
Control
panel 4
0.3
PCBs
5
0.4 Programmable Logic Controllers
(PLCs)
6
0.5 Pneumatic
control
components
7
0.5 Pneumatic
control
components
(continued) 8
0.6
Nitrogen
purge
line
9
0.7
Water
cooling
circuits 10
0.8
Heating
circuits
11
0.9 System
common
components
option
spares 12
Issue
2:
November
02
Printed: 16-Jan-06,15:55
Section 0 Page 1
of
12
System Common Components
Plasmalab
System
100
(ICP
180)
100-0-RIE Base
unit
0.1
Power
box
Oxford
Instruments
Plasma
Technology
Illustrated Parts Catalogue
(1
)
CB13
Load
lock
pump
(5)
CB11
Pumpdown
heater
(6)
CB9
Heated
backing
valve
(4)
CB7
Vat
valve
cont.
(4)
CBS
Turbo
cont.
(13)
K4 -
RF
generator
K8 - ICP
generator
(behind
CB2)
(2)
CB 14
ICP
generator
(7)
24V,
±1SV
Power
supply
unit
(8)
Fan and
filter
(13+15)
K6
Loadlock
pump
(13 + 14)
K3
Blower
pump
(13 + 14)
K2
Roots
pump
(9)
K1
Mains
IN
(10)
CB1
Mains
IN
(3)
CB4
RF
generator
(11
)
F1,F2
&F3
fuses
(4)
CB2
24V,
±1SV
Power
suppl
unit
(12)
Mains
filter
System Common Components
Section 0 Page 2
of
12
Issue
2:
November
02
Printed: 16-Jan-06, 15:55
Plasmalab
System 100
(ICP
180)
Oxford
Instruments
Plasma
Technology
Illustrated
Parts
Catalogue
Note:
The
photograph
above
is a
typical
example
of
a PSU. MCBs (CB1, CB2 etc.)
may
vary
between
machines
according
to
the
voltage
applied
(415V
or
208V)
and
the
equipment
supplied.
When
ordering
MCBs,
please
quote
the
component
number
(e.g.CB6),
the
number
of
sections (e.g.
1,2
or
3 phase)
and
the
part
number
written
on
the
component.
Item
Part
No.
Description
(1)
EFM1606 K.M. SLOW MCB
TRIPLE
POLE
6A
(CB12 & CB13)
(2)
EFM1620
K.M.
SLOW MCB
TRIPLE
POLE
20A
(CB14)
(3) EFM1410 K.M. SLOW MCB
SINGLE
POLE
10A
(CB4 &
CBB)
(4)
EFM1406 K.M. SLOW MCB
SINGLE
POLE
6A
(CB2,
CBS,
CB7
& CB10)
(5)
EFM1404
K.M.
SLOW MCB
SINGLE
POLE
4A
(CB11)
(6)
EFM1402
K.M.
SLOW MCB
SINGLE
POLE
6A
(CB6 & CB9)
(7)
EXP2415
MULTI
alP
PSU
24V/4A,+1-15V/2.5A
(B)
EFA1060 FAN
62mm
ULTRASLIM
AXIAL
24Vdc
(B)
EFA1061
FAN
FILTER
RFI
60/62
mm
(9) EGB2032 CONTACTOR
35A
24VDC DILOAM
KM
(K1)
(9)
EGB2000
CONTACTOR DIODE MODULE
(FOR
K1)
(10)
EFM1632 K.M. SLOW MCB
TRIPLE
POLE
32A
(CB1)
(11) EFH2010C
FUSE
HOLDER PANEL
MTG
20mm
(FS1
-
FS3)
(11)
EFF2030
INS
BOOT
200mm
FUSE
(11
)
EFB2030C
FUSE
20mm
HBC
ANTISURGET
3.15A
(FS3)
(11
) EFF2120C
FUSE
20mm
HBC ANTISURGET
2A
(FS1
&
FS2)
(12)
EFI0050
MAIN
FILTER
3PHASE
50A
(13)
EGB3022 CONTACTOR
20A
24VDC
MIN
(K2, K3, K4, K6 &
KB)
(14)
EGT005B
OIL RELAY 5.5-BA
MIN
(1
EACH
FOR
K2 & K3)
(15)
EGT0057
OIL RELAY 3.7-5.5A
MIN
(FOR
K6)
Issue
2:
November
02
Printed: 16-Jan-06,15:55
Section 0 Page 3
of
12
System
Common
Components