Oxford-100-Manual.pdf - 第298页

Plasma lab System 100 (ICP 180) Oxford Instruments Plasma Technology Illustrated Parts Catalogue 0.4 Programmable Logic Controllers {PLCs} Ple No.1 (1) B&R Mini Controller (2) B&R Analogue Module (3) B&R Digi…

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Plasma
lab
System
100
Clep
180)
0.3
PCBs
Oxford
Instruments
Plasma
Technology
Illustrated Parts Catalogue
Programmable Logic Controller
(PLC)
System 100 Interface PCB
MA91Z21084
View
of
inside
of
door
on
rear left hand panel
Issue
2:
November
02
Printed:
16·Jan-06,15:55
System Common Components
Section 0 Page 5
of
12
Plasma
lab
System
100
(ICP
180)
Oxford
Instruments
Plasma
Technology
Illustrated
Parts
Catalogue
0.4
Programmable
Logic
Controllers
{PLCs}
Ple
No.1
(1) B&R Mini Controller
(2) B&R Analogue Module
(3) B&R Digital Module
J
Unit located inside rear left end door
(9) Analogue Output (8) Analogue Input
Module Module
View
inside
door
at
right hand end
PLC NO.2
I
(10) Interface
PCB
(6)
B&R
PLC2000
i,
(7) Digital Module
Item
Part
No.
Description
(1
) EXP0699
B&R
MINICONT
WITH
CARDS,
NO
MEM
(2) EXP0725
B&R
ANALOGUE
MODULE
41/P 40/P
(3)
EXP0730
B&R DIGITAL
MODULE
1611P
16
O/P
(4)
MA81Z16005
PLC
INTERFACE
PCB
FOR
ANALOG
C
(5) EXP0750
B&R ARCNET INTERFACE TYPE- EE32-0
(6)
EXPOnO
B&R
PLC
2000
(PLC
No.2)
(7) EXP0078 DIGITAL
MODULE
(PLC
No.2)
(8)
EXPOO72
ANALOGUE
INPUT
MODULE
(PLC
No.2)
(9) EXP0074
ANALOGUE
OUTPUT
MODULE
(PLC
No.2)
10
MAOOZ24915 RS232/RJ68 BLUE
PLC
PCB
(PLC
No.2)
System
Common
Components
Section
0 Page 6
of
12
Issue
2:
November
02
Printed:
16-Jan-06. 15:55
Plasmalab
System
100
(ICP
180)
Oxford
Instruments
Plasma
Technology
Illustrated Parts Catalogue
0.5
Pneumatic
control
components
R
-----------------------------------------G/AIRAiCv/551-
-----------------------------,
G/AIRNLV/501 Restrictor Load lock
Air
reservoir G/AIR/REG/104 vent valve
G/AIRISUN/002
GW0012C
P
Restrictor
G/AIR/REG/104
Foreline vent load lock turbo circuit
-----------------------------------------------------------------------------------,
G/AIRNLV/501
P
R
Air reservoir
G/AIRISUN/002
G/AIRNLV/551
Restrictor
G/AIR/REG/104
Chamber
vent valve
GW0012C
Rotary gate
valve
(if fitted)
Turbo gate
valve
GNACNLV/271
(if fitted)
Foreline vent chamber turbo circuit
C.M. gauge isolation
valve
GW0012C
He backing valve
(optional)
GW012C
Chamber vent valve
GW0012C
Turbo backing valve
GW0012C
Chamber roughing
valve
GNACNLV/125
Turbo backing/purge
valve
GNACNLV/125
Restrictor
G/AIR/REG/104
R
Energy lock out
valve
G/AIRNLV/559
Air OUT
Service
panel
.-
6-way SMC assy. SPABR06
Air
IN
P G/AIRNLV/506 To wafer clamp and
1--1j1-
......
1-f-;-~-~-~-
~-
-~-~-~-~-~-
~-
-=-~-~-=::-
~~============t::j!'
~i:e~r~~~:
0.8)
Note
-
Air
tubing
is
blue
Issue
2:
November
02
Printed: 16-Jan-06.15:55
System Common Components
Section 0 Page 7
of
12