Oxford-100-Manual.pdf - 第302页

Plasma lab System 100 (ICP 180) Oxford Instruments Plasma Technology Illustrated Parts Catalogue 0.7 Water cooling circuits Service panel Water IN Water OUT Water IN Water OUT Water IN Water OUT Water IN Valve supplied a…

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Plasmalab
System
100
(ICP
180)
Oxford
Instruments
Plasma
Technology
Illustrated
Parts Catalogue
0.6
Nitrogen
purge
line
Check valve
GW0605
Air OUT
Gauge
G/AIR/REG/570
Regulator
G/AIR/REG/560
Set to
0.5/0.7 bar
Note
-
Nitrogen
tubing
is
yellow.
Issue
2:
November
02
Printed: 16-Jan-06. 15:55
Maglev turbo pipe run
Mass flow meter
M/MTR/MFM/003
Restrictor
G/AIR/REG/106
Restrictor
G/AIR/REG/106
Restrictor
G/AIRIREG/106
Section 0 Page 9
of
12
Solenoid switch & T piece
(supplied with Maglev
Turbo only)
Chamber
vent valve
GW0012C
Foreline
vent valve
GW0012C
System
Common
Components
Plasma
lab
System
100
(ICP
180)
Oxford
Instruments
Plasma Technology
Illustrated Parts Catalogue
0.7
Water
cooling
circuits
Service
panel
Water
IN
Water OUT
Water
IN
Water OUT
Water
IN
Water OUT
Water
IN
Valve supplied and fitted
with Maglev turbo only
1/4G
1/4G
3/8G
3/8G
1/4G
Thermocouple
G/GAS/ROT
1800
1/4G
1/4G
TURBO
._._._._._._._._._._._._._._.~
~._._._._._._._._._._._._._._.J
ICP R.F. GENERATOR
._._.-._._._._._._._._._._._.~
~._._._._._._._._._._._._._._.J
ICPCOIL
'-'-'-'-'-'-'-'-'-'-'-'-'-'-')
~._._._._._._._._._._._._._._.J
LOWER ELECTRODE
'-'-'-'-'-'-'-'-'-'-'-'-'-'-')
~._._._._._._._._._._._._._._.J
ELECTRODE AMU
(OPTIONAL COOLING)
'-'-'-'-'-'-'-'-'-'-'-'-'-'-')
I
I
I
I
I
~._._._._._._._._._._._._._._.J
ICP+
ICPAMU
Water OUT
Note - Water tubing
is
green
Flow Switch
GIWTR/FLW/002
1/4G
I·-·-·-·-·-·-·-·_·_·_·_·_·_·-·~
I I
I I
I I
I I
I I
~._._._._._._._._._._._._._._.J
System Common Components
Section 0 Page 10
of
12
Issue
2:
November 02
Printed: 16-Jan-06, 15:55
Plasmalab
System
100
(ICP
180)
Oxford
Instruments
Plasma
Technology
Illustrated Parts Catalogue
0.8
Heating
circuits
Heater
controllers
(EXZ0200)
on
rear panel (see note below)
/~
/ .
///
/ /
/ /
\/
Thermocouple
(EQT0002)
attached
to
upper
chamber
4
firerods
(G/SUN/HET/010)
one
in each
corner
of
upper
chamber
\\
\ \
\ \
\ \
\ \
\ \
\ \
\ \
\ \
\ \
\ \
\\
, \
\ \
\ \
\\
\\
\ \
\ \
\ \
\ \
\ \
\ \
\
\"1
" I
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II
II
II
I'
,I
I'
1/
/ !
I I
/ I
I I
/ /
I I
II
/ /
II
r
J
I
'/
V
Thermocouple
(EQT0002)
under
pump
down
heater
mat
Pump
down
heater
mat
for
200
mm
pipe
- 450W
(MD91A17964)
Pump
down
heater
mat
for
160
mm
pipe
-
(MDOOC23106)
Note: Temperature controller (EXZ0200) fitted before September 2002. Since September 2002
type EXZ0093SP - Watlow Series 93 temperature controller fitted.
Issue
2:
November
02
Printed: 16-Jan-06,15:55
Section 0 Page
11
of
12
System Common Components