Oxford-100-Manual.pdf - 第303页

Plasmalab System 100 (ICP 180) Oxford Instruments Plasma Technology Illustrated Parts Catalogue 0.8 Heating circuits Heater controllers (EXZ0200) on rear panel (see note below) /~ / . /// / / / / \/ Thermocouple (EQT0002…

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Plasma
lab
System
100
(ICP
180)
Oxford
Instruments
Plasma Technology
Illustrated Parts Catalogue
0.7
Water
cooling
circuits
Service
panel
Water
IN
Water OUT
Water
IN
Water OUT
Water
IN
Water OUT
Water
IN
Valve supplied and fitted
with Maglev turbo only
1/4G
1/4G
3/8G
3/8G
1/4G
Thermocouple
G/GAS/ROT
1800
1/4G
1/4G
TURBO
._._._._._._._._._._._._._._.~
~._._._._._._._._._._._._._._.J
ICP R.F. GENERATOR
._._.-._._._._._._._._._._._.~
~._._._._._._._._._._._._._._.J
ICPCOIL
'-'-'-'-'-'-'-'-'-'-'-'-'-'-')
~._._._._._._._._._._._._._._.J
LOWER ELECTRODE
'-'-'-'-'-'-'-'-'-'-'-'-'-'-')
~._._._._._._._._._._._._._._.J
ELECTRODE AMU
(OPTIONAL COOLING)
'-'-'-'-'-'-'-'-'-'-'-'-'-'-')
I
I
I
I
I
~._._._._._._._._._._._._._._.J
ICP+
ICPAMU
Water OUT
Note - Water tubing
is
green
Flow Switch
GIWTR/FLW/002
1/4G
I·-·-·-·-·-·-·-·_·_·_·_·_·_·-·~
I I
I I
I I
I I
I I
~._._._._._._._._._._._._._._.J
System Common Components
Section 0 Page 10
of
12
Issue
2:
November 02
Printed: 16-Jan-06, 15:55
Plasmalab
System
100
(ICP
180)
Oxford
Instruments
Plasma
Technology
Illustrated Parts Catalogue
0.8
Heating
circuits
Heater
controllers
(EXZ0200)
on
rear panel (see note below)
/~
/ .
///
/ /
/ /
\/
Thermocouple
(EQT0002)
attached
to
upper
chamber
4
firerods
(G/SUN/HET/010)
one
in each
corner
of
upper
chamber
\\
\ \
\ \
\ \
\ \
\ \
\ \
\ \
\ \
\ \
\ \
\\
, \
\ \
\ \
\\
\\
\ \
\ \
\ \
\ \
\ \
\ \
\
\"1
" I
'j
II
II
II
I'
,I
I'
1/
/ !
I I
/ I
I I
/ /
I I
II
/ /
II
r
J
I
'/
V
Thermocouple
(EQT0002)
under
pump
down
heater
mat
Pump
down
heater
mat
for
200
mm
pipe
- 450W
(MD91A17964)
Pump
down
heater
mat
for
160
mm
pipe
-
(MDOOC23106)
Note: Temperature controller (EXZ0200) fitted before September 2002. Since September 2002
type EXZ0093SP - Watlow Series 93 temperature controller fitted.
Issue
2:
November
02
Printed: 16-Jan-06,15:55
Section 0 Page
11
of
12
System Common Components
Plasma
lab
System
100
(ICP
180)
Oxford
Instruments
Plasma
Technology
Illustrated
Parts
Catalogue
0.9
System
common
components
option
spares
OIPT
Part
No.
Qty
Description
100-S-CMP 1
Common
100
PM spares - See Sub-section 11.2
100-S-RIE 1
RI
E
100
PM spares - See Sub-section 11.3
UNIVERSAL
BASE
CONSOLE WITH MODULE CONTROLLER (100·0·RIE)
MAOOZ22000 1
APC
STEPPER
MOTOR DRIVE
ASSY
MA91Z21084
1
100
SYS
PCB
ASSY
POWER BOX
ASSV·
TOTAL
(MA91Z18519)
EGB2000 1 CONTACTOR DIODE MODULE
KM
EGB3022 1 CONTACTOR
20A
24VDC
MIN.KM
EGT0058 1
OIL RELAY
ZE6
4-6A
MIN.
KM
EFM1606 1
K.M. SLOW MCB
TRIPLE
POLE
6A
EFB2010 3
INS
BOOT 20
mm
FUSE
EFF2120
3
FUSE
20
mm
HBC
ANTI-SURGE
2A
EFM1420 1 K.M. SLOW MCB SINGLE
POLE
20A
ESM0201
1
EMERGENCY
STOP
BUTTON
ESZ8112 1 CONTACT BLOCK
EXP2415 1
MULTI
OIP
PSU
24V/4A
+1-
15V/2.5A
- Replaces EXP0012
and
EXP0502
PLC
UNIT
EXP0700 1
B&R MINICONTROLLER 4
SLOT
EXOO725 1
B&R ANALOGUE MODULE.4
EXP0730 1 B&R DIGITAL MODULE
16
lIP
EXP0750 1 B&R ARCNET INTERF. EE32-0
EXP0272 1
PC
ARCNET INTERFACE CARD (EXP0270
obsolete)
EXP0751 1 B&R MINICONTROLLER - Basic system consists; 4
off
Analogue
cards EXP0725, 2
off
Digital
cards EXP0730, 1
off
Arcnet
memory
card
EXP0750
and
1
off
mini
controller
base EXP0700.
BASIC
VACUUM
KIT
GVV0503
1
PTR
PAUL
SERIES
50
NIC
GIV
AC/SEU025
1
NW25
CENTERING RING
System
Common
Components
Section 0 Page
12
of
12
Issue
2:
November
02
Printed: 16-Jan-06, 15:55