Oxford-100-Manual.pdf - 第31页

System Manual Oxford Instruments Plasma Technology Plasma lab System 100 2. Services (lCP 180 & automatic load lock) 2. Services (ICP 180 & automatic load lock) 2-1 2.1 General 2-2 2.2 Services requirements 2-3 2…

100%1 / 362
Plasma
lab
and
lonfab
...
Continued
Oxford
Instruments
Plasma
Technology
Health and Safety
1
On (Supply)
IEC
417, No.5007
0
Off
(Supply)
IEC
417, NO.5008
Earth
(ground)
IEC
417, No.5017
@
Protective
earth
(ground)
IEC
417, NO.5019
3
..............
Three phase
alternating
Current
IEC
617-2 No. 020206
3N~
Three phase
alternating
Current
with
Neutral wire.
&
WARNING
HAZARDOUS
Warns
of
any
voltage
between
208V and 240V
underneath
the
cover.
VOLTAGE
~
,,=._
.'00"00'
supply before
removing cover
&
When
used
on
its
own,
this label warns
of
any
voltage
between
208V
and 240V.
The labels
below
indicate
the
presence
of
high
voltages
within
the
labelled
equipment.
There
is
a
danger
of
electric shock
or
burns
from
touching
components
within
the
labelled
equipment.
&~~riGER
&fit
ER
~~ANGER
~-~~------~
HAZARDOUS
HAZARDOUS
HAZARDOUS
VOLTAGE
VOLTAGE
VOLTAGE
~
",.~
~
,w_
~
""0,"
50/60 hz
50/60
hz
50/60 hz
3 Phase
3 Phase
3
Phase
&DANGER
~DANGER
&:DANGER
~
""''"'"''''
~
"","00"'
~
~OOO,
VOLTAGE
VOLTAGE
VOLTAGE
240
Volts
220
Volts
115
Volts
50/60 hz
50/60 hz
50/60
hz
Issue
11:
August
2004
Health and Safety
Page 1-18
of
18 Printed:29
May
2005. 06:31
System
Manual
Oxford
Instruments
Plasma
Technology
Plasma
lab
System 100
2. Services (lCP
180
&
automatic
load lock)
2.
Services (ICP
180
&
automatic
load
lock) 2-1
2.1
General
2-2
2.2
Services requirements 2-3
2.3
Distribution
and use
of
Nitrogen
vent
and
turbo
purge
gas 2-3
2.4
Services diagrams 2-4
Fig 2.1: System 100
(ICP
180/380) services
flow
diagram
2-5
Fig 2.2: System 100
pneumatic
circuit
diagram
2-6
Printed
25
May
2005 10:12
Services
OCP
180 and
Automatic
Load Lock)
Page
2-1
of6
Issue
2:
February 02
Plasma
lab
System
100
2.1
General
Oxford
Instruments
Plasma Technology
System Manual
The services requirements
for
the
Plasma
lab
System
100 are given in
two
appendices
to
this
manual:
Appendix
S
Appendix
I
Services Specifications
for
Plasma
lab
and
lonfab
Systems. This
document
gives generic
information
and
mandatory
requirements
for
all services.
Plasmalab
System
100
Installation
Data Sheets. This
document
gives
the
information
necessary
to
prepare
the
environment
for
the
Plasmalab
System
100. Services
information
includes electrical
power
consumption
and
cooling
water
flow
rates. References are made
to
the
relevant
mandatory
services requirements, listed
in
'Services Specifications
for
Plasma
lab
and
lonfab
Systems'
(see
Appendix
S).
Services diagrams
of
the
Plasma
lab
System
100
(ICP
180 +
automatic
load lock) are given in
the
following
drawings:
SP91C24171
System 100
(ICP
180) Services
flow
diagram
SP91
B24018 System 100 Pneumatic
circuit
These
drawings
are located in
Volume
2
of
this manual. Illustrations
of
these
drawings
are
also given in sub-section 2.4, page 2-4.
Issue
2:
February 02
Services
OCP
180 and
Automatic
Load Lock)
Page 2-2
of
6 Printed 25
May
200510:12