Oxford-100-Manual.pdf - 第312页

Plasma lab System 100 (Iep 180) Oxford Instruments Plasma Technology Illustrated Parts Catalogue 5.2 RIE + He variable height table (100-5-26A) 1 ._---@ ::>?1it1l-+-------@ ~-------@ @ DETAILS 25 B 't~.~ (~j r6:&…

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Plasma
lab
System
100
(ICP
180)
Oxford
Instruments
Plasma
Technology
Illustrated
Parts
Catalogue
Item
No.
in
OIPT
Part
Number
Description
illustration
100·5·36A
STANDARD He BACKED LOWER
ELECTRODE
100·5·36A101
STANDARD He BACKED LOWER ELECTRODE· ANODISED
MA91Z21747
RIE
TABLE ASSV
(3
PIN L1Fn
MA91A22537
WAFER CLAMP ASSEMBLV
200
PORT
MA91C20442
HELIUM PIPE RUN ASSEMBLV
1
MD91D21723
TABLE TOP PLUG
1a
MA91D21724
TABLE TOP PLUG ANODISED (ALT TO ITEM 1)
2
MD91D22533
WAFER CLAMP RING
SUPPORT
3
G/SEUO-V/218C
3.5 x 31.3
mm
VITON
'0'
RING BS218
4
MA91D17600
PIN WELDED ASSEMBLY
5
MD91D17604
FLANGED
BUSH
6
MD91D17602
HOUSING
7
G/SUN/BSH/123 OILiTE
BUSH
16
x 20LG
QM21-20
8 G/AIR/CYLl320 20
mm
CYLINDER CDQ2B20-20D
9
G/SUN/SPG/012
COMPo
SPRING
LEE
No. LCM-050C-5 (NOT SHOWN)
10
G/SEUO-V/146C 2.6 x 66.3
mm
VITON
'0'
RING BS146
11
MD81D14110
COMPRESSION RING
12
MD81C14107 TABLE FEEDTHROUGH
13
G/SEUO-V/829C 3.5 x 47.6
mm
VITON
'0'
RING BS829
14
MD81D14109
CLAMPING FLANGE
15
MD81D14111
SPACER
16
MD91D21715
PIN
LIFT
ROD
17
MD81C14104
WATER COOLED CLAMP
18
MA91C19809
BELLOWS WELDED ASSEMBLY
19
MD91D19679
CYLINDER
SPACER
20
MD91D21408
SPRING
SPACER
21
MD91D21407
SPRING
SHOULDER
22
MD91D23589
CYLINDER MOUNTING BRACKET
23 G/AIR/CYLl315 AIR CYLINDER CDQ2B20-15D (SMC)
24
G/SU
N/SPG/008
SPRING
COMPo
OlD 31.75 x 50.8 x 2.6 (NOT SHOWN)
25
MD91B19672
TABLE SUPPORT TUBE
26 MD91C19935 DARK
SPACE
SHIELD 200
DIA
27
MD81D14116
ISOLATOR WASHER
(RIE
TABLE)
28
MA91B21716
TABLE ASSEMBLY
(FOR
PIN
LIFT
TOP)
29 MD91C21713 PIN
LIFT
STAR
30
MD91D21714
PIN
LIFT
ROD
31
MD91C21712
TABLE
UPPER
SURFACE
31a
MA91C21725
TABLE
UPPER
SURFACE
ANODISED (ALT TO ITEM 31)
32
MD91B22531 WAFER CLAMP
BOnOM
PLATE
33
MD91D22532
WAFER CLAMP
SUPPORT
ROD
34 MA91B22491 RETAINING RING
FOR
WAFER CLAMP
35a
MD91B22327
2"
DIA
WAFER CLAMP - QUARTZ
35b
MD91B22277
3"
DIA WAFER CLAMP - QUARTZ
35c
MD91B22328
4"
DIA
WAFER CLAMP - QUARTZ
35d
MD91B22938
4%"
DIA
WAFER CLAMP - QUARTZ
35e
MD91B24693
5"
DIA
WAFER CLAMP - QUARTZ
35f
MD91B22329
6"
DIA WAFER CLAMP - QUARTZ
35q
MD91B23026
8"
DIA
WAFER CLAMP - QUARTZ
G/AIRIVLV/502 SMC
ASSY.
VZ3140/5MNZ/001
G/AIRIREG/104
INLINE FLOW
REG.
AS1001F-04
G/AIR/CYLl807
REED
SWITCH SMC No.
D-A73L
EQT0014
TYPE
17
Pt
RES
THERMOMETER
Note:
See
sub
Section 0,5
for
hydraulic
components
and
sub Section 5.4
for
the
helium
pipe
run.
Issue
2:
November
02
Printed: 16-Jan-06, 15:55
Section 5 Page 3
of
10
Lower
Electrode
Plasma
lab
System
100
(Iep
180)
Oxford
Instruments
Plasma Technology
Illustrated Parts Catalogue
5.2
RIE
+ He
variable
height
table
(100-5-26A)
1
._---@
::>?1it1l-+-------@
~-------@
@
DETAILS
25
B
't~.~
(~j
r6:'i···'==
...
·.~
,,,~
>
•
·-c
<{f~~
Q~
Lower Electrode
Section 5 Page 4
of
10
Issue
2:
November 02
Printed:
16·Jan·06,15:55
Plasmalab
System
100
(ICP
180)
Oxford
Instruments
Plasma
Technology
Illustrated
Parts
Catalogue
Item
No.
in
OIPT
Part
Number
Description
illustration
100-5·26A
RIE + He VARI HEIGHT TABLE
MA91Z21031
ELECTRODE LWR RIE
He
VARI + CLAMP
MA91A21088
WAFER CLAMP ASSEMBLV
MA91C20442
HELIUM PIPE RUN ASSEMBLV
1
MD91B23034
DARK
SPACE
SHIELD
2
MD91D21077
ROD (3
OFF)
3
MD91D21077
BUSH (3
OFF)
4
MA91D21074
CAP (3
OFF)
5
MD91D21288
SLEEVE
(WAFER CLAMP) (3
OFF)
5a
G/SUN/SPG/017
SPRING
COMPRESSION D22470 (INSIDE ITEM 5)
6
MD91D21287
PLUG (WAFER CLAMP) (3
OFF)
7
MA91D21352
FRICTION WELD JOINT 3/8" TUBE
8
MD91D21714
WAFER LIFTING PIN (3
OFF)
8a MD91C21713
PIN
LIFT
STAR
9 MD91B21711 TABLE
MAIN
BODY
10
MD91C19695
TABLE LOWER
PLATE
(RIE)
11
MD91C21010 WATER COOLING TUBE
12
MD91C21011 TABLE SUPPORT TUBE
13
MA91A19142
BELLOWS ASSEMBLY
14
G/SEUO-V/146C
2.6 x 66.3
mm
VITON
'0'
RING BS146
15
MD81C14107 TABLE FEEDTHROUGH
16
G/SEUO-V/829C
3.5 x 47.6
mm
VITON
'0'
RING BS829
17
MD81D14110
COMPRESSION RING
18
MD81D14109
CLAMPING FLANGE
19
MD81C14104 WATER COOLED CLAMP
20
MD81D14111
SPACER
21
MA91C19809
BELLOWS WELDED ASSEMBLY
21a
G/SU
N/SPGI008
SPRING
COMPo
OlD 31.75 x 50.8 x 2.6 (INSIDE ITEM
21)
22 G/AIR/CYU315 AIR CYLINDER CDQ2B20-15D (SMC)
23
MD91D23589
CYLINDER
MOUNTING
BRACKET
24
MD91D21407
SPRING
SHOULDER
25
MD91D21408
SPRING
SPACER
26
MD91D19679
CYLINDER
SPACER
27
MD91D23105
PIN
LIFT
ROD
28
MD91B21005
TABLE
SUPPORT
TUBE
29
MD91B22277
3"
DIA
WAFER CLAMP - QUARTZ -
SEE
SUB-SECTION
5.1
for
OTHER AVAILABLE WAFER CLAMPS
30
MA91B22491 RETAINING RING
FOR
WAFER CLAMP
G/AIRIVLV/502 SMC
ASSY.
VZ3140/5MNZIOOl
G/AIR/REG/104
INLINE FLOW
REG.
AS1001F-04
G/AIR/CYU807
REED
SWITCH SMC No. D-A73L
G/SUN
BRG/010 LINEAR
MOTION
GUIDE
G/SUN/ACT/002 TABLE
LIFT
ACTUATOR
EQTOO14
TYPE
17 Pt
RES
THERMOMETER
Note: See
sub
Section 0.5
for
hydraulic components and sub Section 5.4 for the helium pipe run.
Issue
2:
November
02
Printed: 16-Jan-06.15:55
Section 5 Page 5
of
10
Lower
Electrode