Oxford-100-Manual.pdf - 第313页

Plasmalab System 100 (ICP 180) Oxford Instruments Plasma Technology Illustrated Parts Catalogue Item No. in OIPT Part Number Description illustration 100-5·26A RIE + He VARI HEIGHT TABLE MA91Z21031 ELECTRODE LWR RIE He V…

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Plasma
lab
System
100
(Iep
180)
Oxford
Instruments
Plasma Technology
Illustrated Parts Catalogue
5.2
RIE
+ He
variable
height
table
(100-5-26A)
1
._---@
::>?1it1l-+-------@
~-------@
@
DETAILS
25
B
't~.~
(~j
r6:'i···'==
...
·.~
,,,~
>
•
·-c
<{f~~
Q~
Lower Electrode
Section 5 Page 4
of
10
Issue
2:
November 02
Printed:
16·Jan·06,15:55
Plasmalab
System
100
(ICP
180)
Oxford
Instruments
Plasma
Technology
Illustrated
Parts
Catalogue
Item
No.
in
OIPT
Part
Number
Description
illustration
100-5·26A
RIE + He VARI HEIGHT TABLE
MA91Z21031
ELECTRODE LWR RIE
He
VARI + CLAMP
MA91A21088
WAFER CLAMP ASSEMBLV
MA91C20442
HELIUM PIPE RUN ASSEMBLV
1
MD91B23034
DARK
SPACE
SHIELD
2
MD91D21077
ROD (3
OFF)
3
MD91D21077
BUSH (3
OFF)
4
MA91D21074
CAP (3
OFF)
5
MD91D21288
SLEEVE
(WAFER CLAMP) (3
OFF)
5a
G/SUN/SPG/017
SPRING
COMPRESSION D22470 (INSIDE ITEM 5)
6
MD91D21287
PLUG (WAFER CLAMP) (3
OFF)
7
MA91D21352
FRICTION WELD JOINT 3/8" TUBE
8
MD91D21714
WAFER LIFTING PIN (3
OFF)
8a MD91C21713
PIN
LIFT
STAR
9 MD91B21711 TABLE
MAIN
BODY
10
MD91C19695
TABLE LOWER
PLATE
(RIE)
11
MD91C21010 WATER COOLING TUBE
12
MD91C21011 TABLE SUPPORT TUBE
13
MA91A19142
BELLOWS ASSEMBLY
14
G/SEUO-V/146C
2.6 x 66.3
mm
VITON
'0'
RING BS146
15
MD81C14107 TABLE FEEDTHROUGH
16
G/SEUO-V/829C
3.5 x 47.6
mm
VITON
'0'
RING BS829
17
MD81D14110
COMPRESSION RING
18
MD81D14109
CLAMPING FLANGE
19
MD81C14104 WATER COOLED CLAMP
20
MD81D14111
SPACER
21
MA91C19809
BELLOWS WELDED ASSEMBLY
21a
G/SU
N/SPGI008
SPRING
COMPo
OlD 31.75 x 50.8 x 2.6 (INSIDE ITEM
21)
22 G/AIR/CYU315 AIR CYLINDER CDQ2B20-15D (SMC)
23
MD91D23589
CYLINDER
MOUNTING
BRACKET
24
MD91D21407
SPRING
SHOULDER
25
MD91D21408
SPRING
SPACER
26
MD91D19679
CYLINDER
SPACER
27
MD91D23105
PIN
LIFT
ROD
28
MD91B21005
TABLE
SUPPORT
TUBE
29
MD91B22277
3"
DIA
WAFER CLAMP - QUARTZ -
SEE
SUB-SECTION
5.1
for
OTHER AVAILABLE WAFER CLAMPS
30
MA91B22491 RETAINING RING
FOR
WAFER CLAMP
G/AIRIVLV/502 SMC
ASSY.
VZ3140/5MNZIOOl
G/AIR/REG/104
INLINE FLOW
REG.
AS1001F-04
G/AIR/CYU807
REED
SWITCH SMC No. D-A73L
G/SUN
BRG/010 LINEAR
MOTION
GUIDE
G/SUN/ACT/002 TABLE
LIFT
ACTUATOR
EQTOO14
TYPE
17 Pt
RES
THERMOMETER
Note: See
sub
Section 0.5
for
hydraulic components and sub Section 5.4 for the helium pipe run.
Issue
2:
November
02
Printed: 16-Jan-06.15:55
Section 5 Page 5
of
10
Lower
Electrode
Plasma
lab
System
100
(ICP
180)
Oxford
Instruments
Plasma
Technology
Illustrated Parts Catalogue
5.3 Cryo
table
(100-5-12A)
I
(100-5-12A/1
-
Anodised)
DETAil B
B
A
®----~L-~
@
@---
@----~U'II'A
@--_.-
DETAllC
Lower Electrode
Section 5 Page 6
of
10
Issue
2:
November 02
Printed: 16-Jan-06. 15:55