Oxford-100-Manual.pdf - 第316页

Plasmalab System 100 (ICP 180) Oxford Instruments Plasma Technology Illustrated Parts Catalogue 5.4 Helium pipe run HELIUM PIPE RUN FOR N2 eYRO/HEATED TABLE I PRES CONTIMASS FLOW MTR MTG PL MD91C22582 GAS CONN FLANGE 1/4…

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Plasmalab System 100
(ICP
180)
Oxford
Instruments
Plasma
Technology
Illustrated
Parts
Catalogue
Item
No.
in
OIPT
Part
Number
Description
illustration
100·5·12A
CRVOTABLE
100·5·12A11 CRVO
TABLE·
ANODISED
MA91Z20975
TABLE ASSV (.1501+140C)
MA91A20949
ELECTRODE
LOWER ASSV (.1501+140C)
ANODISED
MA91A22537
WAFER CLAMP ASSEMBLV
200
PORT
MA91C20442
HELIUM
PIPE
RUN ASSEMBLV
1
MD91D22533
WAFER CLAMP RING SUPPORT
2
G/SELlO-
V
1218C
3.5 x 31.3
mm
VITON
'0'
RING BS218
3
MA91D17600
PIN
WELDED ASSEMBLY
4
MD91D17604
FLANGED
BUSH
5
MD91D17602
HOUSING
6
G/SUN/SPGI012
COMPo
SPRING
LEE
No. LCM-050C-5 (NOT SHOWN)
7
G/SUN/BSH/123
OILiTE
BUSH
16
x 20LG
QM21-20
8
G/AIR/CYU320
20
mm
CYLINDER CDQ2B20-20D
9
G/SELIO-V/146C
2.6 x 66.3
mm
VITON
'0'
RING BS146
10
MD81C14107 TABLE FEEDTHROUGH
11
MD81D14110
COMPRESSION RING
12
G/SELIO-V/829C
3.5 x 47.6
mm
VITON
'0'
RING BS829
13
MD81D14109
CLAMPING FLANGE
14
MD81D14111
SPACER
15
MD91D19828
PUSH
ROD
16
MD81C14104 WATER COOLED CLAMP
17
MA91C19809
BELLOWS WELDED ASSEMBLY
18
MD91D19679
CYLINDER
SPACER
19
MD91D21408
SPRING
SPACER
20
MD91D21407
SPRING
SHOULDER
21
G/AIR/CYU315 AIR CYLINDER CDQ2B20-15D (SMC)
22
MD91D23589
CYLINDER
MOUNTING
BRACKET
22a
G/SUN/SPG/008
SPRING
COMPo
OlD 31.75 x 50.8 x 2.6 (NOT SHOWN)
23
MD91B20935
DSS
SUPPORT
TUBE
23a
MD91B20946
DSS
SUPPORT
TUBE ANODISED (ALT. TO ITEM 23)
24
MD91B20939
DARK
SPACE
SHIELD
24a
MD91B20945
DARK
SPACE
SHIELD ANODISED (ALT. TO ITEM 24)
25
MD91D20934
LOCATING RING
26
MA91A20947
ELECTRODE
LOWER ASSEMBLY WELDED
26a
MA91B20944
ELECTRODE
LOWER ANODISED (ALT. TO ITEM 26)
27
MD91C21713 PIN
LIFT
STAR
(UNDER)
28
MD91D21714
PIN
LIFT
ROD (UNDER)
29 MD91B22531
WAFER CLAMP BOTTOM
PLATE
30
MD91D22532
WAFER CLAMP
SUPPORT
ROD
31
MA91B22491 RETAINING RING
FOR
WAFER CLAMP
32a
MD91B22327
2"
DIA
WAFER CLAMP - QUARTZ
32b
MD91B22277
3"
DIA
WAFER CLAMP - QUARTZ
32c
MD91B22328
4"
DIA WAFER CLAMP - QUARTZ
32d
MD91B22938
4W'
DIA
WAFER CLAMP - QUARTZ
32e
MD91B24693
5"
DIA
WAFER CLAMP - QUARTZ
32f
MD91B22329
6"
DIA
WAFER CLAMP - QUARTZ
32q
MD91B23026
8"
DIA
WAFER CLAMP - QUARTZ
G/AIRNLV/502
SMC
ASSY.
VZ3140/5MNZ/001
G/AIR/REG/104
INLINE FLOW
REG.
AS1001F-04
G/AIR/CYU807
REED
SWITCH SMC No.
D-A
73L
EQT0014
TYPE
17 Pt
RES
THERMOMETER
Note: See
sub
Section 0.5
for
hydraulic components and
sub
Section 5.4 for the helium pipe run.
Issue
2:
November
02
Printed: 16-Jan-06. 15:55
Section 5 Page 7
of
10
Lower
Electrode
Plasmalab System 100
(ICP
180)
Oxford
Instruments
Plasma Technology
Illustrated Parts Catalogue
5.4
Helium
pipe
run
HELIUM PIPE RUN FOR N2 eYRO/HEATED TABLE
I
PRES CONTIMASS
FLOW
MTR MTG PL
MD91C22582
GAS CONN FLANGE
1/4"
- NW25
MDOOD17865
:J!::ll=:::::J-
<¢>
VENT PIPEWORK
GAS VALVE
G/GASNLV/009C
'\
GASVALVE
GW0012C
MKS 640 PRES CTRL50 TORR
UMTRlPRE/OO2
MKS 50SCCM He FLOW METER SWAG.
LlMTRlMFM/001 \
\
HELIUM
IN~
PLASMA GAS ISOLATOR ASSEMBLY
MAOOD25487
I
!
R.F.
BOX
TOBELLOWS.e-
WELDED ASSY.
Lower Electrode
Section 5 Page 8
of
10
Issue
2:
November 02
Printed: 16-Jan-06, 15:55
Plasma
lab
System
100
(ICP
180)
Oxford
Instruments
Plasma Technology
Illustrated
Parts
Catalogue
5.5
Lower
electrode
option
spares
OIPT Part
No.
Qtv
Description
MA91Z21747
1
RIE
TABLE
ASSY.
(3
PIN
LIFT)
MA91C19809
1 BELLOWS WELDED ASSEMBLY
G/SUN/SPGI008 1
SPRING
COMPo
OlD 31.75 x 50.8 x 2.6
G/AIR/CYLl315 1 AIR CYLINDER CDW2820-15D
EQT0014
1
TYPE
17 Pt
RES
THERMOMETER
MD91
021723
4 TABLE TOP PLUG
MD91C21712
1
TABLE
UPPER
SURFACE
RIE
HELIUM BACK COOLED
LOWER
ELECTRODE
(100-5-36A)
G/AIRIVLV/502 1 SMC
ASSY.
VZ3104/5MNZ/01
G/AIR/REG/104
1
IN LINE FLOW REGULATOR AS101F-04
HELIUM
PIPE
RUN ASSEMBLY
(MA91C20442)
LlMTR/MFM/OO1 1 MKS 5SCCM He FLOW METER SWAG.
LlMTR/PREI002
1
MKS 640
PRESSURE
CONTROLLER, 50
TORR
MAOOD25487 1 PLASMA GAS ISOLATOR ASSEMBLY
GVV0012C 1
Y<i
SWAGE AIR
CLOSED
VALVE
GIGASIVLV/601 1 CHECK VALVE
2PSI
W'
SWAGELOK
GIGAS/FIT/367C 2
10
mm
PTFE
FERRULE,
BACK
GIGAS/FIT/366C 2
10
mm
PTFE
FERRULE,
FRONT
WAFER CLAMP ASSEMBLY
200
PORT
(MA91A22537)
MA91
017600
2
PIN
WELDED ASSEMBLY
G/AIRlCYLl320 2 20
mm
CYLINDER CDQ2B20-20D
G/SELIO-V/218 2 3.5 x 31.3
mm
VITON
'0'
RING BS218
G/SUN/SPGI012
6
COMPo
SPG.
LEE
No. LCM-050C-5
G/AIR/CYLl807 2
REED
SWITCH SMC No. D-A73L
Issue
2:
November
02
Printed: 16-Jan-06, 15:55
Section 5 Page 9
of
10
Lower
Electrode