Oxford-100-Manual.pdf - 第318页

Plasmalab System 100 (ICP 180) NOTES: Lower Electrode Oxford Instruments Plasma Technology Section 5 Page 10 of 10 Illustrated Parts Catalogue Issue 2: November 02 Printed: 16-Jan-06. 15:55

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Plasma
lab
System
100
(ICP
180)
Oxford
Instruments
Plasma Technology
Illustrated
Parts
Catalogue
5.5
Lower
electrode
option
spares
OIPT Part
No.
Qtv
Description
MA91Z21747
1
RIE
TABLE
ASSY.
(3
PIN
LIFT)
MA91C19809
1 BELLOWS WELDED ASSEMBLY
G/SUN/SPGI008 1
SPRING
COMPo
OlD 31.75 x 50.8 x 2.6
G/AIR/CYLl315 1 AIR CYLINDER CDW2820-15D
EQT0014
1
TYPE
17 Pt
RES
THERMOMETER
MD91
021723
4 TABLE TOP PLUG
MD91C21712
1
TABLE
UPPER
SURFACE
RIE
HELIUM BACK COOLED
LOWER
ELECTRODE
(100-5-36A)
G/AIRIVLV/502 1 SMC
ASSY.
VZ3104/5MNZ/01
G/AIR/REG/104
1
IN LINE FLOW REGULATOR AS101F-04
HELIUM
PIPE
RUN ASSEMBLY
(MA91C20442)
LlMTR/MFM/OO1 1 MKS 5SCCM He FLOW METER SWAG.
LlMTR/PREI002
1
MKS 640
PRESSURE
CONTROLLER, 50
TORR
MAOOD25487 1 PLASMA GAS ISOLATOR ASSEMBLY
GVV0012C 1
Y<i
SWAGE AIR
CLOSED
VALVE
GIGASIVLV/601 1 CHECK VALVE
2PSI
W'
SWAGELOK
GIGAS/FIT/367C 2
10
mm
PTFE
FERRULE,
BACK
GIGAS/FIT/366C 2
10
mm
PTFE
FERRULE,
FRONT
WAFER CLAMP ASSEMBLY
200
PORT
(MA91A22537)
MA91
017600
2
PIN
WELDED ASSEMBLY
G/AIRlCYLl320 2 20
mm
CYLINDER CDQ2B20-20D
G/SELIO-V/218 2 3.5 x 31.3
mm
VITON
'0'
RING BS218
G/SUN/SPGI012
6
COMPo
SPG.
LEE
No. LCM-050C-5
G/AIR/CYLl807 2
REED
SWITCH SMC No. D-A73L
Issue
2:
November
02
Printed: 16-Jan-06, 15:55
Section 5 Page 9
of
10
Lower
Electrode
Plasmalab
System
100
(ICP
180)
NOTES:
Lower
Electrode
Oxford
Instruments
Plasma
Technology
Section 5 Page 10
of
10
Illustrated Parts Catalogue
Issue
2:
November 02
Printed: 16-Jan-06. 15:55
Plasmalab
System 100
(ICP
180)
Oxford
Instruments
Plasma
Technology
Illustrated Parts Catalogue
Section 6 -
RF
supplies
and
automatch
Section
6 •
RF
supplies
and
automatch
1
RIE
600W Generator +
OPT
AMU
200
pipe
(100-6-200V) 3
6.1
Automatch
assembly - vac cap etch
5-turn
coil (MAOOA23771) 3
ICP180
FLOAT
TOP
ASSY.
ALUMINA (100-6-56) 5
6.2
Automatch
assembly - vac cap (MAOOZ23828) 5
6.3
AMU
control
panel 6
6.4
RF
generators 7
6.5
RF
supplies and
automatch
option
spares 8
6.6
RF
supplies and
automatch
(vac cap) ICP180
option
spares 8
Issue
2;
November 02
Printed: 16-Jan-06. 15:55
Section 6 Page 1
of
8
RF
Supplies
and
Automatch