Oxford-100-Manual.pdf - 第320页

Plasmalab System 100 (ICP 180) Oxford Instruments Plasma Technology Illustrated Parts Catalogue --- (5) AMU Control PCB (3) RF Inlet VACUUM AUTOMATCH ASSEMBLY EXTERNAL VIEW (4) DC motor and gearbox assy (2) Trimpots 100k…

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Plasmalab
System 100
(ICP
180)
Oxford
Instruments
Plasma
Technology
Illustrated Parts Catalogue
Section 6 -
RF
supplies
and
automatch
Section
6 •
RF
supplies
and
automatch
1
RIE
600W Generator +
OPT
AMU
200
pipe
(100-6-200V) 3
6.1
Automatch
assembly - vac cap etch
5-turn
coil (MAOOA23771) 3
ICP180
FLOAT
TOP
ASSY.
ALUMINA (100-6-56) 5
6.2
Automatch
assembly - vac cap (MAOOZ23828) 5
6.3
AMU
control
panel 6
6.4
RF
generators 7
6.5
RF
supplies and
automatch
option
spares 8
6.6
RF
supplies and
automatch
(vac cap) ICP180
option
spares 8
Issue
2;
November 02
Printed: 16-Jan-06. 15:55
Section 6 Page 1
of
8
RF
Supplies
and
Automatch
Plasmalab
System 100
(ICP
180)
Oxford
Instruments
Plasma
Technology
Illustrated Parts Catalogue
---
(5) AMU
Control
PCB
(3) RF
Inlet
VACUUM AUTOMATCH ASSEMBLY EXTERNAL VIEW
(4) DC
motor
and
gearbox
assy
(2)
Trimpots
100k
(2
off)
\
(7) Fan
Finger
Guard
(6) Fan
(1)
Capacitive
feed
through
(4 off)
VACUUM AUTOMATCH ASSEMBLY INTERNAL VIEW
(21)
Insulator
------
(20) Ferrite
cube
._~
....
(19) AMU
sense
PCB --
(18)
Conductor
(inside
insulator)
(17) AMU DC
bias
coil
(16)
Cooling
ring
assy
(8)
Modified
gear
(9) 1
OOOpf
capacitor
drive
adaptor
(10)
500pf
__
capacitor
insulator
(11)
500pf
vacuum
capacitor
(12)
1000pf
vacuum
capacitor
(13) SIS
tube
PTFE
tube
(15)
Cooling
connectors
RF
Supplies
and
Automatch
Section 6 Page 2
of
8
Issue
2:
November
02
Printed: 16-Jan-06,15:55
Plasmalab
System
100
(ICP
180)
Oxford
Instruments
Plasma
Technology
Illustrated
Parts
Catalogue
RIE
600W
Generator
+ OPT
AMU
200
pipe
(100-6-200V)
OIPT
Part
No.
UGEN/RFG/101
MAOOA23771
MAOOB23328
Description
AE
RFX600A 230V(PASSIVE PANEL)
RF
GENERATOR
AUTOMA
TCH
ASSEMBLY
AMU
CONTROL PANEL
ASSY
6.1
Automatch
assembly
-
vac
cap
etch
5-turn
coil
(MAOOA23771)
Item
OIPT
Part
No.
Qty
Description
1
ECCOO01
4 CAPACITIVE
FEED
THRU
10,000
of
2 ERU0511 2 TRIMPOT
100K
(3006)
SERIES
3
EPPOO05
1 SOCKET G15007H
RR
N CHAS.
(RF
INLET CONNECTOR)
4 MAOOD23738 2 MOTOR
& GEARBOX ASSEMBLY
5
MAOOZ20138
1
AMU
CONTROL
PCB
ASSEMBLY
6 EFA0460C 3 FAN
AXIAL
60 x
60
x 25.4 24 VDC
7 EFA1062
3 FAN FINGER GUARD
60/62
8 MAOOD22225 2
MODIFIED GEAR
9
MDOOD21224
1
1000
pf
VACUUM
CAPACITOR DRIVE ADAPTOR
10
MDOOD21225 1 500
of
VACUUM
CAPACITOR INSULATOR
11
UCAPIVAR/1
06
1 500
of
VACUUM
CAPACITOR
12
UCAPIVAR/110 1
1000
Of
VACUUM
CAPACITOR
13
RITUB/S/S/200C
W'
OlD x 20G 316L
SIS
ELPO
14 RITUB/PTF
1030
¥.i"
OlD x 3/16" I.D
PTFE
TUBE
15
G/GAS/FIT/274C
2 COOLING CONNECTORS
16
MAOOD23772 1 COOLING RING ASSEMBLY
17
MAOOD20107
1
AMU
DC
BIAS COIL
18
MDOOD21243 1 CONDUCTOR
19
MAOOZ18209 1
AMU
SENSE
PCB
ASSY
20 ELZ0015C 2
FERRITE
CUBE
FX-3854
21
MDOOD21242 1 INSULATOR
Issue
2:
November
02
Printed: 16-Jan-06,15:55
Section 6 Page 3
of
8
RF
Supplies
and
Automatch