Oxford-100-Manual.pdf - 第325页

Plasmalab System 100 (ICP 180) 6.4 RF generators Oxford Instruments Plasma Technology VI EW FROM REAR Illustrated Parts Catalogue AE RFX600A 230V (passive panel) RF Generator (UGEN/RFG/101) AE RFG30001 208V 3ph (black bo…

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Plasma
lab
System
100
(ICP
180)
Oxford
Instruments
Plasma Technology
Illustrated
Parts
Catalogue
6.3
AMU
control
panel
AMU CONTROL PANEL ASSY
(1)
Sw1
(2) Sw2, 3 (3) LCD1, LCD2
(2) Sw6, 7
(1) Sw5
I
(4) Rv1, Rv2 (6) Sw4 (5) Sw8 (4) Rv3, Rv4
Note - AMU control panel PCB
assy
- attached to rear
of
panel
Item
OIPT
Part
No.
Qtv
Description
1 ES13l02C 2 SW1, SW5
2 ESTl122C 4
SW2,SW3,SW6,
SW7
3
EDM0200 2 LCD1, LCD2
4 ERU0417C 4 RV1,RV2, RV3,RV4
5
ESMOlll
1 SW4
6
ES13204 1 SW8
7 MAOOZ23250 1
OPT
AMU
CONTROL PANEL
PCB
ASSY
RF
Supplies
and
Automatch
Section 6 Page 6
of
8
Issue
2:
November
02
Printed: 16-Jan-06, 15:55
Plasmalab System 100
(ICP
180)
6.4
RF
generators
Oxford
Instruments
Plasma
Technology
VI
EW
FROM
REAR
Illustrated Parts Catalogue
AE RFX600A 230V (passive panel)
RF
Generator (UGEN/RFG/101)
AE RFG30001 208V 3ph (black box)
RF
Generator (UGEN/RFG/104)
Issue
2:
November
02
Printed: 16-Jan-06,15:55
Section 6 Page 7
of
8
RF
Supplies and
Automatch
Plasmalab
System
100
(ICP
180)
Oxford
Instruments
Plasma
Technology
Illustrated
Parts
Catalogue
6.5
RF
supplies
and
automatch
option
spares
Used on sales options: 81-6-15/1, 81-6-20/2, 81-6-61, 81-6-71, 81-6-80/3, 81-6-80/4,100-6-30,100-6-35.
OIPT
Part
No.
Qtv
Description
MAOOA23771 1 OPT VAC CAP
AUTOMATCH
UNIT
MAOOZ20138 1
AMU
CONTROL
PCB
ASSY
MAOOZ18209 1
AMU
SENSE
PCB
ASSY
UCAPIVAR/110 1
1000pf
VACUUM
CAPACITOR
UCAPIVAR/106 1
500pfVACUUM
CAPACITOR
MAOOD20107 1
OPT
AMU
DC
BIAS COIL
G/SUN/GER/008 1
DC
MOTOR GEARBOX 1250:1
G/SUN/GER/009 1
SERVO
MOTOR 24 VDC RS.440-559
ERV0411 1
SERVO
POTENTIOMETER
10K
OHMS
ECCOO01
1 CAPACITOR
FIT
10,000
pf
ECC0290 2 CAPACITOR PADDING
CER
20%
1 KV
MAOOB23328 1 OPT
AMU
CONTROL PANEL
ASSY
RIE
600W
GEN +
OPT
AMU
200
PIPE
(10-6-200V)
UGEN/RFG/101
1 AE RFX600A
230V
(PASSIVE
PANEL)
RF
GENERATOR
6.6
RF
supplies
and
automatch
{vac cap} ICP180
option
spares
Used on 180
mm
ICP systems from mid-end 2000
OIPT
Part
No.
Qty
Description
MAOOA23828
1
AUTOMATCH
ASSY.
(VAC CAP) ICP180
MAOOZ20138
1
AMU
CONTROL
PCB
ASSY.
MAOOZ18209
1
AMU
SENSE
PCB
ASSY
UCAPIVAR/110
1
VACUUM
CAPACITOR
1000pf
UCAPIVAR/106
1
VACUUM
CAPACITOR
500pf
MAOOD23738
2
MOTOR
& GEARBOX
ASSY.
- Consists
of
G/SUN/GER/009/0121013
UGEN/RFG/103
1
ICP
GENERATOR - AE
RFG
3001
208V
3
ph
(BLACK BOX)
RF
Supplies
and
Automatch
Section 6 Page 8
of
8
Issue
2:
November
02
Printed: 16-Jan-06, 15:55