Oxford-100-Manual.pdf - 第326页

Plasmalab System 100 (ICP 180) Oxford Instruments Plasma Technology Illustrated Parts Catalogue 6.5 RF supplies and automatch option spares Used on sales options: 81-6-15/1, 81-6-20/2, 81-6-61, 81-6-71, 81-6-80/3, 81-6-8…

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Plasmalab System 100
(ICP
180)
6.4
RF
generators
Oxford
Instruments
Plasma
Technology
VI
EW
FROM
REAR
Illustrated Parts Catalogue
AE RFX600A 230V (passive panel)
RF
Generator (UGEN/RFG/101)
AE RFG30001 208V 3ph (black box)
RF
Generator (UGEN/RFG/104)
Issue
2:
November
02
Printed: 16-Jan-06,15:55
Section 6 Page 7
of
8
RF
Supplies and
Automatch
Plasmalab
System
100
(ICP
180)
Oxford
Instruments
Plasma
Technology
Illustrated
Parts
Catalogue
6.5
RF
supplies
and
automatch
option
spares
Used on sales options: 81-6-15/1, 81-6-20/2, 81-6-61, 81-6-71, 81-6-80/3, 81-6-80/4,100-6-30,100-6-35.
OIPT
Part
No.
Qtv
Description
MAOOA23771 1 OPT VAC CAP
AUTOMATCH
UNIT
MAOOZ20138 1
AMU
CONTROL
PCB
ASSY
MAOOZ18209 1
AMU
SENSE
PCB
ASSY
UCAPIVAR/110 1
1000pf
VACUUM
CAPACITOR
UCAPIVAR/106 1
500pfVACUUM
CAPACITOR
MAOOD20107 1
OPT
AMU
DC
BIAS COIL
G/SUN/GER/008 1
DC
MOTOR GEARBOX 1250:1
G/SUN/GER/009 1
SERVO
MOTOR 24 VDC RS.440-559
ERV0411 1
SERVO
POTENTIOMETER
10K
OHMS
ECCOO01
1 CAPACITOR
FIT
10,000
pf
ECC0290 2 CAPACITOR PADDING
CER
20%
1 KV
MAOOB23328 1 OPT
AMU
CONTROL PANEL
ASSY
RIE
600W
GEN +
OPT
AMU
200
PIPE
(10-6-200V)
UGEN/RFG/101
1 AE RFX600A
230V
(PASSIVE
PANEL)
RF
GENERATOR
6.6
RF
supplies
and
automatch
{vac cap} ICP180
option
spares
Used on 180
mm
ICP systems from mid-end 2000
OIPT
Part
No.
Qty
Description
MAOOA23828
1
AUTOMATCH
ASSY.
(VAC CAP) ICP180
MAOOZ20138
1
AMU
CONTROL
PCB
ASSY.
MAOOZ18209
1
AMU
SENSE
PCB
ASSY
UCAPIVAR/110
1
VACUUM
CAPACITOR
1000pf
UCAPIVAR/106
1
VACUUM
CAPACITOR
500pf
MAOOD23738
2
MOTOR
& GEARBOX
ASSY.
- Consists
of
G/SUN/GER/009/0121013
UGEN/RFG/103
1
ICP
GENERATOR - AE
RFG
3001
208V
3
ph
(BLACK BOX)
RF
Supplies
and
Automatch
Section 6 Page 8
of
8
Issue
2:
November
02
Printed: 16-Jan-06, 15:55
Plasmalab
System 100
(ICP
180)
Oxford
Instruments
Plasma
Technology
Illustrated Parts Catalogue
Section 7 - Vacuum
Measurement
Section
7 •
Vacuum
Measurement
1
HEATED/UNHEATED 100 mT
CAPACITIVE
MANOMETER AND
PENNING
GAUGE
(81-7-03/4)/(81-7-03/1) 2
7.1
100mT capacitive
manometer
and
penning
gauge 2
7.2 Vacuum measurement
option
spares 4
Issue
2:
November 02
Printed: 16-Jan-06,15:55
Section 7 Page 1
of
4
Vacuum Measurement