Oxford-100-Manual.pdf - 第327页
Plasmalab System 100 (ICP 180) Oxford Instruments Plasma Technology Illustrated Parts Catalogue Section 7 - Vacuum Measurement Section 7 • Vacuum Measurement 1 HEATED/UNHEATED 100 mT CAPACITIVE MANOMETER AND PENNING GAUG…
Plasmalab
System
100
(ICP
180)
Oxford
Instruments
Plasma
Technology
Illustrated
Parts
Catalogue
6.5
RF
supplies
and
automatch
option
spares
Used on sales options: 81-6-15/1, 81-6-20/2, 81-6-61, 81-6-71, 81-6-80/3, 81-6-80/4,100-6-30,100-6-35.
OIPT
Part
No.
Qtv
Description
MAOOA23771 1 OPT VAC CAP
AUTOMATCH
UNIT
MAOOZ20138 1
AMU
CONTROL
PCB
ASSY
MAOOZ18209 1
AMU
SENSE
PCB
ASSY
UCAPIVAR/110 1
1000pf
VACUUM
CAPACITOR
UCAPIVAR/106 1
500pfVACUUM
CAPACITOR
MAOOD20107 1
OPT
AMU
DC
BIAS COIL
G/SUN/GER/008 1
DC
MOTOR GEARBOX 1250:1
G/SUN/GER/009 1
SERVO
MOTOR 24 VDC RS.440-559
ERV0411 1
SERVO
POTENTIOMETER
10K
OHMS
ECCOO01
1 CAPACITOR
FIT
10,000
pf
ECC0290 2 CAPACITOR PADDING
CER
20%
1 KV
MAOOB23328 1 OPT
AMU
CONTROL PANEL
ASSY
RIE
600W
GEN +
OPT
AMU
200
PIPE
(10-6-200V)
UGEN/RFG/101
1 AE RFX600A
230V
(PASSIVE
PANEL)
RF
GENERATOR
6.6
RF
supplies
and
automatch
{vac cap} ICP180
option
spares
Used on 180
mm
ICP systems from mid-end 2000
OIPT
Part
No.
Qty
Description
MAOOA23828
1
AUTOMATCH
ASSY.
(VAC CAP) ICP180
MAOOZ20138
1
AMU
CONTROL
PCB
ASSY.
MAOOZ18209
1
AMU
SENSE
PCB
ASSY
UCAPIVAR/110
1
VACUUM
CAPACITOR
1000pf
UCAPIVAR/106
1
VACUUM
CAPACITOR
500pf
MAOOD23738
2
MOTOR
& GEARBOX
ASSY.
- Consists
of
G/SUN/GER/009/0121013
UGEN/RFG/103
1
ICP
GENERATOR - AE
RFG
3001
208V
3
ph
(BLACK BOX)
RF
Supplies
and
Automatch
Section 6 Page 8
of
8
Issue
2:
November
02
Printed: 16-Jan-06, 15:55
Plasmalab
System 100
(ICP
180)
Oxford
Instruments
Plasma
Technology
Illustrated Parts Catalogue
Section 7 - Vacuum
Measurement
Section
7 •
Vacuum
Measurement
1
HEATED/UNHEATED 100 mT
CAPACITIVE
MANOMETER AND
PENNING
GAUGE
(81-7-03/4)/(81-7-03/1) 2
7.1
100mT capacitive
manometer
and
penning
gauge 2
7.2 Vacuum measurement
option
spares 4
Issue
2:
November 02
Printed: 16-Jan-06,15:55
Section 7 Page 1
of
4
Vacuum Measurement
Plasma
lab
System
100
(ICP
180)
Oxford
Instruments
Plasma Technology
Illustrated
Parts
Catalogue
HEATED/UNHEATED
100
mT
CAPACITIVE
MANOMETER
AND
PENNING
GAUGE
(81-7-03/4)/{81-7-03/1)
7.1
100mT
capacitive
manometer
and
penning
gauge
100mT CAPACITIVE MANOMETER
(5) 100
mT
capacitive
manometer
(4) NW25
to
1/2"
quick
disconnect
(2) NW25
centring
ring
(1)
NW25
clamp
ring
Vacuum
Measurement
ACT. INVERT. MAG
Section 7 Page 2
of
4
(1) NW25
centring
ring
ali/viton
(2) NW25
clamp
ring
(3)
Isolation
valve
(6)
Act.
Inv. mag.
(penning
unit)
(7)
Line
cordi
spade
tel
plug
Issue
2:
November
02
Printed: 16-Jan-06, 15:55