Oxford-100-Manual.pdf - 第329页
Plasmalab System 100 (ICP 180) Oxford Instruments Plasma Technology Illustrated Parts Catalogue Item OIPT Part No. Qty Description 1 GIV AC/SEU025C 2 NW25 CENTRING RING ALlIVITON 2 GIV AC/CPU025C 2 NW25 CLAMP RING 3 GIVA…
Plasma
lab
System
100
(ICP
180)
Oxford
Instruments
Plasma Technology
Illustrated
Parts
Catalogue
HEATED/UNHEATED
100
mT
CAPACITIVE
MANOMETER
AND
PENNING
GAUGE
(81-7-03/4)/{81-7-03/1)
7.1
100mT
capacitive
manometer
and
penning
gauge
100mT CAPACITIVE MANOMETER
(5) 100
mT
capacitive
manometer
(4) NW25
to
1/2"
quick
disconnect
(2) NW25
centring
ring
(1)
NW25
clamp
ring
Vacuum
Measurement
ACT. INVERT. MAG
Section 7 Page 2
of
4
(1) NW25
centring
ring
ali/viton
(2) NW25
clamp
ring
(3)
Isolation
valve
(6)
Act.
Inv. mag.
(penning
unit)
(7)
Line
cordi
spade
tel
plug
Issue
2:
November
02
Printed: 16-Jan-06, 15:55
Plasmalab
System
100
(ICP
180)
Oxford
Instruments
Plasma
Technology
Illustrated
Parts
Catalogue
Item
OIPT
Part
No.
Qty
Description
1 GIVAC/SEU025C
2
NW25
CENTRING RING ALlIVITON
2 GIV
AC/CPU025C 2
NW25
CLAMP RING
3
GIVACIVLV/125
1 PV25PK ISOLATION VALVE
4 GIVAC/FIT/015C 1
NW25
TO
%"
QUICK DISCONNECT
5 GIV
AC/GGE/625 1 HEATED 100mT MKS CAPACITIVE MANOMETER 6288.1T-D-E-1-8
-
USED
ON 81-7-03/4
5a
GIVAC/GGE/002 1 UNHEATED
100mT
MKS CAPACITIVE MANOMETER
-
USED
ON 81-7-03/1
6
GIV
AC/GGE/004
1 ACT.INVERT.MAG.GGE.AIM-S-NW25 (PENNING UNIT)
7 EWM9307
1
LINE
CORD PLG/SPADE TEL.PLUG
Issue
2:
November
02
Printed: 16-Jan-06,15:55
Section 7 Page 3
of
4
Vacuum
Measurement
Plasma
lab
System
100
(ICP
180)
Oxford
Instruments
Plasma
Technology
Illustrated
Parts
Catalogue
7.2
Vacuum
measurement
option
spares
OIPT
Part
No.
Qtv
Description
HEATED
100
mT
CAPACITANCE
MANOMETER
+ PENNING GAUGE
(81.7·03/4)
GIVAC/GGE/625 1 HEATED
100mT
MKS CAPACITANCE MANOMETER
6288.IT-D-E-1-8 -
USED
ON 81-7-03/4
GIVAC/GGEI002
1 UNHEATED 100mT MKS CAPACITANCE MANOMETER
-
USED
ON
81-7-0311
GIVAC/GGEI004 1 ACT INVERT
MAG
GGE
AIM-V-NW25
(PENNING)
GIVACIVLV/125 1 PV25PK ISOLATION VALVE
GIV
AC/SEU025 1
NW25
CENTERING RING
Vacuum
Measurement
Section 7 Page 4
of
4
Issue
2:
November
02
Printed: 16-Jan-06,15:55