Oxford-100-Manual.pdf - 第331页

Plasma lab System 100 (ICP 180) Oxford Instruments Plasma Technology Illustrated Parts Catalogue Section 8 - Pumping pipework Section 8 • Pumping pipework 1 8.1 General 2 8.2 200mm pipework + 200 VAT APC (1 00-8-20) 3 8.…

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Plasma
lab
System
100
(ICP
180)
Oxford
Instruments
Plasma
Technology
Illustrated
Parts
Catalogue
7.2
Vacuum
measurement
option
spares
OIPT
Part
No.
Qtv
Description
HEATED
100
mT
CAPACITANCE
MANOMETER
+ PENNING GAUGE
(81.7·03/4)
GIVAC/GGE/625 1 HEATED
100mT
MKS CAPACITANCE MANOMETER
6288.IT-D-E-1-8 -
USED
ON 81-7-03/4
GIVAC/GGEI002
1 UNHEATED 100mT MKS CAPACITANCE MANOMETER
-
USED
ON
81-7-0311
GIVAC/GGEI004 1 ACT INVERT
MAG
GGE
AIM-V-NW25
(PENNING)
GIVACIVLV/125 1 PV25PK ISOLATION VALVE
GIV
AC/SEU025 1
NW25
CENTERING RING
Vacuum
Measurement
Section 7 Page 4
of
4
Issue
2:
November
02
Printed: 16-Jan-06,15:55
Plasma
lab
System
100
(ICP
180)
Oxford
Instruments
Plasma Technology
Illustrated Parts Catalogue
Section 8 -
Pumping
pipework
Section 8 •
Pumping
pipework
1
8.1
General 2
8.2 200mm
pipework
+ 200 VAT
APC
(1
00-8-20) 3
8.3 Pumping
pipework
option
spares 6
Issue
2:
November 02
Printed:
16·Jan-06,15:55
Section 8 Page 1
of
6
Pumping Pipework
Plasma
lab
System
100
(ICP
180)
8.1
General
Oxford
Instruments
Plasma
Technology
Illustrated Parts Catalogue
A key to the symbols used to represent vacuum system components
in
the following illustrations is shown in the following
key; where no symbol exists for a component, it is either labelled
or
can be identified from the associated table.
~
Electromagnetically
S
Vacuum gauge
operated
shut-off
valve
head
~
Pneumatically
~
Turbomolecular
operated
shut-off
valve
pump
r*J
Manually operated
0
Sliding vane
variable-leak valve
rotary vacuum
pump
[)+(] Gate valve
Q
Cryogenic
pump
~
Butterfly
valve
4
Reducer
e.g. APC
TT
Vacuum flange I
IIIIII111111
Flexible pipe
adapter
E=3
Combination
of
cs;;J
Pressure
flanges I adapters
reliefvalve
Key
to
vacuum
schematic
symbols
Pumping
Pipework
Section 8 Page 2
of
6
Issue
2:
November
02
Printed: 16-Jan-06. 15:55