Oxford-100-Manual.pdf - 第332页
Plasma lab System 100 (ICP 180) 8.1 General Oxford Instruments Plasma Technology Illustrated Parts Catalogue A key to the symbols used to represent vacuum system components in the following illustrations is shown in the …
Plasma
lab
System
100
(ICP
180)
Oxford
Instruments
Plasma Technology
Illustrated Parts Catalogue
Section 8 -
Pumping
pipework
Section 8 •
Pumping
pipework
1
8.1
General 2
8.2 200mm
pipework
+ 200 VAT
APC
(1
00-8-20) 3
8.3 Pumping
pipework
option
spares 6
Issue
2:
November 02
Printed:
16·Jan-06,15:55
Section 8 Page 1
of
6
Pumping Pipework
Plasma
lab
System
100
(ICP
180)
8.1
General
Oxford
Instruments
Plasma
Technology
Illustrated Parts Catalogue
A key to the symbols used to represent vacuum system components
in
the following illustrations is shown in the following
key; where no symbol exists for a component, it is either labelled
or
can be identified from the associated table.
~
Electromagnetically
S
Vacuum gauge
operated
shut-off
valve
head
~
Pneumatically
~
Turbomolecular
operated
shut-off
valve
pump
r*J
Manually operated
0
Sliding vane
variable-leak valve
rotary vacuum
pump
[)+(] Gate valve
Q
Cryogenic
pump
~
Butterfly
valve
4
Reducer
e.g. APC
TT
Vacuum flange I
IIIIII111111
Flexible pipe
adapter
E=3
Combination
of
cs;;J
Pressure
flanges I adapters
reliefvalve
Key
to
vacuum
schematic
symbols
Pumping
Pipework
Section 8 Page 2
of
6
Issue
2:
November
02
Printed: 16-Jan-06. 15:55
Plasma
lab
System
100
(ICP
180)
Oxford
Instruments
Plasma
Technology
Illustrated Parts Catalogue
8.2
200mm
pipework
+
200
VAT
APe
(100-8-20)
PROCESS CHAMBER
12
~
N
2
~
-------------------------
ROTARY
VANE
PUMP--"
Issue
2:
November 02
Printed: 16-Jan-06, 15:55
Section 8 Page 3
of
6
Pumping Pipework