Oxford-100-Manual.pdf - 第336页

Plasmalab System 100 (ICP 180) Oxford Instruments Plasma Technology Illustrated Parts Catalogue 8.3 Pumping pipework option spares OIPT Part No. Qty Description 200 mm VAT APC VACUUM KIT GIVACIVLV/245 1 200 ISO STEPGATE …

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Plasma
lab
System
100
(ICP
180)
Issue
2:
November
02
Printed: 16-Jan-06,15:55
Oxford
Instruments
Plasma
Technology
EDWARDS
VAC
INTERLOCK
SWITCH
GNAC/SUN/032
Section 8 Page 5
of
6
Illustrated Parts Catalogue
Pumping Pipework
Plasmalab System
100
(ICP
180)
Oxford
Instruments
Plasma Technology
Illustrated
Parts
Catalogue
8.3
Pumping
pipework
option
spares
OIPT
Part
No.
Qty
Description
200
mm
VAT APC
VACUUM
KIT
GIVACIVLV/245 1 200
ISO
STEPGATE
VALVE 640046-PE52
GIVACIVLV/246 1
VAT
CONTROLLER 641PM-16PM
GIVAC/SEU080
4 200
ISO
CENTERING RING
GIVAC/SEU025 2
NW25
CENTRING RING
GIVAC/SEU040 2
NW40
CENTRING RING
GIVAC/SELl010 2
NW10
CENTRING RING 08C10511395
GIVAC/SEU068 1 DN
250
ISO-K CENTRING RING
Pumping
Pipework
Section 8 Page 6
of
6
Issue
2:
November
02
Printed:
16-Jan-06,15:55
Plasma
lab
System
100
(ICP
180)
Oxford
Instruments
Plasma Technology
Illustrated Parts Catalogue
Section
9 . Gas
handling
Section 9 • Gas
handling
1
9.1
6-line gas
pod
(81-9-51) 2
9.2 12-line gas
pod
(81-9-61) 4
9.3 Non-toxic gas
line
(81-9-11) 6
9.4
Toxicgasline(81-9-21)
7
9.5 Clean gas
line
with
MFC
(81-9-31) 8
9.6 Clean gas
line
with
rotameter
(81-9-07) 9
9.7
Gas
handling
option
spares 10
Issue
2:
November 02
Printed: 16-Jan-06. 15:55
Section 9 Page 1
of
10
Gas
Handling