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Plasmalab System 100 (ICP 180) Oxford Instruments Plasma Technology Illustrated Parts Catalogue 9.1 6-line gas pod (81-9-51) CD I Gas Handling Section 9 Page 2 of 10 Issue 2: November 02 Printed: 16-Jan-06, 15:55

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Plasma
lab
System
100
(ICP
180)
Oxford
Instruments
Plasma Technology
Illustrated Parts Catalogue
Section
9 . Gas
handling
Section 9 • Gas
handling
1
9.1
6-line gas
pod
(81-9-51) 2
9.2 12-line gas
pod
(81-9-61) 4
9.3 Non-toxic gas
line
(81-9-11) 6
9.4
Toxicgasline(81-9-21)
7
9.5 Clean gas
line
with
MFC
(81-9-31) 8
9.6 Clean gas
line
with
rotameter
(81-9-07) 9
9.7
Gas
handling
option
spares 10
Issue
2:
November 02
Printed: 16-Jan-06. 15:55
Section 9 Page 1
of
10
Gas
Handling
Plasmalab System 100
(ICP
180)
Oxford
Instruments
Plasma Technology
Illustrated Parts Catalogue
9.1
6-line
gas
pod
(81-9-51)
CD
I
Gas
Handling
Section 9 Page 2
of
10
Issue
2:
November 02
Printed:
16-Jan-06, 15:55
Plasmalab System 100
(ICP
180)
Oxford
Instruments
Plasma Technology
Illustrated
Parts
Catalogue
Item
No.
OIPT
Part
No.
Qty
Description
1
MA81D15070
1
MANIFOLD
GAS
OUT
PIPE
2
MA81D14783
1
GAS CONNECTION LINE
3
81-9-31 1 CLEAN GAS LINE
(SEE
SUB-SECTION 9.5)
4
MA81Z16003
1 GAS POD CHAMBER A
OR
B INTERFACE
PCB
5
G/AIRIVLV/506 1
6
WAY
SMC
ASSY.
SPASBR06
6
ESZ9102
1 DOOR INTERLOCK MICRO-SW
SPDT
7
G/AIRIVLV/501
1
SINGLE
SMC
ASSY.
SPASBR01
8
81-9-11
1 NON-TOXIC GAS LINE
(SEE
SUB-SECTION 9.3)
9
81-9-21
1 TOXIC GAS LINE
(SEE
SUB-SECTION 9.4)
Issue
2:
November
02
Printed: 16-Jan-06, 15:55
Section 9 Page 3
of
10
Gas
Handling