Oxford-100-Manual.pdf - 第341页

Plasma lab System 100 (ICP 180) Oxford Instruments Plasma Technology Illustrated Parts Catalogue Item OIPT Part No. Qtv Description 1 MD81A22487 1 GAS POD BOX 2 MD31B18526 1 GAS POD LID 3 MA81D14783 1 GAS CONNECTION LINE…

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Plasmalab
System
100
(ICP
180)
Oxford
Instruments
Plasma Technology
Illustrated Parts Catalogue
9.2
12-line
gas
pod
(81-9-61)
7
PCB1 PCB2 PCB3
Gas Lines Gas Lines Gas Lines
1-4 5-8 9-12
Gas
Handling
Section 9 Page 4
of
10
0)
I
Programmable Logic
Controller
See Sub-section 0.4
Issue
2:
November
02
Printed: 16-Jan-06.15:55
Plasma
lab
System
100
(ICP
180)
Oxford
Instruments
Plasma Technology
Illustrated
Parts
Catalogue
Item
OIPT
Part
No.
Qtv
Description
1
MD81A22487
1
GAS POD BOX
2
MD31B18526
1 GAS POD LID
3
MA81D14783
1
GAS CONNECTION LINE
4
MA81D15070
1
MANIFOLD
GAS OUT
PIPE
5 G/AIRIVLV/506
2 6
WAY
SMC ASSY.SPASBR10
6 G/AIRIVLV/501 2 SINGLE SMC ASSEMBLY. SPASBROl
7
MA31Z18421
3
300
PLUS
GASES
PCB2
ASSY
8
EXP0701 1 B&R MINICONTROLLER
EXP0730 1 B&R DIGITAL MODULE
16
lIP
EXP0725 1 B&R ANALOGUE MODULE.4
EXP0750
3
B&R ARCNET INTERF. EE32-0
10
MA81Z16005
3
PLC
INTERFACE
PCB
11
ESZ9102 1 DOOR INTERLOCK MICRO-SW
SPDT
12
81-9-11
NON-TOXIC GAS LINE
(SEE
SUB-SECTION 9,3)
13
81-9-21 TOXIC GAS LINE
(SEE
SUB-SECTION 9.4)
14
81-9-31 1 CLEAN GAS LINE
(SEE
SUB·SECTION 9.5)
Note -
For
PLC components.
see
Sub-section 0.4.
Issue
2:
November
02
Printed: 16-Jan-06, 15:55
Section 9 Page 5
of
10
Gas
Handling
Plasma
lab
System
100
(ICP
180)
Oxford
Instruments
Plasma
Technology
Illustrated Parts Catalogue
9.3
Non-toxic
gas
line
(81-9-11)
GAS OUT
MANIFOLD
PNEUMATICALLY
CONTROLLED
SHUT-OFF
OUTLET VALVE
/
MASS
FLOW
CONTROLLER
/ 2
11m
FILTER
~~
..............
/
GROMMET
/
GAS CONNECTION LINE
(STAINLESS STEEL)
Item
No.
in
Part
Number
Description
Illustration
MA81D15065 NON-TOXIC
GAS
KIT
TYPE
'A' (all
welded
pipework
including
filter
and
control
valve
but
excluding
MFC
and
MFC
cable)
G/GAS/FIT/614C 1/4
GASKET.
RETAIN
SS4VCR2GR
(USED
IN
ALL
VCR
FITIINGS)
1
*
MASS
FLOW
CONTROLLER
2
MAOOZ21746
MKS
MASS
FLOW
CABLE
ASSY
*
Mass
Flow
Controllers are
not
supplied
with
the
gas line,
they
vary
in
type
according
to
each
customer's
requirement.
Please
quote
the
part
number
on
the
unit
if
spares are required.
Gas
Handling
Section 9 Page 6
of
10
Issue
2:
November 02
Printed:
16-Jan-06,
15:55