Oxford-100-Manual.pdf - 第343页

Plasmalab System 100 (ICP 180) Oxford Instruments Plasma Technology Illustrated Parts Catalogue GAS CONNECTION LINE (STAINLESS STEEL) INLET VALVE (PNEUMATICALLY CONTROLLED SHUT-QFF) 9.4 Toxic gas line (81-9-21) GAS OUT M…

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Plasma
lab
System
100
(ICP
180)
Oxford
Instruments
Plasma
Technology
Illustrated Parts Catalogue
9.3
Non-toxic
gas
line
(81-9-11)
GAS OUT
MANIFOLD
PNEUMATICALLY
CONTROLLED
SHUT-OFF
OUTLET VALVE
/
MASS
FLOW
CONTROLLER
/ 2
11m
FILTER
~~
..............
/
GROMMET
/
GAS CONNECTION LINE
(STAINLESS STEEL)
Item
No.
in
Part
Number
Description
Illustration
MA81D15065 NON-TOXIC
GAS
KIT
TYPE
'A' (all
welded
pipework
including
filter
and
control
valve
but
excluding
MFC
and
MFC
cable)
G/GAS/FIT/614C 1/4
GASKET.
RETAIN
SS4VCR2GR
(USED
IN
ALL
VCR
FITIINGS)
1
*
MASS
FLOW
CONTROLLER
2
MAOOZ21746
MKS
MASS
FLOW
CABLE
ASSY
*
Mass
Flow
Controllers are
not
supplied
with
the
gas line,
they
vary
in
type
according
to
each
customer's
requirement.
Please
quote
the
part
number
on
the
unit
if
spares are required.
Gas
Handling
Section 9 Page 6
of
10
Issue
2:
November 02
Printed:
16-Jan-06,
15:55
Plasmalab
System 100
(ICP
180)
Oxford
Instruments
Plasma
Technology
Illustrated Parts Catalogue
GAS CONNECTION LINE
(STAINLESS STEEL)
INLETVALVE
(PNEUMATICALLY
CONTROLLED
SHUT-QFF)
9.4
Toxic
gas
line
(81-9-21)
GAS OUT
MANIFOLD
OUTLET VALVE
(PNEUMATICALLY
CONTROLLED
SHUT-QFF)
/
MASS
FLOW
CONTROLLER
....................
/
2IJrn FILTER
~
.......
--~/
BYPASS VALVE
(MANUALLY
OPERATED
SHUT-QFF)
GROMMET
/
Item
No.
in
Part
Number
Description
Illustration
MA81B15064 AUTO TOXIC
GAS
LINE
SNGL
TYPE
'C' (all
welded
pipework
including
filter
and valves
but
excluding
MFC
and
MFC
cable)
G/GAS/FIT/614C 1/4
GASKET.
RETAIN
SS4VCR2GR
(USED
IN
ALL
VCR
FITTINGS)
1
*
MASS
FLOW
CONTROLLER
2 MAOOZ21746 MKS
MASS
FLOW
CABLE
ASSY
*
Mass
Flow
Controllers are
not
supplied
with
the
gas line,
they
vary in
type
according
to
each
customer's
requirement.
Please
quote
the
part
number
on
the
unit
if
spares are required.
Issue
2:
November
02
Printed: 16-Jan-06, 15:55
Section 9 Page 7
of
10
Gas
Handling
Plasmalab
System 100
(ICP
180)
Oxford
Instruments
Plasma
Technology
Illustrated Parts Catalogue
9.5
Clean
gas
line
with
MFC
(81-9-31)
PROCESS GAS
OUTLET VALVE
(PNEUMATICALLY
CONTROLLED
/~FFI
Item
No.
in
Part
Number
Description
Illustration
MA81C15916
CLEAN
GAS
LINE
(MFC
CONTROLLED)
(all
welded
pipework
including valves
but
excluding
MFC
and
MFC
cable)
G/GAS/F
IT
1614C
1/4
GASKET.
RETAIN
SS4VCR2GR
(USED
IN
ALL
VCR
FITTINGS)
1
*
MASS
FLOW
CONTROLLER
2 MAOOZ21746 MKS
MASS
FLOW
CABLE
ASSY
Mass
Flow
Controllers are
not
supplied
with
the
gas line,
they
vary in
type
according
to
each
customer's
requirement.
Please
quote
the
part
number
on
the
unit
if
spares are required.
Gas
Handling
Section 9 Page 8
of
10
Issue
2:
November 02
Printed:
16-Jan-06,15:55