Oxford-100-Manual.pdf - 第350页

Plasma lab System 100 (ICP 180) Oxford Instruments Plasma Technology LOAD LOCK (underside view) Illustrated Parts Catalogue Precision motor gearbox 640:1 (EMM0025) Act. Pirani GGEAPG-L-NW16 (GNAC/GGEl005) Servo motor 24V…

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Plasma
lab
System
100
(ICP
180)
Oxford
Instruments
Plasma
Technology
Illustrated Parts Catalogue
Item
OIPT
Part
No.
Qty
Description
MAOOA20102 1 LOADLOCK ASSV.
46
x
236
mm
VAT VALVE
1 G/SUN/CAB/942 1
HAND
KNOB
(M6)
DIA.
30
mm
2
MDOOD20785 1
LOADLOCK PROTECTIVE
WINDOW
3 MDOOC17683 1 VIEW PORT CLAMP PLATE
4
MD90D12788
1
WINDOW
GASKET
5
MD90D12789
1
WINDOW
GLASS
6
MDOOA21658
1
LOADLOCK HINGED LID
7
G/SELIO-V/279C
1 3.5 x 329.8
mm
VITON
'0'
RING BS279C
8
GNAC/FITI/927
1
ROTARY FEEDTHRO. (8
mm
SHAFT)
9
MDOOC17699
1 DRIVE PULLEY
10
G/SUN/BELl013 1
SIS
BELT
6.35W
x 0.075THK x 731LG
11
G/SUN/BRG/904
1 MINIATURE
LM
GUIDE
TYPE
HRW 14
12
MDOOD20183
4 PILLAR
13
MD91C17754
1
SUPPORT
PLATE
14
MDOOD180027
1 LOADLOCK
PCB
MOUNT
15 MDOOA20103
1 LOADLOCK CHAMBER 46 x 236
mm
VAT
VALVE
16
G/SUN/BRG/903
1 MINIATURE
LM
GUIDE
TYPE
HRW
12
17 MDOOB20814
1
LOADLOCKNALVE INTERFACE 2-RINGS
18
G/SELIO-V/263C
1
3.5 x 196.4
mm
VITON
'0'
RING BS263
19
G/SELlO-
V
1269C
1 3.5 x 221.85
mm
VITON
'0'
RING 200-269
20
MDOOD17695
1
LOWER FRONT PULLEY
MOUNT
21
MDOOD20146
1 END
EFFECTOR
PLATE
2.2.
Kq
S/ST
22
MDOOC20145
1 END
EFFECTOR
2.2. Ka
S/ST
RATE
23 MDOOD17698
3
DRIVEN PULLEY
24 MDOOD17744
1 LOWER CARRIAGE
BELT
CLAMP
25 MDOOC20253
1
UPPER
RAIL
SUPPORT
26 MDOOD17693
1
UPPER
REAR
PULLY
MOUNT
27 G/SUN/BELl012
1
SIS
BELT
6.35W
x 0.075THK x 641LG
28
MDOOD17696
3
PULLEY BEARING CLAMP
29 MDOOB21657
1
LOADLOCK TOP COVER
30
MDOOD17701
1 LOWER CARRIAGE END
STOP
31
MDOOD23696
2
HINGE BLOCK
32 MDOOC23711
2
LID - HINGE PIN FIXING
33
G/SELIO-V/260C
1 3.5 x 164.7
mm
VITON
'0'
RING BS260C
*
MAOOZ17834
1 LOADLOCK MOTOR CONTROL ASSEMBLY
*
G/SUN/GERlO09C
1
SERVO
MOTOR 24VDC RS.718-981
*
EMM0025
1
PRECISION
DC
M/GEARBOX 640:1
*
GNAC/GGEI/005 1 ACT. PIRANI
GGE
APG-L-NW16
*
GNAC/GGEI004 1
ACT. INVERT
MAG
GGE
AIM-V-NW25
G/SELlO-
V
1280C
1
3.5 x 355.2
mm
VITON
'0'
RING BS280 - NOT SHOWN -
FITS
BETWEEN ITEMS 15
AND
28
G/SELIO-V/264C
1
3.5. x 190.1
mm
VITON
'0'
RING BS264 - NOT SHOWN -
FITS
BETWEEN ITEMS
15
AND
17
G/SUN/BRG/050
3
4 PNT CONT'T
BRG
1"
'ID x
1.375'
OlD - NOT SHOWN -
FITS
ON EACH ITEM 22
MDOOD17674 1
10
PIN
SEAL BODY - NOT SHOWN
MDOOD17702
1
UPPER
CARRIAGE END
STOP
- NOT SHOWN
MDOOD17745 1
UPPER
CARRIAGE
BELT
CLAMP - NOT SHOWN
ESZ9017 1 MICROSWITCH 331-405 - NOT SHOWN
EIQ0055C 1 OPTO
SENSOR
SLOnED
TRW - NOT SHOWN
MDOOD18027 1 MICROSWITCH PLUNGER - NOT SHOWN
MDOOD18042 1 MICROSWITCH ACTUATOR - NOT SHOWN
MD91D17505
4 LOCATION
PIN
- NOT SHOWN
*
SEE
PHOTOGRAPH ON FOLLOWING
PAGE
Issue
2:
November
02
Printed: 16-Jan-06, 15:55
Section
10
Page 3
of
6
Wafer
Handling
Plasma
lab
System
100
(ICP
180)
Oxford
Instruments Plasma Technology
LOAD
LOCK
(underside view)
Illustrated Parts Catalogue
Precision motor gearbox 640:1
(EMM0025)
Act. Pirani GGEAPG-L-NW16
(GNAC/GGEl005)
Servo motor 24VDC RS.718-981
(MAOOZ17834)
II
ATP 80Turbo kit
(ATP80)
Wafer
Handling
Load lock motor control assy
(MAOOZ17834)
Nitrogen purge valves
(GW0012)
Section 10 Page 4
of
6
Act. invert mag GGE AIM-V-NW25
(Penning) (GNAC/GGEl004)
/
/
/
/
Turbo vent valve
(GNACNLV/125)
Issue
2:
November 02
Printed: 16-Jan-06. 15:55
Plasma
lab
System
100
(ICP
180)
Oxford
Instruments
Plasma Technology
Illustrated
Parts
Catalogue
10.2
Wafer
handling
option
spares
OIPT Part No. Qty Description
COMMON
SPARES, SINGLE WAFER AUTOMATIC INSERTION LOAD
LOCK
FOR
USE
WITH ISOLATED
PROCESS
CHAMBER, INCLUDING
SUPPORT
FRAME
AND
ACTIVE
PIRANI GAUGE
(100·10·5xxx)
G/SUN/BEU012 1
SIS
BELT
6.35W
x 0.075THK x 641LG
ESZ9107
1 MICRO SWITCH 331-405
G/VAC/FIT/927
1
ROTARY FEEDTHROUGH (8
mm
SHAFT)
G/SUN/GER/009 1
SERVO
MOTOR
24 VDC
EMM0025
1
PRECISION
DC
MIG
EAR
MAOOZ17834
1 LOADLOCK
MOTOR
CONTROLLER
PCB
G/SUN/BEU013 1
SIS
BELT
6.35W
x 0.075THK x 731LG
EIQ055 1 OPTO
SENSOR
SLOTTED
G/V
AC/GGE/005
1 ACTIVE
PI
RANI GAUGE APG
G/SUN/BRG/050 1 4 PNT CONT'T
BRG
1"
lID x
1.375"
OlD
AS ABOVE WITH LARGE MESC VALVE (100·10·05C)
GIISUN/BRG/903 1 MINIATURE
LM
GUIDE BEARING
TYPE
HRW12
GIISUN/BRG/904 1 MINIATURE
LM
GUIDE BEARING
TYPE
HRW14
G/SEUO-V/269 1 3.5 x 221.85
mm
VITON
'0'
RING 200-269
PM
KIT LOADLOCK
HANDLER·
STANDARD QUARTZ CLAMP TOOLING (100·10·05CS)
MD91B22328SP 1
4"
DIA
WAFER CLAMP QUARTZ
MD91B22277SP 1
3"
DIA
WAFER CLAMP QUARTZ
MD91B22327SP 1
2"
DIA
WAFER CLAMP QUARTZ
MD91B24693SP 1
5"
DIA
WAFER CLAMP QUARTZ
MD91B22329SP 1
6"
DIA
WAFER CLAMP QUARTZ
MD91B23036SP 1
8"
DIA
WAFER CLAMP QUARTZ
Issue
2:
November
02
Printed: 16-Jan-06, 15:55
Section
10
Page 5
of
6
Wafer
Handling