Oxford-100-Manual.pdf - 第353页

Plasmalab System 100 (ICP 180) Oxford Instruments Plasma Technology Illustrated Parts Catalogue Section 11 - Spares Section 11 • Spares 1 11.1 Standard spare parts kits 2 11.2 Common system 100 base unit standard spares …

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Plasma
lab
System
100
(ICP
180)
NOTES:
Wafer
Handling
Oxford
Instruments
Plasma
Technology
Section 10 Page 6
of
6
Illustrated Parts Catalogue
Issue
2:
November 02
Printed: 16-Jan-06, 15:55
Plasmalab
System 100
(ICP
180)
Oxford
Instruments
Plasma
Technology
Illustrated Parts Catalogue
Section 11 - Spares
Section
11 • Spares 1
11.1 Standard spare parts
kits
2
11.2
Common
system 100 base
unit
standard
spares
kit..
3
11.3 ICP180
additional
parts
kit
3
11.4 Single
wafer
DIPT Loadlock spares
kit
4
Issue
2:
November
02
Printed: 16-Jan-06,15:55
Section
11
Page 1
of
4
Spare Parts Kits
Plasma
lab
System
100
(ICP
180)
Oxford
Instruments
Plasma
Technology
Illustrated Parts Catalogue
11.1
Standard
spare
parts kits
This section covers a
commonly
sold consumable parts list (100-S-PM
ICP
180)
for
the
Plasamalab
System
100
(ICP180) exchanged
as
part
of
a Planned
Annual
Maintenance
visit.
Spare Parts Kits
Section
11
Page 2
of
4
Issue
2:
November 02
Printed: 16-Jan-06, 15:55