Oxford-100-Manual.pdf - 第359页
Plasma lab System 100 (ICP 180) Oxford Instruments Plasma Technology Illustrated Parts Catalogue 12.3 End point detectors 12.3.1 Verity EP200 end point kit (100-12-12/01) ///// ~/ ®/ /" (if" ())/ Item Part No. …
Plasma
lab
System
100
(ICP180)
Oxford
Instruments
Plasma Technology
Illustrated
Parts
Catalogue
12.1
Heaters/chiIlers
Heater
chiller
various
options
OIPT Part No. DescriPtion
81-12-18
CU500 HEATER CHILLER 240V
50Hz
81-12-18/1 CU500 HEATER CHILLER 208V
60Hz
81-12-19 CU500 DIGITAL HEATER/CHILLER 240V 50Hz
81-12-19/1
CU500 DIGITAL HEATER/CHILLER 208V
60Hz
81-3-18/1
CU500 HEATER CHILLER 208V
60Hz
G/WTR/SUN/520
CU500 818S DIGITAL +
FILTER
KIT 240V
50Hz
G/WTR/SUN/521
CU500 818S DIGITAL +
FILTER
KIT 208V
60Hz
GIWTR/SUN/550
CU500 HEATER/CHILLER (+ACU006)
G/WTR/SUN/551
CU500 FAN
MOTOR
PT.
No. 500-5
12.2
Heater/chiller
option
spares
OIPT
Part
No.
Qtv
Description
GIWTR/SUN/502
1 PUMP HEAD
FOR
CU500
GIWTR/SUN/503
1 PUMP
MOTOR
FOR
CU500
GIWTRlSU
N/OO
7
CORROSION INHIBITOR 3 x 5 L
TR
PACK
GIVAC/OIU905
1 VAC
GREASE
SILICONE
GIWTR/SUN/801
1 WATER
FILTER
UNIT MCY4463EG
Accessories
Section
12
Page 2
of
6
Issue
2:
November
02
Printed: 16-Jan-06,15:55
Plasma
lab
System
100
(ICP
180)
Oxford
Instruments
Plasma
Technology
Illustrated
Parts
Catalogue
12.3
End
point
detectors
12.3.1
Verity
EP200
end
point
kit
(100-12-12/01)
/////
~/
®/
/"
(if"
())/
Item
Part
No.
Description
1
CHAMBER
2
MA90D13116
CENTRING RING
3 G/FIXS32625
M6
x 25
mm
SIS
CAPHEAD
SCREW
4
G/SUN/ENDI021
VERITY
EP200SCR
ADAPTOR
5
G/SUN/ENDI023 VERITY
SL
-UVl
0
FIBRE
OPTIC 1M
6
MD91D17811
END POINT ADAPTOR RING
7
MD91C17809
END POINT ADAPTOR FLANGE (EP200)
8
M/4078DIOl
WINDOW
GLASS
(6
mm
QUARTZ)
9
M/4175DIOl
WINDOW
GASKET
G/SU
N/ENDI022 VERITY LC10 LIGHT COUPLER (LOCATED
IN
ADAPTOR-
ITEM 5)
G/SUN/ENDI020 VERITY EP200MD 200
mm
MONIDET (LOCATED ON FRONT
PANEL - ABOVE
RF
GENERATOR)
12.3.2
Verity
EP200
optional
spares
OIPT
Part
No.
Qtv
Description
MA90D13116
1 CENTRING RING
M/4175DIOl
1
WINDOW
GASKET
M/4078DIOl 1
WINDOW
GLASS
(6
mm
QUARTZ)
®
/
Issue
2:
November
02
Printed: 16-Jan-06.15:55
Section
12
Page 3
of
6
Accessories
Plasma
lab
System
100
(ICP180)
Oxford
Instruments Plasma Technology
Illustrated
Parts
Catalogue
12.3.3
Sofie
integrated
laser
end
point
kit
(81-12-86)
~~~--{~)
.£
"'-
~~_._
..
_
...
_
..
_
..
_
..
_._
...
_
..
_
..
_._
..
_
..
_
..
_. 0
Item
Part
No. Description
1 G/SUN/END/013/4
SOFIE
FL205A-1
AN.
LASER
REFL.
2
G/SUN/END/013/3
SLiDE/MOUNT
3
G/SUN/ENDI013/2 ADJUSTOR
4
G/SUN/END/013/1
BASE
5
MD81C15834
NW25KF FLANGE (INTERFEROMETRY)
SEE
SUB-SECTION
3.1
G/SUN/END/013/5
CONTROL UNIT
AND
PANEL - LOCATED
ON
FRONT PANEL
ABOVE
RF
UNIT
EXP0801
WIN
TV GO
PCI
CARD - LOCATED IN SYSTEM
PC
12.3.4
Sofie
integrated
laser
optional
spares
OIPT Part
No.
Qtv
Description
MD81C15834
1
NW25KF FLANGE (INTERFEROMETRY)
Accessories
Section
12
Page 4
of
6
Issue 2:
November
02
Printed: 16-Jan-06, 15:55