Oxford-100-Manual.pdf - 第53页

System Manual Oxford Instruments Plasma Technology Plasma lab System 100 3.9.3 94-81-9-21 Standard toxic gas line The standard toxic gas line is shown in Fig 3.7. All gas fittings are VCR and all stainless steel pipework…

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Plasma
lab
System
100
Oxford
Instruments
Plasma
Technology
WARNING
System
Manual
3.9.2
THE CONNECTION FROM THE GAS POD
MANIFOLD
TO
THE
PROCESS
CHAMBER
SHOULD NOT INCLUDE
ANY
SHUT
OFF
VALVE, UNLESS THIS HAS BEEN CLEARED
WITH OXFORD
PLASMA
TECHNOLOGY. A BLOCKAGE
HERE
COULD CAUSE
PROCESS
GASES TO
MIX
AND
CROSS CONTAMINATE IN THE HIGH
PRESSURE
GAS DELIVERY
PIPEWORK.
94-81-9-11
Standard
non-toxic
gas
line
The standard
non-toxic
gas line
is
shown in Fig 3.6.
All
gas
fittings
are
VCR
and all stainless
steel
pipework
connections are
welded.
The 'gas
in'
tube
passes
into
the
side
of
the
case,
protected
by a
grommet.
A
ferrite
core,
fitted
to
the
'gas
in'
tube, reduces
the
susceptibility
of
the
gas
pod
electronics
to
signals
from
nearby
transmitting
devices, e.g.
mobile
phones,
modems, etc
..
Gas
from
the
customer's
cylinder/regulator/filter
flows
into
the
gas in
tube
to
the
filter.
The gas
flows
through
the
2-lJm
filter
to
the
mass
flow
controller
(MFC).
The
MFC
controls
the
flow
of
gas
as
commanded
by
the
system controller. The gas
then
flows
through
the
pneumatically
controlled
outlet
shut-off
valve and
into
the
gas
out
manifold
where
it
is
mixed
with
the
other
process gases
before
flowing
into
the
process chamber.
WARNING
THE CLOSED INLET VALVE REMAINS SHUT FOR DIFFERENTIAL
PRESSURE
UP TO 5
BAR. A FAILURE UPSTREAM WHICH PRODUCES LINE
PRESSURES
ABOVE THIS WILL
NOT
BE
CONTAINED. IF THIS PRODUCES A HAZARD, THE CUSTOMER IS WARNED TO
FIT
ADDITIONAL
PROTECTION UPSTREAM.
OUTLET SHUT-OFF
VALVE
(PNEUMATICALLY
CONTROLLED)
~
MASS
~
FLOW
~
CONTROLLER
2
....
m FILTER
.....,""'~
........
~
~
~
GAS LINE EXTENSION
~
~FERRITE
CORE
~
~
GROMMET
GAS
IN
TUBE
(STAINLESS STEEL)
Fig 3.6: 94-81-9-11 Standard non-toxicgas lines
UC
Davis 94-721001
Issue
1:
March 06
Description
Page 3-16
of
22
Printed: 22-Mar-06. 7:29
System
Manual
Oxford
Instruments
Plasma
Technology
Plasma
lab
System
100
3.9.3
94-81-9-21
Standard
toxic
gas
line
The standard
toxic
gas line
is
shown in Fig 3.7.
All
gas
fittings
are
VCR
and all stainless steel
pipework
connections are
welded.
The gas in
tube
passes
into
the
side
of
the
gas
pod
case,
protected
by a
grommet.
Gas
from
the
customer's
cylinderlregulator/filter
flows
into
the
gas
in
tube
to
the
filter.
WARNING
THE CLOSED INLET VALVE
REMAINS
SHUT FOR DIFFERENTIAL
PRESSURE
UP TO
210
BAR. A FAILURE UPSTREAM WHICH PRODUCES LINE
PRESSURES
ABOVE THIS WILL
NOT
BE
CONTAINED.
IF
THIS PRODUCES A HAZARD, THE CUSTOMER IS WARNED TO
FIT
ADDITIONAL
PROTECTION UPSTREAM.
With
the
Inlet
Valve and
Outlet
Valve
open
and
the
Bypass
Valve closed,
the
gas
flows
through
the
2
Ilm
filter
to
the
mass
flow
controller
(MFG).
The
MFC
controls
the
flow
of
gas
as
commanded
by
the
system
controller.
The gas
then
flows
through
the
outlet
valve and
into
the
gas
out
manifold
where
it
is
mixed
with
the
other
process gases
before
flowing
into
the
process chamber.
With
the
Bypass Valve open,
the
gas
flows
through
the
bypass
line
directly
to
the
gas
out
manifold.
This
facility
is
provided
to
enable
the
toxic gas
line
to
be evacuated by
pumping
down
the
process chamber. This
is
necessary
to
prevent
air
entering
the
gas line and
contaminating
it
during
a gas cylinder changeover, and
to
service
the
gas line in
the
event
of
an
MFC
or
filter
blockage.
BYPASS
v::::
(MANUALLY
OPERATED
SHUT-OFF)
GAS IN TUBE
(STAINLESS STEEL)
/
BYPASS
LINE
OUTLET VALVE
(PNEUMATICALLY
CONTROLLED
SHUT-OFF) MASS
/
FLOW
/
CONTROLLER
2
j.lm
FILTER
/
INLET VALVE
(PNEUMATICALLY
~~~
CONTROLLED
SHUT-OFF)
GROMMET
/
3.9.4
Fig
3.
7:
94-81-9-21 Standardtoxicgas line
94-81-9-00/4
Gas
line
interlock
kit
The gas line
interlock
kit
is
a
pneumatically
controlled
hardware
interlock,
which
prevents
the
simultaneous
flow
of
process gases,
which
if
combined could produce a hazardous mixture.
Printed: 22-Mar-06, 7:29
Description
Page 3-17
of
22
UC
Davis 94-721001
Issue
1: March 06
Plasma
lab
System
100
Oxford
Instruments
Plasma
Technology
System
Manual
3.10
94-100-10-0SC
Single
wafer
automatic
load
lock
Fig 3.8: Single wafer automatic load lock
UC
Davis 94-721001
Issue
1:
March 06
Description
Page 3-18
of
22
Printed: 22-Mar-06, 7:29