Oxford-100-Manual.pdf - 第59页

System Manual Oxford Instruments Plasma Technology Plasma lab System 100 4. Installation and commissioning 4. Installation and commissioning 4-1 4.1 Introduction .4-2 4.2 Installing the system 4-2 4.2.1 Unpacking 4-2 4.2…

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Plasma
lab
System
100
Oxford
Instruments
Plasma Technology
System
Manual
3.10.3
As
Steel Belt 2 travels
with
respect
to
the
Carriage,
it
causes
the
Wafer
Support
attached
to
it
to
travel
along
the
Carriage.
6)
As
the
Wafer
Support
reaches
the
end
of
its travel, a
hole
in Steel Belt 1
is
detected
by
Photo
Diode 2
to
stop
the
DC
Motor.
7)
The
wafer
is
lifted
from
the
wafer
support
by a
wafer
lift
within
the
processing
chamber,
the
wafer
support
is
withdrawn
from
the
chamber, and
the
wafer
is
lowered
onto
the
processing
table
by
the
wafer
lift.
8)
As
the
Wafer
Support
reaches its
fully
retracted position
within
the
load lock,
the
hole
in Steel Belt 1
is
detected by Photo Diode 1
to
stop
the
DC
motor.
9)
The
gate
valve
is
closed and
the
load lock can be vented
if
required.
The above sequence
of
events
is
repeated
to
remove
the
wafer
from
the
processing chamber.
Wafer
support
(end
effector)
The
automatic
load
lock end
effector
(wafer
support) can accommodate
wafer
diameters
of
3"
to
8".
See
Section 6 (Maintenance)
for
the
end
effector
wafer
size
adjustment
procedure.
UC
Davis 94-721001
Issue
1:
March 06
Description
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Printed: 22-Mar-06, 7:29
System
Manual
Oxford
Instruments
Plasma
Technology
Plasma
lab
System
100
4.
Installation
and
commissioning
4.
Installation
and
commissioning
4-1
4.1
Introduction
.4-2
4.2
Installing
the
system
4-2
4.2.1 Unpacking 4-2
4.2.2 Positioning
the
system components 4-3
4.2.3 Connecting
the
services 4-4
4.3
Commissioning
the
system 4-6
4.4
System adjustments .4-6
4.4.1 Heater/Chillers .4-6
4.4.2 Process
pump
purge
.4-6
Fig 4.1: 3-phase supply cable connections
at
the
power
box
4-5
Printed: 16 March 200611:59
Installation and Commissioning
Page
4-1
of
8
Issue
4:
March
as
Plasma
lab
System
100
4.1
Introduction
Oxford
Instruments
Plasma Technology
System
Manual
The
installation
and
cabling
of
this system
is
the
responsibility
of
the
customer (unless this has
been specifically
altered
in
the
sales contract). On
completion
of
the
system installation,
Oxford
Instruments Plasma Technology
(OIPT)
will
commission
the
system.
4.2
Installing
the
system
The
following
instructions are a general gUide
for
installing a typical PlasmalabSystem100
system, supplied
with
a
remote
gas
pod
and
rotary
vane
pump.
Customers should be
aware
of
any special
requirements
for
their
specific system, e.g.
rotary
pump
purging,
hazardous
processes,
endpoint
detectors etc
..
For details
of
the
services required,
refer
to
the
Installation Data Sheets and
the
Services
Specifications documents included in this manual
as
Appendices.
IMPORTANT:
BEFORE
INSTALLING
THE
SYSTEM,
ENSURE
THAT
ALL
PERSONNEL WHO
WILL
BE
INVOLVED HAVE READ
AND
UNDERSTOOD SECTION 1 'HEALTH
AND
SAFETY'
OF
THIS
MANUAL.
4.2.1 Unpacking
Unpack system components and check
for
damage and missing items against
the
packing list.
If
any items are
damaged
or
missing,
report
immediately
to
the
carrier and
OIPT.
Issue
4:
March 05
Installation and Commissioning
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March
200611:59