Oxford-100-Manual.pdf - 第69页

System Manual Oxford Instruments Plasma Technology WARNING PlasmalabSystem 100 BEFORE ATTEMPTING TO SWITCH ON (POWER UP OR OPERATE THE SYSTEM), READ AND ENSURE THAT YOU UNDERSTAND SECTION 1 - HEALTH AND SAFETY AT THE BEG…

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PlasmalabSystem100
Oxford
Instruments
Plasma
Technology
System Manual
Fig
5.6: Run log page 5-28
Fig 5.7: Typical leak detection and
MFC
calibration log page 5-29
Fig 5.8: Typical
AMU
control
panel 5-30
Fig
5.9: N
z
Pressure regulator/gauge
5-31
Fig
5.10: Pump
control
page 5-33
Fig 5.11: Pump
control
page vacuum mimic 5-34
Fig
5.12: Pump
control
page
operator
interface 5-34
Fig 5.13: Robot
control
page 5-36
Fig
5.14: Recipe page 5-37
Fig 5.15: Production
mode
page 5-39
Fig
5.16: Chamber 1 process
control
page 5-40
Fig 5.17: Leak
detection
page 5-45
Fig
5.18: Mass
flow
calibration page 5-47
Fig 5.19: Service
mode
page 5-48
Fig
5.20:
Wafer
transfer in service mode 5-49
Fig 5.21: System
log
page 5-51
UC
Davis 94-721001
Issue
1:
March 06
Operating
Instructions
Page
5-2
of
52
Printed: 22-Mar-06. 10:42
System
Manual
Oxford
Instruments
Plasma Technology
WARNING
PlasmalabSystem100
BEFORE ATTEMPTING TO SWITCH ON (POWER UP OR OPERATE THE SYSTEM), READ
AND
ENSURE THAT
YOU
UNDERSTAND SECTION 1 - HEALTH
AND
SAFETY AT THE
BEGINNING
OF THIS
MANUAL.
5.1
Failure
of
quartz
and
alumina
components
under
vacuum
Induction
coupled plasma sources
contain
quartz
or
alumina
tubes
or
windows
under
vacuum,
which
may be subject
to
attack
by
the
plasma process.
If
these components fail
whilst
under
vacuum, an implosion can occur. This should
not
present a safety hazard,
provided
the
equipment
is
used
with
all covers and screens in place,
but
may cause damage
to
system
components.
Failure by
implosion
becomes
more
likely
as
the
components age;
therefore
they
should be
regarded
as
consumable items. A
programme
of
regular
inspection and renewal
of
these
components
is
necessary
to
minimise
the
risk
of
implosion.
WARNING
BEFORE POWERING UP THE SOURCE, ENSURE THAT ALL COVERS
AND
SCREENS ARE
FITTED CORRECTLY.
DO
NOT REMOVE THE COVERS OR SCREENS WHILST THE SOURCE
IS UNDER
VACUUM.
Printed: 22-Mar-06, 10:42
Operating
Instructions
Page 5-3
of
52
UC
Davis 94-721001
Issue
1:
March 06
PiasmaiabSystem100
Oxford
Instruments
Plasma Technology
System
Manual
5.2
System
power-up
This sub-section describes
the
initial
power-up
(switch on)
of
the
system.
It
assumes
that
the
system
is
switched
OFF
at
the
wall-mounted
safety isolation box.
WARNING
BEFORE
POWERING
THE
SYSTEM UP, CHECK THAT:
A)
THE
'ONoSITE' MAINTENANCE
LOG
SHOWS THAT
THE
SYSTEM IS
IN
A FIT
STATE FOR CUSTOMER OPERATION.
B)
ALL DOORS ARE CLOSED
AND
ALL COVERS ARE IN PLACE.
C)
THERE
IS
NO
VISIBLE
DAMAGE
TO
THE
SYSTEM.
CAUTION
Always
ensure
that
any
heater/chiller
units
provided
are
switched
on
when
the
system
is
powered
up.
To
power
up
the
system, proceed
as
follows:
1) Ensure
that
all
manually
operated
cooling
water
taps are
turned
ON.
2)
Check
that
the
'Slit Valve Lockout'
control
is
unlocked and pushed home.
3)
Set all Remote/Local switches
on
the
electronics modules
to
REMOTE.
4)
Switch ON all
the
electronics modules located in
the
console.
5)
Ensure
that
the
compressed air supply
is
ON.
CAUTION
If
the
gas lines
may
contain
air,
do
not
open
any
gas
taps.
Continue
with
the
start
up
procedure,
and
then
use
the
system
to
evacuate
the
lines
one
at
a
time.
When
it
is
certain
that
the
air
has
been
removed
and
there
are
no
leaks,
open
the
gas
taps.
6)
If
you
are certain
that
the
gas lines
do
not
contain air,
turn
all
the
manually
operated
gas taps (on gas cylinders etc.)
to
ON.
7)
Check
that
the
Emergency Stop
buttons
are OUT.
8)
Set
the
wall-mounted
safety isolation box switch
to
ON (I).
9)
Operate
SYSTEM
ON
button
(coloured green
or
with
the
'I'
legend), located
on
the
console.
10) Switch
the
remote
PC
operator
terminal
ON.
UC
Davis 94-721001
Issue
1:
March 06
Operating
Instructions
Page 5-4
of
52
Printed: 22-Mar-06, 10:42