Oxford-100-Manual.pdf - 第76页

PlasmalabSystem 100 Oxford Instruments Plasma Technology System Manual 5.4 Operator control The PC 2000 facilities are accessed from the menu bar at the top of the screen as shown in Fig 5.1. LOG-ON PAGE SYSTEM LOG SYSTE…

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System
Manual
Vacuum
pumps
Oxford
Instruments
Plasma
Technology
PlasmalabSystem100
An
auxiliary circuit
on
the
pump
contactor
detects
pump
failure
due
to
overload
or
short
circuit, and
the
process gases are
immediately
halted.
If
a
rotary
vane
or
dry
vacuum
pump
stops
pumping
for
other
reasons
during
a process, e.g.
if
it
fails
or
its
power
is
disconnected, and
the
vacuum
interlock
switch's contacts remain closed,
process gas
will
continue
to
flow
into
the
process chamber.
Gas
flow
will
stop
when
the
chamber pressure exceeds
the
vacuum switch
trip
level
of
600
mbar
absolute. The
front-end
software
will
show
the
interlock
status
as
'fault'.
WARNING
DISCONNECTING THE POWER TO AUXILIARY EQUIPMENT, ESPECIALLY
VACUUM
PUMPS, WHILE RUNNING A PROCESS
CAN
CAUSE A HAZARD IN
THE
PROCESS
CHAMBER.
ENSURE THAT THE SYSTEM IS SHUT
DOWN
USING THE PROCEDURE GIVEN
IN
SUB-
SECTION
5.3.5
BEFORE DISCONNECTING
ANY
POWER CABLES FROM
THE
POWER
BOX, OR SWITCHING
OFF
ANY
ELECTRICAL SUPPLIES TO AUXILIARY EQUIPMENT.
WARNING
IF
THE EQUIPMENT HALTS DURING PROCESS BECAUSE THE
VACUUM
SWITCH HAS
OPENED, THERE
MAY
BE
A SERIOUS GAS HAZARD
IN
THE CHAMBER
AND
PUMPING
LINES.
ASSESS THE RISKS
BEFORE
TRYING TO PUMP OR VENT THE CHAMBER.
PERSONAL PROTECTIVE EQUIPMENT
MAY
BE
NECESSARY.
Printed: 22-Mar-06, 10:42
Operating
Instructions
Page 5-9
of
52
UC
Davis 94-721001
Issue
1:
March 06
PlasmalabSystem100
Oxford
Instruments
Plasma Technology
System
Manual
5.4
Operator
control
The
PC
2000 facilities are accessed
from
the
menu bar
at
the
top
of
the
screen
as
shown
in
Fig
5.1.
LOG-ON
PAGE
SYSTEM
LOG
SYSTEM ALERT
STOP
ALL AUTO
STA~~
S~ANN\
PROC\SBUTTON
5ystemMenu
h Pumping
~
Service
Fig 5.1:
Menu
bar
This system incorporates an
ICP
180 processing station, and an
automatic
single-wafer load
lock chamber. Refer
to
sub-section 5.8, page 5-33
for
diagrams and
brief
descriptions
of
the
screens/pages.
5.4.1
Turning screen savers
and
power
saver
options
off
CAUTION
When
running
the
PC
2000
software,
using a Screen
Saver
or
allowing
the
PC
to
enter
any
of
the
Power
Saver
modes
can cause
the
PC
to
lose
communications
with
the
PLC.
Before
starting
the
PC
2000
software,
ensure
that
Screen Savers
and
all
Power
Saver
options
are
turned
off.
A
procedure
to
do
this
is
given
in
the
following
text.
Use
the
following
procedure
to
turn
the
screen savers and
power
saver
options
off.
Note
that
this procedure
is
applicable
to
Microsoft
Windows
XpTM;
for
other
versions
of
Windows,
refer
to
the
on-line
help.
1)
Right-click
anywhere
in a clear area on
the
Windows
desktop and
then,
on
the
displayed menu, select
the
Properties
option.
The Display Properties
dialogue
box
is
displayed.
2)
Select
the
Screen
Saver
tab.
3)
In
the
Screen Saver
drop-down
list, select
the
(None)
option.
4)
Click on
the
OK
button.
UC
Davis 94-721001
Issue
1:
March 06
Operating
Instructions
Page 5-10
of
52
Printed: 22-Mar-06, 10:42
System
Manual
Oxford
Instruments
Plasma Technology
PlasmalabSystem100
5.4.2
5)
On
the
taskbar, select
the
Start
button,
then
the
Settings
option,
then
select
Control
Panel. The
control
panel
is
displayed.
6)
Select
Power
Options. The Power
Options
Properties
dialogue
is
displayed.
7)
Ensure
that
all
power
scheme
options
are set
to
'Never'.
If
necessary, use
the
drop-
down
lists
to
select
the
'Never'
option.
8)
Click
on
the
OK
button.
9)
Close
the
control
panel.
Logging
on
To
log
on
to
the
PC
2000 software, roceed
as
follows:
1)
Select
the
PC
2000 icon . The
PC
2000 splash screen
is
loaded, and
then
the
Access
Control
dialogue
is
displayed:
Access
Control
Demollstralioll
ClUTent
Access
Level
V1.1
5.4.2.1
2)
Enter
your
name and password in
the
appropriate
data fields
(note
that
data
entry
in
the
Password
field
is
case
sensitive), and
then
select
the
Verify
button.
If
you
make
a mistake in
entering
your
name and password, select
the
Verify
button
and
then
re-enter
the
data.
After
verification
of
the
entered data,
your
log-on
status
is
displayed in
the
Current
User and Access level fields.
3)
Select
the
OK
button.
The
PC
2000
software
continues
to
load, and
then
the
Pump
Control
page
is
displayed.
Editing
users
details
Users
details, i.e. names, passwords and
facility
access
options
can be
edited
by a person
logged
on
as
a Manager. To
do
this, use
the
following
steps:
1)
Log
on
as
a
Manager
(see
sub-section 5.4.2).
2)
Select
the
System Menu, and
then
the
Password
option.
The
Access
Control
dialogue
box
is
displayed.
Printed: 22-Mar-06. 10:42
Operating
Instructions
Page
5-11
of
52
UC
Davis 94-721001
Issue
1:
March 06