Oxford-100-Manual.pdf - 第77页

System Manual Oxford Instruments Plasma Technology PlasmalabSystem 100 5.4.2 5) On the taskbar, select the Start button, then the Settings option, then select Control Panel. The control panel is displayed. 6) Select Powe…

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PlasmalabSystem100
Oxford
Instruments
Plasma Technology
System
Manual
5.4
Operator
control
The
PC
2000 facilities are accessed
from
the
menu bar
at
the
top
of
the
screen
as
shown
in
Fig
5.1.
LOG-ON
PAGE
SYSTEM
LOG
SYSTEM ALERT
STOP
ALL AUTO
STA~~
S~ANN\
PROC\SBUTTON
5ystemMenu
h Pumping
~
Service
Fig 5.1:
Menu
bar
This system incorporates an
ICP
180 processing station, and an
automatic
single-wafer load
lock chamber. Refer
to
sub-section 5.8, page 5-33
for
diagrams and
brief
descriptions
of
the
screens/pages.
5.4.1
Turning screen savers
and
power
saver
options
off
CAUTION
When
running
the
PC
2000
software,
using a Screen
Saver
or
allowing
the
PC
to
enter
any
of
the
Power
Saver
modes
can cause
the
PC
to
lose
communications
with
the
PLC.
Before
starting
the
PC
2000
software,
ensure
that
Screen Savers
and
all
Power
Saver
options
are
turned
off.
A
procedure
to
do
this
is
given
in
the
following
text.
Use
the
following
procedure
to
turn
the
screen savers and
power
saver
options
off.
Note
that
this procedure
is
applicable
to
Microsoft
Windows
XpTM;
for
other
versions
of
Windows,
refer
to
the
on-line
help.
1)
Right-click
anywhere
in a clear area on
the
Windows
desktop and
then,
on
the
displayed menu, select
the
Properties
option.
The Display Properties
dialogue
box
is
displayed.
2)
Select
the
Screen
Saver
tab.
3)
In
the
Screen Saver
drop-down
list, select
the
(None)
option.
4)
Click on
the
OK
button.
UC
Davis 94-721001
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1:
March 06
Operating
Instructions
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of
52
Printed: 22-Mar-06, 10:42
System
Manual
Oxford
Instruments
Plasma Technology
PlasmalabSystem100
5.4.2
5)
On
the
taskbar, select
the
Start
button,
then
the
Settings
option,
then
select
Control
Panel. The
control
panel
is
displayed.
6)
Select
Power
Options. The Power
Options
Properties
dialogue
is
displayed.
7)
Ensure
that
all
power
scheme
options
are set
to
'Never'.
If
necessary, use
the
drop-
down
lists
to
select
the
'Never'
option.
8)
Click
on
the
OK
button.
9)
Close
the
control
panel.
Logging
on
To
log
on
to
the
PC
2000 software, roceed
as
follows:
1)
Select
the
PC
2000 icon . The
PC
2000 splash screen
is
loaded, and
then
the
Access
Control
dialogue
is
displayed:
Access
Control
Demollstralioll
ClUTent
Access
Level
V1.1
5.4.2.1
2)
Enter
your
name and password in
the
appropriate
data fields
(note
that
data
entry
in
the
Password
field
is
case
sensitive), and
then
select
the
Verify
button.
If
you
make
a mistake in
entering
your
name and password, select
the
Verify
button
and
then
re-enter
the
data.
After
verification
of
the
entered data,
your
log-on
status
is
displayed in
the
Current
User and Access level fields.
3)
Select
the
OK
button.
The
PC
2000
software
continues
to
load, and
then
the
Pump
Control
page
is
displayed.
Editing
users
details
Users
details, i.e. names, passwords and
facility
access
options
can be
edited
by a person
logged
on
as
a Manager. To
do
this, use
the
following
steps:
1)
Log
on
as
a
Manager
(see
sub-section 5.4.2).
2)
Select
the
System Menu, and
then
the
Password
option.
The
Access
Control
dialogue
box
is
displayed.
Printed: 22-Mar-06. 10:42
Operating
Instructions
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5-11
of
52
UC
Davis 94-721001
Issue
1:
March 06
PlasmalabSystem100
Oxford
Instruments
Plasma Technology
Access
Control
System
Manual
Clurent
User
Access Level
Enter
Enter P,..sswonl
3)
Select
the
Edit
Users
button.
The Edit User List
is
displayed.
John Smith
TEST
TESTl
User
4)
To add a
new
user, click
on
the
Name and Password cells
then
enter
the
required
details (remember
that
text
entered
into
the
Password cell
is
case
sensitive). Clicking
on
the
Access
Level cell
will
display a scrollable
drop-down
list
with
the
following
options:
Option
Result
Quit
Exit
from
the
droP-down
list.
View
Only
All
Facilities
automatically
disabled.
User
A set
of
Facilities can be selected,
see
Step
5.
Production
See
sub-section 5.4.7 (paqe 5-18).
Maintenance
A special set
of
Facilities
is
automatically
enabled.
Note
that
this
access
level
has its
own
recipes and steps
for
maintenance and does
not
allow
access
to
process recipes and steps,
or
allow
the
system
loq
to
be viewed.
Manaqer
All
Facilities
automatically
enabled.
Select
one
of
the
access
levels
for
the
new
user.
UC
Davis 94-721001
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1:
March 06
Operating
Instructions
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5-12
of
52
Printed: 22-Mar-06. 10:42