Oxford-100-Manual.pdf - 第80页
PlasmalabSystem 1 00 Oxford Instruments Plasma Technology System Manual 5.4.3 System alerts System alerts are displayed when PC 2000 detects an event that requires the attention of the user. Each alert is automatically c…
System
Manual
Oxford
Instruments
Plasma
Technology
PiasmaiabSystem100
Similarly, existing Names, Passwords and
Access
Levels can be edited. In
addition,
existing entries can be removed
from
the
list by selecting a name and
then
selecting
the
Delete
button.
5)
The Facilities enabled
for
'User' (selected in Step
4)
can be
edited
by selecting
the
Facilities
button
while
the
cursor
is
in
the
name
field
for
that
user. This
will
display
the
Edit User Facilities
dialogue
box.
WARNING
BEFORE ENABLING FACILITIES, CONSIDER CAREFULLY
WHICH
FACILITIES WILL
BE
SELECTED FOR THE PERSON USING THE 'LOG
ON'
NAME.
FOR EXAMPLE, ALLOWING
AN
INEXPERIENCED USER ACCESS TO THE 'TOLERANCES' PAGE
WOULD
ALLOW THE
USER TO
CHANGE
TOLERANCES
WHICH
COULD POSSIBLY RESULT
IN
SYSTEM
MALFUNCTION
AND
EXPOSE THE OPERATOR TO
HAZARDOUS
SITUATIONS.
6)
Click
on
the
appropriate
checkboxes
to
enable
the
facilities available
to
the
selected
name
(tf
indicates enabled). Click
on
the
OK
button
to
accept
the
entered data and
exit.
Note
that
the
enabled facilities are
dependent
on
the
name and
not
on
the
access
level, e.g.
two
people
logged
on
as
users can have
different
sets
of
facilities enabled.
Printed: 22-Mar-06, 10:42
Operating
Instructions
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52
UC
Davis 94-721001
Issue
1:
March 06
PlasmalabSystem1
00
Oxford
Instruments
Plasma Technology System
Manual
5.4.3
System
alerts
System alerts are displayed
when
PC
2000 detects an
event
that
requires
the
attention
of
the
user.
Each
alert
is
automatically
categorised
depending
on
the
nature
of
the
event
and
the
response
required
by
the
user. The category
of
the
event
can range
from
a
warning
indicating
that
a service
parameter
is
out
of
tolerance
to
a process
abort
indicating
that
a process
setpoint
has been
out
of
tolerance
for
so
long
that
the
process
cannot
be completed. A
typical system
alert
is
shown in Fig 5.2.
?Syste",
Set Base
p..,,,,,,,
Fig 5.2: Typical system alert
The
alert
is
displayed
as
a
banner
in
the
menu bar
at
the
top
of
the
screen
with
an associated
dialogue
in
the
main screen area.
Note
that
more
than
one
alert
can be active
at
the
same
time,
each
requiring
action by
the
user
in
turn.
There are
three
categories
of
alert
indicated by
the
colour
and
text
displayed in
the
banner
and dialogue:
Blue
Warning
e.g.
water
flow
low.
Yellow
Hazard -
not
currently
used.
Red Process
abort,
e.g.
high-reflected
RF
power.
A user
logged
on
at
any
access
level can close
the
alert
dialogue,
but
only
a user
logged
on
as
a system
manager
can clear
the
alert
banner
from
the
menu bar. The
dialogue
options
are:
Accept button:System Managers only. Clear
the
alert
and
log
it.
Next
button:
Cancel
button:
View
the
next
alert.
System
Manager
only. Clear
the
alert;
do
not
log
it.
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Operating
Instructions
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of
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Printed: 22-Mar-06, 10:42
System
Manual
Oxford
Instruments
Plasma
Technology
PiasmaiabSystem100
Continue
button:
Close
the
alert
dialogue
box
-
the
alert
banner
remains displayed
on
the
menu
bar.
5.4.4
Note
that
option
buttons
that
are
not
available (i.e.
Accept
and Cancel
due
to
user
'logged
on'
status and
Next
when
there
is
only
one
active alert) are greyed out.
The
alert
message usually contains an adequate description
of
the
detected event.
If
it
is
a
service
fault
(water
flow,
purge
gas etc.)
then
verify
that
the
service
is
available
to
the
machine
as
soon
as
possible. Depending
on
the
nature
of
the
service,
the
system may
allow
the
machine
to
continue
to
operate,
so
that
the
current
process can be completed. Do
not
start
a
new
process
before
checking
the
service.
The red alerts are
often
due
to
a process
setpoint
being
out
of
tolerance
for
too
long.
In
these
cases,
the
process
is
halted
by
the
system.
If
it
is
authorised
to
resume processing
with
a
parameter
deviation
then:
1)
Check
the
most recent process
log
to
find
the
process
time
remaining.
2)
Construct a
new
process
with
a
modified
process
time
and check
the
'Ignore
tolerance'
option.
Note
that
this removes
illl
tolerance checking. The machine should
be
monitored
by an
operator
for
further
deviations
when
operated
in this
condition.
Pumping
down
1)
On
the
Pump
Control
page, select
the
SET
BASE
PRESSURE
button,
then
enter
the
required
process chamber base pressure
if
different
from
the
default.
2)
Ensure
that
the
Automatic
load
lock/transfer chamber's lid
is
closed.
(Automatic
load
lock/transfer chamber lid open/closed status
is
shown in
the
panel adjacent
to
the
mimic).
3)
Click on each
dry
pump/rotary
vane
pump
mimic
to
start
the
pump.
4)
Select
the
Evacuate
button
for
the
process chamber. The relevant valves
will
operate
and
the
process chamber
will
be
pumped
down.
5)
Select
the
Evacuate
button
for
the
Automatic
load lock. You
will
be
prompted
to
enter
a
wafer
identity
-
either
enter
the
identity
and click OK,
or
click Cancel
(to
pump
down
without
a
wafer
in
the
Automatic
load lock). The relevant valves
will
operate
and
the
Automatic
load lock
will
be
pumped
down.
NOTE:
Turning
off
any
rotary
vane
pump
will
cause all process and
pumping
actions using
that
pump
to
stop.
6)
To achieve a
low
base pressure
in
the
system,
pump
for
at
least
12
hours.
Where
chambers
or
process heaters are
part
of
the
system, raise
the
temperatures
of
these
near
their
maximum
values
for
the
first
six hours
of
pumping
to
assist out-gassing,
then
return
the
temperature
to
ambient.
WARNING
PARTS
OF
THE EQUIPMENT
MAY
BE
TOO HOT TO TOUCH DURING CHAMBER
HEATING.
Printed: 22-Mar-06. 10:42
Operating
Instructions
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of
52
UC
Davis 94-721001
Issue
1:
March 06