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PlasmalabSystem 1 00 Oxford Instruments Plasma Technology System Manual 5.5.2 To create a recipe step, based on an existing recipe step, use the following procedure: 1) Select a recipe step from the Step Library list, i.…
System
Manual
Oxford
Instruments
Plasma
Technology
PlasmalabSystem1
00
5.5
Creating
and
editing
recipes
Fig 5.3: Recipe screen
This
page
is
used
to
assemble and store in
memory
all
the
set
points
and instructions
which
make
up
a Recipe
for
an
Automatic
Mode
run. These recipes consist
of
a sequence
of
process
Steps.
'Drag
and
Drop'
facilities are
provided
to
copy
library
steps
into
a recipe.
NOTE: For a description
of
the
facilities
on
this page,
refer
to
sub-section 5.8.3, page 5-37.
The Recipe
option
(accessed
from
the
PROCESS
button)
displays
the
recipe page
for
the
process chamber. This page allows
you
to
create I
edit
recipes and
the
recipe steps
that
they
contain.
NOTE:
Before
creating I
editing
recipes,
make
sure
that
you
understand
the
operation
of
key components
of
the
system
to
ensure
that
recipes proceed
as
expected.
A recipe
is
created
by
adding
steps
from
the
Step
Library
to
the
Recipe Step Name fields. The
recipe
is
then
allocated a Data Log Interval and saved.
5.5.1
Working
with
recipe steps
Recipe steps are stored in
the
Step
Library
list. The list can
contain
any
number
of
steps,
depending
on
available hard disk space.
When
the
displayed list
is
full,
it
becomes scrollable
to
allow
you
to
view
all
of
the
list contents.
CREATE A
NEW
RECIPE
STEP
To create a
new
recipe step, use
the
following
procedure:
1)
In
the
Step Library panel, select
the
NEW
button.
The Step Edit page
is
displayed.
2)
Enter
the
step parameters
as
required,
then
click
on
OK. The step
is
automatically
saved.
Printed: 22-Mar-06. 10:42
Operating
Instructions
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5-21
of
52
UC
Davis 94-721001
Issue
1:
March 06
PlasmalabSystem100
Oxford
Instruments
Plasma
Technology
System
Manual
5.5.2
To create a recipe step, based
on
an existing recipe step, use
the
following
procedure:
1)
Select a recipe step
from
the
Step
Library
list, i.e. click on
it
to
highlight
it.
2)
Select
the
COPY
button.
Enter a
new
step name.
3)
Edit
the
step parameters
as
required,
then
click
on
OK. The
new
recipe step
is
automatically
saved.
EDIT
AN
EXISTING
RECIPE
STEP
To
edit
an existing recipe, use
the
following
procedure:
1)
Select a recipe step
from
the
Step
Library
list, i.e. click on
it
to
highlight
it.
2)
In
the
Step Library panel. click on
the
Edit
button.
3)
Edit
the
step's process parameters
as
required.
then
click on OK. The step
is
automatically
saved.
NOTE: Changing an existing recipe step
will
not
alter
saved recipes,
which
use
the
old
version
of
that
step.
DELETE
A
RECIPE
STEP
To
delete
a recipe step. use
the
following
procedure:
1)
Select
the
recipe step
from
the
Step
Library
list. i.e. click
on
it
to
highlight
it.
2)
Select
the
DELETE
button;
the
selected recipe step
is
deleted.
Working
with
recipes
Recipes are
'built'
using existing recipe steps, and
edited
as
required.
Within
a recipe. steps can be
manipulated
using
the
Step
Commands
pop-up
menu
(accessed
by
clicking
on
the
Recipe Steps field).
Fig 5.4: Step Commands pop-up
menu
The
Step
Commands
pop-up
menu provides
the
following
options:
Edit
Step
Enables
the
selected
(highlighted)
step
to
be edited.
UC
Davis 94-721001
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1:
March 06
Operating
Instructions
Page 5-22
of
52
Printed: 22-Mar-06, 10:42
System
Manual
Oxford
Instruments
Plasma
Technology
PlasmalabSystem100
Repeat
Step
Repeats all subsequent steps
until
a Loop Step
is
reached. This
group
of
steps can be repeated any
number
of
times. (When
you
select this
option,
you
are
prompted
to
enter
the
number
of
times
the
group
of
steps
is
to
be
repeated.)
Loop
Step
Terminates a Repeat Step
group.
Insert
Step
Creates a 'gap' above
the
selected step
to
allow
another
step
to
be
dragged
into
the
list.
Delete
Step
Deletes
the
selected step
from
the
list.
Cancel Closes
the
Step
Commands
pop-up
menu.
BUILD A RECIPE
To
build
a recipe, use
the
following
procedure:
1)
In
the
Recipe panel, select
the
NEW
button.
2)
Click on a recipe step in
the
Step
Library
list,
hold
the
left
mouse
button
down
then
drag
the
mouse
pointer
to
the
Step
Name
field
next
to
the
asterisk (*)
then
release
the
mouse
button.
The step name
is
displayed in
the
Step
Name
field.
3)
Repeat
2)
as
required
to
add
further
steps
to
the
recipe.
Note
that
once
you
have
filled
the
Step Name field,
the
recipe step list becomes scrollable,
enabling
you
to
add a
maximum
total
of
1000 steps.
4)
To remove a step
from
the
list, click on
it
to
highlight
it
then
select
the
Delete
step
button
from
the
Step
Commands
pop-up
menu.
Any
further
steps
will
move
up
the
list
by
one
place.
5)
To add a step
before
an existing step, click on
the
existing step
then
select
the
Insert
step
button
from
Step
Commands
pop-up
menu. The selected step and all those
following
it
will
move
down
the
list
by
one place. You can
then
drag
another
step
from
the
Step
Library
list
into
the
now
vacant field.
6)
When
all steps have been added,
enter
a
time
into
the
Data
Log
Interval
field,
then
enter
a name
for
the
recipe
in
the
Recipe
Name
field. Finally, select
the
SAVE
button.
EDIT A RECIPE
To
edit
a recipe, use
the
following
procedure:
1)
Select
the
LOAD
button,
then
select
the
recipe
to
be edited.
2)
In
the
Step Commands
pop-up
menu, click on
the
Edit Step
button,
then
edit
the
process parameters
as
required.
Note
that
editing
a recipe step
will
not
affect
the
associated step, i.e. a step having
the
same filename,
in
the
Library
of
Available
Steps.
3)
To remove a step
from
the
list, click
on
it
to
highlight
it
then
select
the
DELETE
STEP
button
from
the
Step
Commands
pop-up
menu.
Any
further
steps
will
move
up
the
list
by
one
place.
4)
To add a step
before
an existing step, click
on
the
existing step
then
select
the
INSERT
STEP
button.
The selected step and all those
following
it
will
move
down
the
list by
one
place. You can
then
drag
another
step
from
the
Step
Library
list
into
the
now
vacant field.
Printed: 22-Mar-06, 10:42
Operating
Instructions
Page 5-23
of
52
UC
Davis 94-721001
Issue
1:
March 06