Oxford-100-Manual.pdf - 第93页
System Manual Oxford Instruments Plasma Technology PlasmalabSystem 1 00 9) In the 'Column data format' panel, ensure that the 'General' option is selected and then select the Finish button. The proces…
PlasmalabSystem1
00
Oxford
Instruments
Plasma
Technology
System Manual
2)
Select
the
Save
As
Text
button.
The
Save
As
dialogue
is
displayed.
3)
Navigate
to
the
target
location
for
the
log
text
file,
enter
a
filename
and in
the
'Save
as
type:'
field
select 'Log Text Files (*.Txt)'
from
the
drop-down
list.
If
saving
to
a
floppy
disk, label
it
and insert
into
the
drive
now.
4)
Select
the
Save
button.
The
text
file
is
saved in
your
chosen location.
5)
Start Excel and
then
in
the
File menu, select
the
Open
option.
The
'Open'
dialogue
is
displayed.
6)
Navigate
to
the
location
of
the
saved
text
file
and in
the
'Files
of
type:'
field, select
'All
Files (*.
*)'
from
the
drop-down
list. Select
the
required
text
file
and
then
select
the
Open
button.
The
'Text
Import
Wizard
- Step 1
of
3'
dialogue
is
displayed:
7)
In
the
'Original
data
type'
panel, select
the
'Delimited'
option
and
then
select
the
Next>
button.
The 'Text
Import
Wizard - Step 2
of
3'
dialogue
is
displayed:
8)
In
the
'Delimiters'
panel, select
the
'Comma' checkbox. Select
the
Next>
button.
The
'Text
Import
Wizard
- Step 3
of
3'
dialogue
is
displayed:
UC
Davis 94-721001
Issue
1:
March 06
Operating
Instructions
Page 5-26
of
52
Printed: 22-Mar-06, 10:42
System
Manual
Oxford
Instruments
Plasma Technology
PlasmalabSystem
100
9)
In
the
'Column data
format'
panel, ensure
that
the
'General'
option
is
selected and
then
select
the
Finish
button.
The process
run
log
data
is
now
displayed in
the
Excel
worksheet.
10)
Adjust
the
column
widths
so
that
all
text
is
visible and
then
save
the
spreadsheet.
Printed: 22-Mar-06, 10:42
Operating
Instructions
Page 5-27
of
52
UC
Davis 94-721001
Issue
1:
March 06
PiasmaiabSystem100
Oxford
Instruments
Plasma
Technology
System Manual
5.6.2
Run
log
page
The Run Log page
is
accessed
from
the
Select Run page
by
clicking
on
the
View
Run
button
with
any process run
other
than
a leak
detection
run
(tll )
or
MFC
calibration
run
(:Jj)
selected.
Parameter
Slep
Time
Pump
Pressure
Pump
Time
C4F3
SF6
CHF3
Ar
02
RI
Power
RI
Rellecled
Power
DCBias
Table
Temperature
Set
Pressure
S
at
Position
Pres:sure
Low
Pressure
Strike
Low
Pressure
Strike
Icp
Forward
Power
Icp
R.f1ecled
Helium
Pre~ure
Helium
Flow
Fig 5.6:
Run
logpage
The page displays
the
Parameters, Demands and Readbacks
for
the
selected
log
data.
The facilities
provided
on
the
page are
as
follows:
Select Run Displays
the
Select Log page.
button
Log
information
Displays details
about
the
selected
log
data.
panel
Parameter
list Lists
the
logged
parameter
names
Demand
list Displays
the
demanded
parameter
value
Readbacks list Displays
the
logged
parameter
values
with
respect
to
time
at
the
log
intervals specified
for
the
process run. The list can be scrolled
horizontally
either
by single readbacks
or
by page. The list can also be
scrolled vertically
to
display
further
steps
(for
multi-step
recipes).
UC
Davis 94-721001
Issue
1:
March 06
Operating
Instructions
Page 5-28
of
52
Printed: 22-Mar-06, 10:42