222085 Issue 1 - Horizon APiX Appendix Manual - 第11页

Appendix to Micron Technical Manuals

APPENDIX A

Operator Information

Appendix to Micron Technical Manuals

OPERATOR APPENDIX

EMERGENCY MACHINE OFF (EMO) OPERATION

Chapter Issue 1 June 15 Appendix to Micron Technical Manuals 1.1

CHAPTER 1 OPERATOR APPENDIX

EMERGENCY MACHINE OFF (EMO) OPERATION

With the machine powered up, activating the red Emergency Machine Off

button (EMO) immediately powers down the machine both electrically and

pneumatically.

If the EMO is operated during machine movement, electrical and pneumatic

power is immediately removed. Machine movement may continue under inertia

and may result in machine damage. To avoid machine damage, ensure the

machine is shutdown correctly by following the Power Down procedure in the

Operator manual.

NOTE

The EMO is a safety feature intended to power down the equipment in an

emergency so as to protect personnel and equipment. In case of an emer-

gency, it may not be possible to access the main disconnect device on the

equipment leaving the EMO as the only means to power down the equipment.

This is a requirement of SEMI S2.

To activate:

Press the EMO button, electrical and

pneumatic power to the machine is

removed.

To reset:

Turn the EMO button clockwise to release

the latch.

Press the Start button (green) to restore

electrical and pneumatic power.