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2 Retrofit instructions for vacuum pump SIPLACE HS-50/HS-60/D4/S-25HM/S-27HM/HF-Series 07/2011 Edition 56

SIPLACE HS-50/HS-60/D4/S-25HM/S-27HM/HF-Series 2 Retrofit instructions for vacuum pump
07/2011 Edition
55
Vacuum curves 2
2
2
2
Vacuum [mbar]
Number of open nozzles
Gantry 1
Gantry 2
Vacuum curve for S27HM with ELMO 2BL 1 1000 vacuum pump and 720 nozzles
Gantry 1: 6-segment head / Gantry 2: 12-segment head
Relative Vacuum [mbar]
Number of open nozzles
Vacuum curve for HS60 with ELMO 2BL 1 1000 vacuum pump and 914 nozzles
12-seg. head, gantry 1
12-seg. head, gantry 2
12-seg. head, gantry 3
12-seg. head, gantry 4
2 Retrofit instructions for vacuum pump SIPLACE HS-50/HS-60/D4/S-25HM/S-27HM/HF-Series
07/2011 Edition
56
57