M1plus_maintenancePL.pdf - 第12页
No. Part No. Part Name Qty Remarks Drawing Name Drawing No. 1 LG0-M730F-00X MIRROR 1 2 LG0-M73CF-20X FILTER,LENS 1 3 LC0-M73K1-00X SLS-2 BOARD ASSY. 1 SLS-2 - J128 4 LC0-M73K2-00X SLM-2 BOARD ASSY. 1 5 LC0-M73K0-00X SENS…
No. Part No. Part Name Qty Remarks Drawing Name Drawing No.
1
LG0-M22H0-00X PHOTO SENSOR 4 X-Y ORG.,OR. Y-AXIS ASSY LC0-M2600-000 4/4
2
LC0-M26KA-00X FAN ASSY. 2
3
LC0-M26M0-00X MOTOR ASSY. 2 Y-AXIS ASSY LC0-M2600-000 4/4
2 3
1 1
23
Y-axis
No. Part No. Part Name Qty Remarks Drawing Name Drawing No.
1
LG0-M730F-00X MIRROR 1
2
LG0-M73CF-20X FILTER,LENS 1
3
LC0-M73K1-00X SLS-2 BOARD ASSY. 1 SLS-2 - J128
4
LC0-M73K2-00X SLM-2 BOARD ASSY. 1
5
LC0-M73K0-00X SENSOR ASSY 1 HIO7 - S.EL-
6
LG0-M73H3-00X CAMERA,FF-SHUTTER 1 CAMERA,CCU
7
90K50-411KK0 MOTOR ASSY. 1
SCAN-AXIS 15R LC0-M7300-000
1
4
5
7
6
2
3
Scan-axis(15R)
No. Part No. Part Name Qty Remarks Drawing Name Drawing No.
1
LG0-M730F-00X MIRROR 1
2
LG0-M73CF-10X FILTER,LENS 1
3
LC0-M73K3-00X SLS2 BOARD ASSY. 1 SLS-2 - J128
4
LC0-M73K2-00X SLM-2 BOARD ASSY. 1
5
LC0-M73K0-00X SENSOR ASSY 1 HIO7 - S.EL-
6
LG0-M73H3-00X CAMERA,FF-SHUTTER 1 CAMERA,CCU
7
90K50-411KK0 MOTOR ASSY. 1
SCAN-AXIS 15B LC0-M7300-100
5
1
4
3267
Scan-axis(15B)