M1plus_maintenancePL.pdf - 第14页
No. Part No. Part Name Qty Remarks Drawing Name Drawing No. 1 LG0-M34A0-00X SOCKET,COUPLER 60 2 LG0-M34H0-00X BOARD,FBD 1 3 LG0-M34H1-10X BOARD,FBC-1 2 FEEDER BANK STD LG0-M3400-000 2 3 1 Feeder Bank(Std)
No. Part No. Part Name Qty Remarks Drawing Name Drawing No.
1
LG0-M730F-00X MIRROR 1
2
LG0-M73CF-10X FILTER,LENS 1
3
LC0-M73K3-00X SLS2 BOARD ASSY. 1 SLS-2 - J128
4
LC0-M73K2-00X SLM-2 BOARD ASSY. 1
5
LC0-M73K0-00X SENSOR ASSY 1 HIO7 - S.EL-
6
LG0-M73H3-00X CAMERA,FF-SHUTTER 1 CAMERA,CCU
7
90K50-411KK0 MOTOR ASSY. 1
SCAN-AXIS 15B LC0-M7300-100
5
1
4
3267
Scan-axis(15B)
No. Part No. Part Name Qty Remarks Drawing Name Drawing No.
1
LG0-M34A0-00X SOCKET,COUPLER 60
2
LG0-M34H0-00X BOARD,FBD 1
3
LG0-M34H1-10X BOARD,FBC-1 2
FEEDER BANK STD LG0-M3400-000
2
3
1
Feeder Bank(Std)
No. Part No. Part Name Qty Remarks Drawing Name Drawing No.
1
LG0-M34A0-00X SOCKET,COUPLER 20
2
LG0-M34H5-00X BOARD,FBDS 1
3
LG0-M34H6-00X BOARD,FBCS 1
FEEDER BANK MX TYPE LG0-M3400-200
2
3
1
Feeder Bank(MX Type)