M1plus_maintenancePL.pdf - 第41页
No. Part No. Part Name Qty Remarks Drawing Name Drawing No. 1 LG8-M17K0-00X SENSOR,PH ASSY 1 Stocker Area 2 LG8-M17K1-00X SENSOR,PH ASSY 1 E-axis ORG. 3 LG8-M17K2-00X SENSOR,PH ASSY 1 E-axis EL+ 4 90K55-733L30 MOTOR,SERV…
No. Part No. Part Name Qty Remarks Drawing Name Drawing No.
1
KJ8-M7451-00X SPRING RACK 1
2
LG8-M14A1-00X CYLINDER,ASSY 2
3
LG8-M14K0-00X SENSOR,CYL.ASSY 1 LEFT
4
LG8-M14K1-00X SENSOR,CYL.ASSY 1 RIGHT
RACK ASSY LG8-M1400-000
2、4
2、3
1
MXR-20(Rack Assy.)
No. Part No. Part Name Qty Remarks Drawing Name Drawing No.
1
LG8-M17K0-00X SENSOR,PH ASSY 1 Stocker Area
2
LG8-M17K1-00X SENSOR,PH ASSY 1 E-axis ORG.
3
LG8-M17K2-00X SENSOR,PH ASSY 1 E-axis EL+
4
90K55-733L30 MOTOR,SERVO ASSY. 1 E-axis
ELEVATOR AXIS ASSY LG8-M1700-000
1 3
1 4 2
MXR-20(Elevator axis)
No. Part No. Part Name Qty Remarks Drawing Name Drawing No.
1
LG8-M18A4-00X BELT 1 1
2
LG8-M18AA-00X SPRING 2
3
LG8-M18AB-00X BRG. 2
4
LG8-M18A5-00X BELT 2 1
5
LG8-M18K6-00X SV ASSY. 1 Hook Lock
6
LG8-M180K-00X GUIDE,PALETTE RF 1
7
LG8-M180L-00X GUIDE,PALETTE RR 1
8
LG8-M180M-00X GUIDE,PALETTE LF 1
9
LG8-M180N-00X GUIDE,PALETTE LR 1
10
90K55-4W1K30 MOTOR,SERVO ASSY. 1 Hook axis
11
LG8-M18K7-00X SENSOR,PH ASSY. 1 PALLET SENSOR(Interlock)
12
LG8-M18K2-01X SENSOR,PH ASSY. 1 HOOK ORG.
HOOK AXIS
ASSY
LG8-M1800-010
1/2
2
3 4
8 9
6 5 7
10
1 11 12
MXR-20(Hook axis 1 of 2)