Mechanical Parts List - 第55页
PART No. ｲﾗｽﾄ No. REF No. PART NAME REMARKS Q'TY 4 X-Yﾃ-ﾌﾞﾙ部(X軸駆動部) X-Y TABLE SECT .(X-AXIS DRIVING SECT.) 部 品 名 品 番 個数 備 考 R 1 R 2 1 N610055746AA X-Y TABLE UNI T X-Y ﾃｰﾌﾞﾙﾕﾆｯﾄ 1 001 N210069667AA BRACKET(MOTOR ) ﾌﾞﾗ…
X-Yﾃ-ﾌﾞﾙ部(X軸駆動部)
X-Y TABLE SECT.(X-AXIS DRIVING SECT.)
4
FN610055746AA_03-1
M37
PART No.
ｲﾗｽﾄ
No.
REF
No.
PART NAME
REMARKS
Q'TY
4
X-Yﾃ-ﾌﾞﾙ部(X軸駆動部)
X-Y TABLE SECT.(X-AXIS DRIVING SECT.)
部 品 名 品 番 個数 備 考
R
1
R
2
1 N610055746AA
X-Y TABLE UNIT X-Y ﾃｰﾌﾞﾙﾕﾆｯﾄ
1
001 N210069667AA
BRACKET(MOTOR) ﾌﾞﾗｹｯﾄ(ﾓｰﾀ)
1
003 N210069662AA
HOUSING ﾊｳｼﾞﾝｸﾞ
1005 N210069668AA
HOLDER(SHAFT) ﾎﾙﾀﾞ(ｼｬﾌﾄ)
3010 108710401302
BRACKET ﾌﾞﾗｹｯﾄ
1
011 1087104014
DOG FOR SENSOR ｾﾝｻﾄﾞｸﾞ
1
018 N210069669AC
COVER ｶﾊﾞｰ
1026 N210028631AA
COVER(BEARING) ｶﾊﾞｰ(ﾍﾞｱﾘﾝｸﾞ)
(MSMD042PJA) S
1
A005
N610052027AA
MOTOR ﾓｰﾀ
SFC-035SA2-9B-14B
1
N006
N510010689AA
COUPLING ｶｯﾌﾟﾘﾝｸﾞ
FU00SS
1
N007
N510004723AA
NUT ﾅｯﾄ
7000ADBC8P5
1
N008
N510003427AA
BEARING ﾍﾞｱﾘﾝｸﾞ
6201ZZ
1
N009
XLC6201ZZ
BALL BEARING ﾎﾞｰﾙﾍﾞｱﾘﾝｸﾞ
87FWSSB-D16.0-V5.0-T2.
1
N010
N510034921AA
WASHER ｻﾞｶﾞﾈ
P921S1
1
N011
N310P921S1
SENSOR ｾﾝｻ
PANADAC921SA1
2
N012
N310P921SA1
SENSOR ｾﾝｻ
87FWSSB-D15.0-V10.0-T3
1
N022
N510032158AA
WASHER ﾜｯｼｬ
GZ1510ES-ZAPR-0744X069
1
N024
N510037864AA
BALL SCREW ﾎﾞｰﾙﾈｼﾞ
M38
FN610055746AA_03-1
X-Yﾃ-ﾌﾞﾙ部(Y軸駆動部)
X-Y TABLE SECT.(Y-AXIS DRIVING SECT.)
4
FN610055746AA_03-2
M39