YSH20_cwd_je.pdf - 第17页
Confidential & Proprietary P A G E I PWR CN34 CN5 J0793 ION B J0791 ION A LEFT SIDE IONIZER A22 RIGHT SIDE IONIZER A21 See Page 5 See Page 6 ION Y POW See YWF INTERCON NECTION DIAGRAM J0792 J0794 WAFER TABLE I/O CONV…
Confidential & Proprietary
PAGE
I/O F2-2
I/O F2-1
FDR PWR F2
FDR PWR F1
J0054
J0053
J0105
J0103
CN37
CN38
I/O F1-2
I/O F1-1
J0110
See Page 7
See Page 2
SYSTEM CONTROL BOX
REMOTE IF BOARD
I/O B
CN27 HA
CN21
CN21
J0730
J0729
J0728
J0727
J0726
J0725
J0724
J0723
J0722
J0721
J0710
J0709
J0708
J0707
J0706
J0705
J0704
J0703
J0702
J0701
CN17 F2
CN18 F2
CN17
CN18
CN21
CN21 CN1
CN2
CN3
CN4
CN5
CN6
CN7
CN8
CN9
CN10
CN11
CN1
CN2
CN3
CN4
CN5
CN6
CN7
CN8
CN9
CN10
CN11
COM
CUnet/SET POS.
+24V_IN
CN17
CN18
COM
CUnet/SET POS.
+24V_IN
CN17 F1
CN18 F1
CN16
.
.
.
CN20
CN19
FDR CTRL BOARD ASSY P103
FDR CTRL BOARD ASSY P104
CN16
.
.
.
CN20
CN19
J0711CN19
CN20
DO
DI
FDR DO0
FDR DI1
CN19
CN20
FDR DO0
FDR DI1
J0731
・10 SS feeders
・10 SS feeders
T0108200
N0108881
T0108280
N0108D01
FIX10 FRONT-2 FEEDER
FIX10 FRONT-1 FEEDER
J0700
J0108
J0720
J0109
J0104 NOTE1
NOTE1 : In the case of 4M HEAD, it connects with J0109
FCTR I/O HEAD BOARD A
See Page 8 : TYPE FF
See Page 10 : TYPE 4M
HEAD A
I/O CONVEYOR BOARD -5-
CC.V3
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FEEDER STRUCTURE
YSH20
Confidential & Proprietary
PAGE
I PWR
CN34
CN5
J0793
ION B
J0791
ION A
LEFT SIDE
IONIZER A22
RIGHT SIDE
IONIZER A21
See Page 5
See Page 6
ION Y POW
See YWF
INTERCONNECTION DIAGRAM
J0792
J0794
WAFER TABLE
I/O CONVEYOR BOARD -3-
I/O CONVEYOR BOARD -4-
CC.V3
15
IONIZER ASSY(OPTION)
YSH20
Confidential & Proprietary
PAGE
200V 208V 220V 240V 380V 400V 416V
200V 208V 220V 240V 380V 400V 416V
V10
U10
V10
U10
V10
U10
V10
U10
V10
U10
V10
U10
V10
U10
R2
R2
R2
R2
R2
R2
R2
S2
S2
S2
S2
S2
S2
S2
T2
T2
T2
T2
T2
T2
T2
S3
S3
S3
S3
S3
S3
S3
R3 R3 R3 R3 R3 R3 R3
W50
V50
U50
W50
V50
U50
W50
V50
U50
W50
V50
U50
W50
V50
U50
W50 W50
V50
U50
V50
U50
W30
V30
U30
W30
V30
U30
W30
V30
U30
W30
V30
U30
W30
V30
U30
W30
V30
U30
W30
V30
U30
TC11:The selection of POWER SOURCE 1.5KVA(STD)/1.75KVA(with UPS)
TM11:The selection of POWER SOURCE 3.552KVA
100V
100V
0V
0V
100V
100V
0V
0V
100V
100V
0V
0V
100V
100V
0V
0V
100V
100V
0V
0V
100V
100V
0V
0V
240V
0V
190V
200V
208V
220V
240V
0V
190V
200V
208V
220V
0V
100V
240V
0V
190V
200V
208V
220V
240V
0V
190V
200V
208V
220V
0V
100V
240V
0V
190V
200V
208V
220V
240V
0V
190V
200V
208V
220V
0V
100V
240V
0V
190V
200V
208V
220V
240V
0V
190V
200V
208V
220V
0V
100V
240V
0V
190V
200V
208V
220V
240V
0V
190V
200V
208V
220V
0V
100V
240V
0V
190V
200V
208V
220V
240V
0V
190V
200V
208V
220V
0V
100V
240V
0V
190V
200V
208V
220V
240V
0V
190V
200V
208V
220V
0V
100V
N N N NN N N
100V
100V
0V
0V
220V
220V 200V
200V
200V
200V
200V
200V
200V
200V
200V
200V
200V
200V
200V
200V
200V
200V
200V
200V200V
240V
220V
208V
200V
190V
0V
240V
220V
208V
200V
190V
0V
240V
220V
208V
200V
190V
0V
240V
220V
208V
200V
190V
0V
240V
220V
208V
200V
190V
0V
240V
220V
208V
200V
190V
0V
W
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U
220V
220V
220V
240V
220V
208V
200V
190V
0V
240V
220V
208V
200V
190V
0V
240V
220V
208V
200V
190V
0V
240V
220V
208V
200V
190V
0V
240V
220V
208V
200V
190V
0V
240V
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208V
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190V
0V
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220V
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208V
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190V
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220V
208V
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190V
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190V
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190V
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208V
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190V
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240V
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208V
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190V
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240V
220V
208V
200V
190V
0V
240V
220V
208V
200V
190V
0V
240V
220V
208V
200V
190V
0V
240V
220V
208V
200V
190V
0V
W
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U
220V
220V
220V
240V
220V
208V
200V
190V
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240V
220V
208V
200V
190V
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240V
220V
208V
200V
190V
0V
240V
220V
208V
200V
190V
0V
240V
220V
208V
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190V
0V
240V
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208V
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190V
0V
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220V
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190V
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190V
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240V
220V
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190V
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240V
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200V
190V
0V
240V
220V
208V
200V
190V
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240V
220V
208V
200V
190V
0V
W
V
U
220V
220V
220V
CC.V3
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POWER TRANSFORMER
YSH20