YSH20_cwd_je.pdf - 第21页

Confidential & Proprietary

PAGE

+24V

+24VA0

+24VA1

+24VA2

+24VA3

+24VA4

+24VA5

+24VA6

+24VA7

+24VA8

+24VA9

+24VAA

0.9A

CN1

2

1

2

1

I/O CONVEYOR BOARD ASSY P025

See Page 3-7

4

3

4

3

XT41,XT42

POWER CIRCUIT -1-

GS22

CN6 0.9ACN6

1

2

3

4

CALIB+24V

1

2

3

4

J0042

J0060J0115

1

2

3

4

5

6

1

2

3

4

5

6

P023

CALIB.BOARD ASSY A

1

2

3

4

5

6

1

2

3

4

5

6

CALIB.BOARD ASSY B

P024

CN1

CALIB A CN1

CALIB B CN1

1

2

3

4

1

2

3

4

BCR+24V

2.5ACN26CN26

1

2

3

4

1

2

3

4

1

2

3

4

1

2

3

4

FCTR I/O HEAD BOARD ASSY A

FCTR HA CN28

CN28

P022

P021

FCTR I/O HEAD BOARD ASSY B

1

2

1

2

ANC A PWR

1

2

1

2

J0057

ANC B PWR

1

2

1

2

CN3

AACN3

1

2

1

2

CN3

J0058

J0059ABCN3

2.5ACN27

J0051

POWER CIRCUIT -1- EXT.PWR B6

EXT.PWR A6

CN27

CN28

11

22

33

CN4

11

22

33

CN4

11

22

33

CN4

11

22

33

CN4

11

22

33

11

22

33

DIGITAL MALTI CAMERA A1

MULTI CAM2 BRD. ASSY

A1 CAM+24V

DIGITAL MALTI CAMERA B1

MULTI CAM2 BRD. ASSY

DIGITAL MALTI CAMERA A2

MULTI CAM2 BRD. ASSY

DIGITAL MALTI CAMERA B2

CAMERA SELECTOR A

CAMERA SELECTOR B

CAMSEL BRD. ASSY

CN11

B1 CAM+24V

A2 CAM+24V

B2 CAM+24V

C.SEL A DC24V

C.SEL B DC24V

J0052 CN28

P084

P085

P086

P087

P081

P082

1.6A

2.5A CN29 CN29

CN306.0A

+24V2

6.0A

+24V2

CN31

CN34 CN34

1

2

3

4

1

2

3

4

I PWR

1

2

1

2

F.FDR ST FDR ST

1

2

R.FDR ST

J0045

1 1

2 2

FEEDER SET STATION

CN1

P107

CN1

FDR ST BOARD ASSY

J0901

J0793

1

2

3

4

1

2

3

4

ION A

J0791

1

2

3

4

1

2

3

4

5

6

5

6

1

2

3

4

1

2

3

4

5

6

5

6

1

2

3

4

1

2

3

4

ION B

CN351.35A

YWF CAMERA SELECTOR

See YWF

INTERCONNECTION DIAGRAM

J0055CN35

1.85A CN36 CN36

See YWF

INTERCONNECTION DIAGRAM

1

2

1

2

CN376.0A

1

2

1

2

CN37 FDR PWR F1J0053

1

2

1

2

1

2

1

2

CN386.0A CN38 FDR PWR F2J0054

2

1

4

3

3.0A

2.5A

CN43

+24V

A1

B1

A2

B2

A3

A1

B1

A2

B2

A3

B3 B3

2.5A CN44 J0751

2

1

4

3

3.0A

2.5A

+24V

CN45

1 1

2 2

FIX10 FRONT-1 FEEDER

CN21

P103

FDR CTRL BOARD ASSY

1 1

2 2

CN21

FDR CTRL BOARD ASSY

FIX10 FRONT-2 FEEDER

P104

J0700

J0720

+24VAD

+24VAE

+24VAF

+24VAG

+24VB1

0.9A

1.35A

+24VB4

+24VB5

1.35A

+24VB2

+24VB3

0.3A

0.9A

+24VS3

0.9A

+24VF1

+24VB8

1.35A

+24VB7

0.9A

RIGHT SIDE

LEFT SIDE

IONIZER B A22

IONIZER A A21

THERMO CONTROL UNIT

See YWF

INTERCONNECTION DIAGRAM

YWF IONIZER

WAFER TABLE

WAFER HEAD

HEATER

THERMO WARNING UNIT

J2057

1

2

1

2

DIP/DOT 24V

J0753

DIP/DOT A 24V

1

2

1

2

DIP/DOT 24V

1

2

3

4

5

6

7

8

9

DIPDIP/DOT B 24V

J0754

1

2

3

4

5

6

7

8

9

DIP

2

1

4

3

QF45

XT43

KM12A

XT43

2

1

4

3

5

6

7

8

2

1

4

3

5

6

7

8

LIGHT

LIGHT BR

LIGHT AR

LIGHT BF

LIGHT AF

B-STAGE REAR

LED

A-STAGE REAR

LED

B-STAGE FRONT

LED

A-STAGE FRONT

LED

1

2

1

2

1

2

1

2

1

2

1

2

1

2

1

2

LED LIGHT

POWER CIRCUIT -1-

See Page 17

CN44

CN45

See Page 17

J0601 J0603

J0604

EL01 COVER LIGHT

EL02 COVER LIGHT

EL03 COVER LIGHT

EL04 COVER LIGHT

A1

B1

A2

B2

A1

B1

A2

B2

A3

B3

A3

B3

A4

B4

A4

B4

A5

B5

A6

B6

A7

B7

A8

B8

A9

B9

A10

B10

A7

B7

A8

B8

A9

B9

A10

B10

+24VAB +24V

A5

B5

A6

B6

+24V

+24V2

A5

B5

A4

B4

A3

B3

A2

B2

A1

B1

A6

B6

A5

B5

A4

B4

A3

B3

A2

B2

A1

B1

A6

B6

+24V+24VS2

ANC CTRL BOARD ASSY A

P015

ANC CTRL BOARD ASSY B

P016

A5

B5

A4

B4

A3

B3

A2

B2

A1

B1

A6

B6

A5

B5

A4

B4

A3

B3

A2

B2

A1

B1

A6

B6

+24V+24VF5

A6

B6

A6

B6

A1

B1

A2

B2

A3

B3

A4

B4

A5

B5

A1

B1

A2

B2

A3

B3

A4

B4

A5

B5

+24VC2 +24V

+24V

+24VC3

A1

B1

A2

B2

A1

B1

A2

B2

+24VD5+24V2

2

1

+24VD3

2

1

+24VD4

7

8

5

6

3

4

2

1

+24E

7

8

5

6

3

4

2

1

9

10

7

8

5

6

3

4

2

1

9

10

2

1

3

4

5

6

7

8

+24VF6+24V

9

10

7

8

5

6

3

4

2

1

+24V

9

10

2

1

3

4

5

6

7

8

+24VF7

+24VD1+24V2

+24VD2

+24VF3

+24VC1

+24VS1+24V

+24VF4

+24VB6

CC.V3

18

POWER CIRCUIT -2-

YSH20

Confidential & Proprietary

PAGE

2

GOOD

3

1

GOOD

2

GOOD

3

1

GOOD

2

3

1

2

3

1

2

3

1

2

3

1

2 2

1

HB EMG

SRV1 GOOD

SRV2 GOOD

SERVO3

SERVO4

SRV3 GOOD

SRV4 GOOD

2

GOOD

3

1

GOOD

2

3

1

INTERFACE1

SYSTEM CONTROL BOX A1

A1

B1

A2

B2

A3

B3

A1

B1

A2

B2

A3

B3

A29

B29

A30

B30

A29

B29

A30

B30

SPARE

+24E

CN11

+24VS3

EMG3

EMG4

EMG5

EMG6

EMG7

EMG9

EMG10

EMG11

EMG12

EMG8

E12A

E11A

E13A

E12A

E11A

E13A

0V

EMG5

EMG6

EMG12

EMG13

EMG14

EMG15

EMG16

EMG17

EMG18

EMG19

EMG20

EMG21

EMG22

+24VS3

EMG16

EMG11

+24E

+24VB2

SPARE

1

2 2

1

SQ101

FRONT COVER SW

COVERF COVER

N0100484

N0100485

N0100486

N0100487

N0100490

N0100491

N0100492

N0100493

N0100494

N0100495

FRONT COVER SW

MAGAZINE COVER UPPER SW

MAGAZINE COVER LOWER SW

N0100496

N0100497

N01004A0

N01004A1

N01004A2

N01004A3

N01004A4

N01004A5

N01004A6

N01004A7

REAR COVER SW

1

2 2

1

EMG

1

2 2

1

EMGF2 EMG

1

2 2

1

EMGF1 EMG

REAR EMG SW

SB33

SB32

FRONT 2 EMG SW

SB31

FRONT 1 EMG SW

XAOT

XBOT

SRV C/R

YWF SET SW

FRONT 1 EMG SW

FRONT 2 EMG SW

REAR EMG SW

SYSTEM C/R

YWF HEAD EMG

1

2 2

1 REAR COVER SW

SQ102

COVERR COVER

R1 EMG

SPARE

B28

A28

B27

A27

B26

A26

B28

A28

B27

A27

B26

A26

B25

A25

B24

A24

B23

A23

B22

B25

A25

B24

A24

B23

A23

B22

A22

B21

A22

B21

A21

B20

A20

B19

A19

B18

A18

B17

A17

B16

A16

B15

A15

B14

A14

B13

A13

B12

A12

B11

A11

B10

A10

B9

A21

B20

A20

B19

A19

B18

A18

B17

A17

B16

A16

B15

A15

B14

A14

B13

A13

B12

A12

B11

A11

B10

A10

B9

A9

B8

A9

B8

A8

B7

A7

B6

A6

B5

A5

B4

A4

A8

B7

A7

B6

A6

B5

A5

B4

A4

CN11

1

2

3

4

5

6

2

1

HY CN18

2

3

1

2

THRM EMG

CN12

1

2

3

4

5

6

7

8

9

10

EMG0

EMG1

EMG2

EMG3

+24VB2

RL1

1

2

3

4

5

6

7

8

9

10

YAOT

CN13

+24VB2

RL2

EMG0

EMG22

+24E

SERVO ON

READY OUT

T0100037

+24VB3

+24VB4

1

2

3

4

5

6

7

8

9

10

11

12

13

14

15

16

N0100483

N0100482

HTR TEMP EMG

N01004B6

DI

+24E

0V

T31

T32C

EMG22

EMG0

0V

16

15

14

13

12

11

10

9

8

7

6

5

4

3

2

1

CN12

CN13

1

2

3

4

5

6

7

8

9

10

11

12

CN48

+24VB2

RL7

RL8

RL9

1

2

3

4

5

6

7

8

9

10

11

12

YBOT

LYOT

SPARE

+24VS3

N01004E1

N01004E4

N01004E7

CN48

DI

+24E

0V

T31

T32C

EMG22

EMG0

0V

16

15

14

13

12

11

10

9

8

7

6

5

4

3

2

1

CN13

I/O CONVEYOR BOARD ASSY P025

6

5

4

3

1

2

3 3

2

1

2

1

YAOT

A1

A2

B1

B2

A3

B3

A4

B4

A5

B5

A6

B6

A7

B7

A8

B8

A9

B9

A10

B10

HA IO

A1

A2

B1

B2

A3

B3

A4

B4

A5

B5

A6

B6

A7

B7

A8

B8

A9

B9

A10

B10

YOT

A1

A2

B1

B2

A3

B3

A4

B4

A5

B5

A6

B6

A7

B7

A8

B8

A9

B9

A10

B10

A1

A2

B1

B2

A3

B3

A4

B4

A5

B5

A6

B6

A7

B7

A8

B8

A9

B9

A10

B10

H IO

22

11

CN18

SAFE1

SAFE2

+5V

GOOD LED

ALARM,XAOT

CN3

4

5

6

1

2

3

4

5

6

1

2

3

XAOT

N002D001

7

8

7

8

RL202

HEAD A

+24VA

A1

A2

B1

B2

A3

B3

A4

B4

A5

B5

A6

B6

A7

B7

A8

B8

A9

B9

A10

B10

A1

A2

B1

B2

A3

B3

A4

B4

A5

B5

A6

B6

A7

B7

A8

B8

A9

B9

A10

B10

A11

B11

A11

B11

H SRV IO

XAOT

3 3

2

1

2

1

XOT

HEAD I/O1 BOARD P041

HEAD I/O2 BOARD P042

SQ002

SQ302

3 3

2

1

2

1

YBOT

A1

A2

B1

B2

A3

B3

A4

B4

A5

B5

A6

B6

A7

B7

A8

B8

A9

B9

A10

B10

A1

A2

B1

B2

A3

B3

A4

B4

A5

B5

A6

B6

A7

B7

A8

B8

A9

B9

A10

B10

HB IOYOT

22

11

CN18

SAFE1

SAFE2

+5V

GOOD LED

ALARM,XBOT

+24VA

CN3

4

5

6

1

2

3

4

5

6

1

2

3

7

8

7

8

XBOT

N003D001

HEAD B

A1

A2

B1

B2

A3

B3

A4

B4

A5

B5

A6

B6

A7

B7

A8

B8

A9

B9

A10

B10

A1

A2

B1

B2

A3

B3

A4

B4

A5

B5

A6

B6

A7

B7

A8

B8

A9

B9

A10

B10

H IO

A1

A2

B1

B2

A3

B3

A4

B4

A5

B5

A6

B6

A7

B7

A8

B8

A9

B9

A10

B10

A1

A2

B1

B2

A3

B3

A4

B4

A5

B5

A6

B6

A7

B7

A8

B8

A9

B9

A10

B10

A11

B11

A11

B11

H SRV IO

3 3

2

1

2

1

XOT XBOT

RL202

HEAD I/O1 BOARD P051

HEAD I/O2 BOARD P052

SQ004

SQ304

6

5

4

3

1

2

YWF EMG

2

1

2

1

EMG

2

3

1

2

1

3

4

5

6

MGZN EMG

2

3

1

2

3

1

SERVO CONTROL BOX A2

IF2 GOOD

IF1 GOOD

1

2 2

1

TF SET

+24VB2

+24VB4

+24VB3

+24VB2

+24VB4

+24VB3

+24VB2

+24VB4

+24VB3

W52

V52

U52

W51

V51

U51

4241

1234 +24D1233 +24C 3433

1222 T32A

T32

1154+24C

1122 T32B

34 +24B

1153 +24B

14

+48B

24 +24E

A2 0V24

13 +24V

23 +24V

33 +24V

T31

A2 0V24

A1 +24V

T11 EMG0

T12 EMG22

T22 EMG22

6/T3

4/T2

2/T1

5/L3

3/L2

1/L1

A2A1

2221

CONV+24V

KM10

CONV+24E

T32

T31

T22

T12

T11

CH2 CH1

AC

DC

LOGIC

K1K2

A2

A1

1314

24

34

23

33

4142

KM12/KM12A

13 14

A1 A2

53 54

73 74

83 84

21 22

63 64

1/L1

3/L2

5/L3

2/T1

4/T2

6/T3

KM11/KM11A

A1 A2 0V24

S10

A1 A2

1221 T32B

1121 T32C

LIGHT +24VA LIGHT +24VB

CC.V3

19

EMERGENCY CIRCUIT (NO YWF)

YSH20

Confidential & Proprietary

PAGE

2

GOOD

3

1

GOOD

2

GOOD

3

1

GOOD

2

3

1

2

3

1

2 2

1

HB EMG

SERVO3

SERVO4

SRV3 GOOD

SRV4 GOOD

2

GOOD

3

1

GOOD

2

3

1

INTERFACE1

SYSTEM CONTROL BOX A1

A1

B1

A2

B2

A3

B3

A1

B1

A2

B2

A3

B3

A29

B29

A30

B30

A29

B29

A30

B30

SPARE

+24E

CN11

+24VS3

EMG3

EMG4

EMG5

EMG6

EMG7

EMG9

EMG10

EMG11

EMG12

EMG8

E12A

E11A

E13A

E12A

E11A

E13A

0V

EMG5

EMG6

EMG12

EMG13

EMG14

EMG15

EMG16

EMG17

EMG18

EMG19

EMG20

EMG21

EMG22

+24VS3

EMG16

EMG11

+24E

+24VB2

SPARE

1

2 2

1

SQ101

FRONT COVER SW

COVERF COVER

N0100484

N0100485

N0100486

N0100487

N0100490

N0100491

N0100492

N0100493

N0100494

N0100495

FRONT COVER SW

MAGAZINE COVER UPPER SW

MAGAZINE COVER LOWER SW

N0100496

N0100497

N01004A0

N01004A1

N01004A2

N01004A3

N01004A4

N01004A5

N01004A6

N01004A7

REAR COVER SW

1

2 2

1

EMG

1

2 2

1

EMGF2 EMG

1

2 2

1

EMGF1 EMG

REAR EMG SW

SB33

SB32

FRONT 2 EMG SW

SB31

FRONT 1 EMG SW

XAOT

XBOT

SRV C/R

YWF SET SW

FRONT 1 EMG SW

FRONT 2 EMG SW

REAR EMG SW

SYSTEM C/R

YWF HEAD EMG

1

2 2

1 REAR COVER SW

SQ102

COVERR COVER

R1 EMG

SPARE

B28

A28

B27

A27

B26

A26

B28

A28

B27

A27

B26

A26

B25

A25

B24

A24

B23

A23

B22

B25

A25

B24

A24

B23

A23

B22

A22

B21

A22

B21

A21

B20

A20

B19

A19

B18

A18

B17

A17

B16

A16

B15

A15

B14

A14

B13

A13

B12

A12

B11

A11

B10

A10

B9

A21

B20

A20

B19

A19

B18

A18

B17

A17

B16

A16

B15

A15

B14

A14

B13

A13

B12

A12

B11

A11

B10

A10

B9

A9

B8

A9

B8

A8

B7

A7

B6

A6

B5

A5

B4

A4

A8

B7

A7

B6

A6

B5

A5

B4

A4

CN11

1

2

3

4

5

6

1

2

THRM EMG

CN12

1

2

3

4

5

6

7

8

9

10

EMG0

EMG1

EMG2

EMG3

+24VB2

RL1

1

2

3

4

5

6

7

8

9

10

YAOT

CN13

+24VB2

RL2

EMG0

EMG22

+24E

SERVO ON

READY OUT

T0100037

+24VB3

+24VB4

1

2

3

4

5

6

7

8

9

10

11

12

13

14

15

16

N0100483

N0100482

HTR TEMP EMG

N01004B6

DI

+24E

0V

T31

T32C

+24VB2

+24VB4

+24VB3

EMG22

EMG0

0V

16

15

14

13

12

11

10

9

8

7

6

5

4

3

2

1

CN12

CN13

1

2

3

4

5

6

7

8

9

10

11

12

CN48

+24VB2

RL7

RL8

RL9

1

2

3

4

5

6

7

8

9

10

11

12

YBOT

LYOT

SPARE

+24VS3

N01004E1

N01004E4

N01004E7

CN48

+24VB2

+24VB4

+24VB3

DI

+24E

0V

T31

T32C

+24VB2

+24VB4

+24VB3

EMG22

EMG0

0V

16

15

14

13

12

11

10

9

8

7

6

5

4

3

2

1

CN13

I/O CONVEYOR BOARD ASSY P025

6

5

4

3

1

2

3 3

2

1

2

1

YAOT

A1

A2

B1

B2

A3

B3

A4

B4

A5

B5

A6

B6

A7

B7

A8

B8

A9

B9

A10

B10

HA IO

A1

A2

B1

B2

A3

B3

A4

B4

A5

B5

A6

B6

A7

B7

A8

B8

A9

B9

A10

B10

YOT

A1

A2

B1

B2

A3

B3

A4

B4

A5

B5

A6

B6

A7

B7

A8

B8

A9

B9

A10

B10

A1

A2

B1

B2

A3

B3

A4

B4

A5

B5

A6

B6

A7

B7

A8

B8

A9

B9

A10

B10

H IO

22

11

CN18

SAFE1

SAFE2

+5V

GOOD LED

ALARM,XAOT

CN3

4

5

6

1

2

3

4

5

6

1

2

3

XAOT

N002D001

7

8

7

8

RL202

HEAD A

+24VA

A1

A2

B1

B2

A3

B3

A4

B4

A5

B5

A6

B6

A7

B7

A8

B8

A9

B9

A10

B10

A1

A2

B1

B2

A3

B3

A4

B4

A5

B5

A6

B6

A7

B7

A8

B8

A9

B9

A10

B10

A11

B11

A11

B11

H SRV IO

XAOT

3 3

2

1

2

1

XOT

HEAD I/O1 BOARD P041

HEAD I/O2 BOARD P042

SQ002

SQ302

3 3

2

1

2

1

YBOT

A1

A2

B1

B2

A3

B3

A4

B4

A5

B5

A6

B6

A7

B7

A8

B8

A9

B9

A10

B10

A1

A2

B1

B2

A3

B3

A4

B4

A5

B5

A6

B6

A7

B7

A8

B8

A9

B9

A10

B10

HB IOYOT

22

11

CN18

SAFE1

SAFE2

+5V

GOOD LED

ALARM,XBOT

+24VA

CN3

4

5

6

1

2

3

4

5

6

1

2

3

7

8

7

8

XBOT

N003D001

HEAD B

A1

A2

B1

B2

A3

B3

A4

B4

A5

B5

A6

B6

A7

B7

A8

B8

A9

B9

A10

B10

A1

A2

B1

B2

A3

B3

A4

B4

A5

B5

A6

B6

A7

B7

A8

B8

A9

B9

A10

B10

H IO

A1

A2

B1

B2

A3

B3

A4

B4

A5

B5

A6

B6

A7

B7

A8

B8

A9

B9

A10

B10

A1

A2

B1

B2

A3

B3

A4

B4

A5

B5

A6

B6

A7

B7

A8

B8

A9

B9

A10

B10

A11

B11

A11

B11

H SRV IO

3 3

2

1

2

1

XOT XBOT

RL202

HEAD I/O1 BOARD P051

HEAD I/O2 BOARD P052

SQ004

SQ304

T32

34 +24B

14

24 +24E

13 +24V

23 +24V

33 +24V

T31

A2 0V24

A1 +24V

T11 EMG0

T12 EMG22

T22 EMG22

KM10

T32

T31

T22

T12

T11

CH2 CH1

AC

DC

LOGIC

K1K2

A2

A1

1314

24

34

23

33

4142

YWF EMG

2

1

MGZN EMG

IF1 GOOD

LYOT LY OT

1

2

1

2

33

TBL DI

B13

A13

B12

A12

B11

A11

B13

A13

B12

A12

B11

A11

B10

A10

B9

A9

B8

A8

B7

A7

B6

A6

B5

A5

B4

A4

B3

A3

B2

B1

A2

A1

B10

A10

B9

A9

B8

A8

B7

A7

B6

A6

B5

A5

B4

A4

B3

A3

B2

B1

A2

A1

LY ORG/OT

6

5

4

3

1

2

6

5

4

3

1

2

SQ107

6

5

4

3

1

2

GOOD

3

1

GOOD

2

GOOD

3

1

GOOD

SERVO1 YWF

SERVO2 YWF

2

3

1

2

3

1

SRV1 GOOD

SRV2 GOOD

1

2

3

4

5

6

13 14

A1 A2

1/L1

3/L2

5/L3

2/T1

4/T2

6/T3

51

61

71

81

52

62

72

82

KM52/KM52A

A2A1

13 EMG9 14 EMG8

1

2

3

4

5

6

1

2

3

4

5

6

MGZN EMG

1

2

3

4

5

6

7

8

9

10

11

12

14

15

13

1

2

3

4

5

6

7

8

9

10

11

12

14

15

13

MGZN EMG DO

2

1

2

1

+24V1

2

3

4

1

2

3

4

TF +24V

1

2

3

4

5

6

1

2

3

4

5

6

TFCN1

7

8

7

8

CN1

+24VI/O TF BOARD

2 LZ U51

4 LZ V51

6 LZ W51

52 LZ U52

62 LZ V52

72 LZ W52

1 LZ U50

3 LZ V50

5 LZ W50

51 LZ U51

61 LZ V51

71 LZ W51

2

3

1

2

3

1

MGZN COVER LOW CLOSE

COVER SW LOWER

SQ104

2

1

COVER

2

1

MGZN COVER UP

COVER SW UPPER

SQ105

ELEVATION

2

GOOD

3

1

GOOD

INTERFACE2

2

3

1

IF2 GOOD

2

1

CN18

SAFE2

SAFE1

+5V

GOOD LED

ALARM,OT SPARE

+24VA

4

5

6

1

2

3

4

5

6

1

2

3

7

8

7

8

OT SPARE

N100D001

HEAD YWF

HEAD I/O1 BOARD P061

HEAD I/O2 BOARD P062

RL202

CN3CN3

2

1

HY CN18

THRM EMG

THERMO CONTROL UNIT

A61

14

11

12

A62

THERMO WARNING UNIT

8

7

A6212 EMG0A

A6211 EMG1

A617 EMG0A

A618 EMG0

2

1

YWF HEATER(OPTION)

1

2

1

2

TF SET

SQ103

TF SET SW

YWF(OPTION)

SERVO CONTROL BOX A2

YWF(OPTION)

A2 0V24A1

W52

V52

U52

W51

V51

U51

4241

1234 +24D1233 +24C 3433

1222 T32A

1154+24C

1122 T32B

1153 +24B

A1

+48B

A2 0V24

6/T3

4/T2

2/T1

5/L3

3/L2

1/L1

A2A1

2221

CONV+24V CONV+24E

KM12/KM12A

13 14

A1 A2

53 54

73 74

83 84

21 22

63 64

1/L1

3/L2

5/L3

2/T1

4/T2

6/T3

KM11/KM11A

A1 A2 0V24

S10

A1 A2

1221 T32B

1121 T32C

6

5

4

3

1

2

4241

5133 +24D 3433

5121 T32A 5122 T32

+48C

A1

6/T3

4/T2

2/T1

5/L3

3/L2

1/L1

A2A1

2221

KM51/KM51A

+48VC

A2 0V24

51A1 +24V 51A2 0V24

5134 SRV ON

YWF HEATER(OPTION)

A1 A2

1/L1

3/L2

5/L3

2/T1

4/T2

6/T3

33 34

41 42

13 14

U11D

U11C

KM61/KM61A

KM6114 +24CC

KM6134 RUN3

KM6142 T32B

KM6113 +24BA

KM6141 T32BA

KM6133 RUN2

KM61A1 +24V

A1 A2

KM61A2 0V24

S61

6

5

4

3

1

2

6

5

4

3

1

2

HEATER KM61

NON YWF HEATER(OPTION)

YWF(OPTION)

LIGHT +24VA LIGHT +24VB

CC.V3

20

EMERGENCY CIRCUIT (WITH YWF)

YSH20