YSH20_cwd_je.pdf - 第24页
Confidential & Proprietary P A G E J1136 1 5 4 3 J1452 J1151 J1154 LZP LZM LZB KA51 MAINE MAC HINE LZP J1128 J1451 J1143 J1127 See Page 1 J1083 J1203 J1708 MGZN SET2 MGZN SET2 MGZN SET1 J1204 J1701 DO4,5 CN11 DO7 CN …
Confidential & Proprietary
PAGE
LEM
LEP
LAM
LAP
LA-AXIS 60W
SRV2 BRAKE
PI2
J1130
LE ORG
N0110211
LE-AXIS ORG
RING SET
RING SET
N0110225
N0110210
LA-AXIS ORG
LA ORG
N0110222
HOOK BACK
LE/RING
LE-AXIS 200W
LEM
LEP
LAEP
J1132
J1133
LAEM
J1144
J1145
N0110217
HOOK CL
HOOK OP
N0110226
FLXH HK DI
J1072
J1183
J1184
J1185
CNTR CHK
N0110220
N0110221
CNTR CHK1
CNTR CHK2
J1207 HOOK ON
HK DO
T0110001
T0110000
CNTR ON
CNTR DI CNTR R
CNTR L
CNTR R2
CNTR R1
N0110231
N0110232
CNTR L1
CNTR L2
N0110233
N0110234
CNTR DI
J1192 J1193 J1194
J1195
J1198
LA/CNTR UNIT
ENC3
HOOK OPEN
CENTERING UNIT CHECK1
HOOK BACKWARD
HOOK CLOSE
CENTERING RIGHT1
CENTERING RIGHT2
CENTERING LEFT1
CENTERING LEFT2
HOOK ON
CENTERING ON
J1451
LAP
J1127
J1137
LEP
J1143
□42 MAX 170rpm
□60 MAX 1033rpm
EJECTOR
LXP
LXM
See Page 4
LZB
LZM
LZP
ELEVATION
See Page 2
INTERCONNECTION DIAGRAM
See YSH20
I/O TF BOARD
J1201
J1190
J1181
TFCN7
TFCN13
FLEXIBLE LY1
FLXY1 HK DI
LAEP
FLXY1 TBL DI
FLXY1 HK DO
LAEM
J1182
J1191
J1202
J1131
FLEXIBLE LH
XXX
TFCN3
J1073
SERVO2 MO
See Page 2
ION Y ALM
TFCN14
J1710
YWF EMG
J0164
CN13
J0172
J1124
LYP
LY-AXIS 750W
PI1
LYP
J1123
J1141
LYM
□86 MAX 4500rpm
SERVO1 MO
SERVO BOARD 1
N01004E4
N01004E2
LY OT
LY ORG
LY-AXIS OVER TRAVEL
LY-AXIS ORG
TBL DI
J1187
FLEXIBLE LY2
FLXY2 TBL DI
LY ORG/OT
FLXY2 ATCH DI
J1186
J0141
SERVO BOARD 3 PI3
J0121
LCXM,LCY1M,LCY2M
LFXM
LCXP,LCY1P,LCY2P
See Page 3
LFXP
J0037
HY +48V
J1071
LHM
LHP
LHM
LHP
LH-AXIS 60W
J1138
J1147
□42 MAX 360rpm
J0142
LHP
J1134
SERVO BOARD 4
LHM
LHP
J1135
J1146
A2
2/T1
4/T2
6/T3
22
A1
1/L1
3/L2
5/L3
21
33 34
41 42
KM51/KM51A
A2 0V24
5122 T32
A1
5121 T32A
5133 +24D
+48C +48VC
5134 SRV ON
J0036
QF51
J0171
KM12
INTERCONNECTION DIAGRAM
See YSH20
See Page 6
POWER CIRCUIT
KM10 T32
I/O CONVEYOR -1-
INTERCONNECTION DIAGRAM
See YSH20
CN1
CN2 J1793
IONIZER A23
ION I/F BOARD ASSY P026
CN3
J1791
ION Y POW
J0791
IONIZER ASSY(OPTION)
I CN1
I CN3
I PWR
IONIZER
J1189
CONTROL BOX
M2
SERVO3 MO
WAFER HEAD
SERVO UNIT 2
J1792
E10
E11
M51
M60
M57
M58
CENTERING UNIT CHECK2
SQ502
SQ503
YV501
YV502
SQ501
ATCH DI
J1188
PLT STG
N0110212
EXP TYP
PLT STG2
PALETTE STAGE2
EXPAND SIZE CHECK1
N0110223
EXPAND SIZE CHECK2
N0110224
PLT TYP
PALETTE STAGE
N0110213
PALETTE SET
N0110214
PALETTE SIZE CHECK1
N0110215
PALETTE SIZE CHECK2
N0110216
SQ506
SQ507
SQ517
SQ518
SQ508
SQ509
SQ519
SQ520
SQ521
SQ522
SQ505
SQ510
SQ513
SQ514
SQ511
SQ512
SQ515
SQ516
CN.V1
21
WAFER TABLE
YWF-300
Confidential & Proprietary
PAGE
J1136
1
5
4
3J1452
J1151 J1154
LZP
LZM
LZB
KA51
MAINE MACHINE
LZP
J1128
J1451
J1143
J1127
See Page 1
J1083
J1203
J1708
MGZN SET2
MGZN SET2
MGZN SET1
J1204
J1701
DO4,5 CN11
DO7 CN10
DO6 CN9
DC24V OUT CN1
DI8,9 CN22
DI7 CN15
DI6 CN14
DI3 CN13
DO1 CN4
DO3 CN6
J1181
DI1,2 CN7
DI0 CN12
DO2 CN5
DIP SW(S2)
0N
16
J1201
DO0 CN3
SENSOR CN21
CN16
COM2
COM1
CN18
CN17
MGZN DI
J1162
J1702
MGZN EMG DO
MGZN DO
TF +24V
J1163
N0110202
N0110203
N0110204
MGZN DI
PLT STP
J1710
MGZN SET
DOOR OPEN SWITCH
N0110206/T0110020
J1703
SW DO
SW DISW DI
PLT STP UP
PLT STP DOWN
N0110261
N0110262
SW DO
J1704
PLT ORG1
MGZN EMG
J1171
+24V
+24V
T0110021
PLT STP
TFCN1
TFCN14
TFCN4
TFCN5
TFCN12
TFCN3
TFCN7
TFCN6
J1164COVER
MAGAZINE COVER UPPER SW
MGZN COVER UP
J1167
MAGAZINE COVER LOWER SW
MGZN COVER LOW
COVER
CLOSE
LOCK
+24E
PLT STP
J1205
PLT ORG3
+24V
PLT CHK
+24V
+24V
SQ103
SQ104
SQ105
MAGAZINE DETECT 1
MAGAZINE DETECT 2
MAGAZINE DETECT 3
PALETTE CHECK
N0110205
TRAY LATCH
TRAY LATCH CLOSE
TRAY LATCH OPEN
DIP SW(S1)
DC24V INCN2
0N
4321
TFCN2
5
CN24 COM2
CN23 COM1I/O C
TF SET
MGZN EMG
See YSH20
INTERCONNECTION DIAGRAM
J1170
I/O TF BOARD ASSY P028
J0046
J0106
REMOTE IF BOARD
See YSH20
INTERCONNECTION DIAGRAM
CN23 TF
CN24 TF
VAC SEN.
+24V
PALETTE ORIGIN2
N0110201
PALETTE ORIGIN
N0110200
PALETTE ORIGIN3
N0110207
FLXY1 HK DO
FLXY1 HK DI
J1196
DI4,5 CN8
TFCN8
J1711
13 14
A1 A2
1/L1
3/L2
5/L3
2/T1
4/T2
6/T3
51
61
71
81
52
62
72
82
J1152
KM52/KM52A
13 EMG9 14 EMG8
S51
J1169
J1168
1 LZ U50
3 LZ V50
5 LZ W50
51 LZ U51
61 LZ V51
71 LZ W51
2 LZ U51
4 LZ V51
6 LZ W51
R3R2R1
J1153
52 LZ U52
62 LZ V52
72 LZ W52
1 0V
5 LZ MB 3 +24V
4 LZBK
LZP
LZM
LZ-AXIS 300W
LZB
BRAKE OFF
J1709
J1453
BRK OFF
□76 MAX 3000rpm
A2A1
J1706
PLT ORG2
FLEXIBLE LZ
MGZN SET
J1707
J1074
I/O CONVEYOR -1-
KM11A 83,84
See YSH20
INTERCONNECTION DIAGRAM
ELEVATION
WAFER TABLE
ION Y ALM
KA62,HTR AIR
PIN VAC,PIN UP
See Page 4
EJECTOR
LX ORG,LU DI
See Page 1
TFCN13 J1190
FLXY1 TBL DI
HTR TMP OK
See Page 5
QF53,XT42
See Page 6
POWER CIRCUIT
HEATER
SERVO UNIT 2 PI2
SERVO2 MO
SRV2 BRAKE
SERVO CONTROL BOX
I/O CONVEYOR -1-
CONTROL BOX
SB62
SB61
TF SET SW
M55
YV503
SQ523
SQ524
SQ528A
SQ528B
SQ525
SQ526
SQ527
SQ529A
SQ529B
SQ530B
SQ530A
SQ531A
SQ531B
J2059
CN.V1
22
ELEVATION
YWF-300
Confidential & Proprietary
PAGE
J1305
HY2
HY1
J1307
J1313
J1312
J1306
LRORG
LP1
LP2
LRORG
J1077
LR1-AXIS ORG
AIR FLOW SENSOR 2
AIR FLOW SENSOR 1
LR2-AXIS ORG
AIR FLOW SENSOR 3
AIR FLOW SENSOR 4
J1310
HYA/D
CN5
J1309
LP1
LR1
J1315
J1075
LCY-AXIS ORG
LP1-AXIS 30W
□35 MAX 1500rpm
LP2-AXIS 30W
□35 MAX 1500rpm
LR1-AXIS 15W
□42 MAX 650rpm
LR2-AXIS 15W
□42 MAX 650rpm
DI/DO CN6
CN1 POW
CN18 GOOD
CN4FAN
TXD/RXDCN2 CN5
CN2
CN2
CN2
CN3 XORG,XOT
AD0,AD1
AD3/DA3
AD2/DA2
DI/DO
CN7SPARE
INTOL CN8
CN10LASER
CN4
CN4
CN4
M0
M1
M0
M1
M0
M1
HEAD SERVO UNIT YWF
HEAD I/O1 BOARD ASSY P061
HEAD I/O2 BOARD ASSY P062
HEAD I/O3 BOARD ASSY P063
HEAD SERVO BOARD ASSY 1 P064
HEAD SERVO BOARD ASSY 3 P066
HEAD SERVO BOARD ASSY 2 P065
HY DO
CN6 HEAD1
HEAD2
HEAD3
HEAD4
HEAD2 (VACUUM/BLOW)
HEAD1 (VACUUM/BLOW)
HEAD3 (VACUUM/BLOW)
HEAD4 (VACUUM/BLOW)
J1303
CN4
J1311
CN3
J1304
J1301 HY POW
HY+48V
HY+24V
J0056
J0037
J1401
H1
H2
J1302
J1308
DC24VCN11
CN5
CN4CAM1
CN7LIGHT1
CN6CAM2
CN9LIGHT2
CN8CAM3
CN10LIGHT3CAMOUTVISION BOARD 2 V2 CAM4
E-C+24V
See YSH20
INTERCONNECTION DIAGRAM
CAMERA SELECTOR YWF P083
CN35
J1506
J1507
LIGHT1
J1503
CN5
CAM
WAFER CAMERA
P094
S.LIGHT COAX ASSY
WAFER CAMERA
LIGHT1J1505
LIGHT1
FLEXIBLE LCXFLEXIBLE LCY1
J1504
J1502
LIGHT1
CAM1 CAM1
□54 MAX 5000rpm
□54 MAX 5000rpm
LFX-AXIS 200W
□54 MAX 5000rpm
J1150
LFXM
LCX-AXIS 200W
□54 MAX 4500rpm
LCXM
J1142
LCXM
LCXP
LFXP
LFXM
J1122
LCY1P LCY1P
LCY1M
LCY1-AXIS 200W
LCY2P LCY2P
LCY2M
LCY2-AXIS 200W
LCXP
LFXP
SERVO3 MO
PI1
SERVO1 MO
SERVO CONTROL BOX
See Page 1
PI3
J1121
LCXP/LFXP
J1125
J1126
FLEXIBLE LCY2
FLEXIBLE LFX
LCX ORG
LFX ORG
LCX/LFX ORG
N100D005
N100D006
N100D004
LCX-AXIS ORG
LFX-AXIS ORG
LCY ORG
T100C000/T100C002
T100C001/T100C003
T100C400/T100C402
T100C401/T100C403
HY DI
HYA/D
LU1
LP1 J1314
LPR 1
LR1
LU2
LP2 J1317
LR2
LP2
LR2
J1318
LPR 2
LUP,LUM
See Page 4
EJECTOR
J1320
FLEXIBLE LP1
FLEXIBLE LP2
H1
H2
H3
H4
LR
LR
LR1
LR2
N100D002
N100D003
J0163 HY CN18
CN11
KM51,XT31
QF54,XT42
J1501
J0055
J0141
J1141
J1123
J0121
IF2 SRVA
See YSH20
INTERCONNECTION DIAGRAM
SERVO BOARD 3
SERVO BOARD 1
REMOTE IF BOARD
CN2
J0180
POWER CIRCUIT
See Page 6
CONTROL BOX
See YSH20
INTERCONNECTION DIAGRAM
I/O CONVEYOR -5-
CONTROL BOX
See YSH20
INTERCONNECTION DIAGRAM
I/O CONVEYOR -1-
M53
M54
M59
M52
M62
M63
M65
M66
YV509
YV510
YV511
YV512
SQ541
SQ543
SQ542
SQ545
SQ546
SQ538
SQ540
SQ539
SQ544
CC.V1
23
WAFER HEAD
YWF-300