YSH20_cwd_je.pdf - 第3页

Confidential & Proprietary P A G E Rating 6.5KVA MAX. COMU See Page 2 COMU COMU COMU COMU INPUT: CONTRO L BOX OUTPU T: CONT ROL:1∼ 100V AC5 0/60Hz 4.0A(M AX) MOTO R:3∼ 220V 1∼ AC100V DRIV ER Main Switch Termin al XB1…

Table of contents

／目次

YSH20

P.󲅸 1󲅸 Over󲅸view󲅸／󲅸全体接続図

P.󲅸 2󲅸 Control󲅸box󲅸／󲅸コントローラー接続図

P.󲅸 3󲅸 I/O󲅸conveyor󲅸-1-󲅸／󲅸I/O󲅸コンベアー接続図󲅸-1-

P.󲅸 4󲅸 I/O󲅸conveyor󲅸-2-󲅸／󲅸I/O󲅸コンベアー接続図󲅸-2-

P.󲅸 5󲅸 I/O󲅸conveyor󲅸-3-󲅸／󲅸I/O󲅸コンベアー接続図󲅸-3-

P.󲅸 6󲅸 I/O󲅸conveyor󲅸-4-󲅸／󲅸I/O󲅸コンベアー接続図󲅸-4-

P.󲅸 7󲅸 I/O󲅸conveyor󲅸-5-󲅸／󲅸I/O󲅸コンベアー接続図󲅸-5-

P.󲅸 8󲅸 Head󲅸A(Type󲅸FF)󲅸／󲅸ヘッド󲅸A(FF タイプ )

P.󲅸 9󲅸 Head󲅸B(Type󲅸FF)󲅸／󲅸ヘッド󲅸B(FF タイプ )

P.󲅸10󲅸 Head󲅸A(Type󲅸4M)󲅸／󲅸ヘッド󲅸A(4M タイプ )

P.󲅸11󲅸 Head󲅸B(Type󲅸4M)󲅸／󲅸ヘッド󲅸B(4M タイプ )

P.󲅸12󲅸 Camera󲅸unit󲅸sel.󲅸／󲅸カメラユニット接続図

P.󲅸13󲅸 Operation󲅸panel󲅸sel.󲅸／󲅸オペレーションパネル接続図

P.󲅸14󲅸 Feeder󲅸Structure󲅸／󲅸フィーダー接続図

P.󲅸15󲅸 Ionizer󲅸assy(Option)󲅸／󲅸イオナイザー ( オプション )

P.󲅸16󲅸 Power󲅸transformer󲅸／󲅸電源トランス接続図

P.󲅸17󲅸 Power󲅸circuit󲅸-1-󲅸／󲅸電源回路図󲅸-1-

P.󲅸18󲅸 Power󲅸circuit󲅸-2-󲅸／󲅸電源回路図󲅸-2-

P.󲅸19󲅸 Emergency󲅸circuit(NO󲅸YWF)󲅸／󲅸非常停止回路図 (YWF なし )

P.󲅸20󲅸 Emergency󲅸circuit(with󲅸YWF)󲅸／󲅸非常停止回路図 (YWF あり )

P.󲅸21󲅸 Wafer󲅸table󲅸／󲅸ウェハーテーブル

P.󲅸22󲅸 Wafer󲅸elevation󲅸／󲅸ウェハーエレベーション

P.󲅸23󲅸 Wafer󲅸head󲅸／󲅸ウェハーヘッド

P.󲅸24󲅸 Wafer󲅸ejector󲅸／󲅸ウェハーエジェクター

P.󲅸25󲅸 Wafer󲅸heater󲅸／󲅸ウェハーヒーター

P.󲅸26󲅸 Wafer󲅸power󲅸circuit󲅸／󲅸ウェハー電源回路図

P.󲅸27󲅸 Wafer󲅸emergency󲅸circuit󲅸／󲅸ウェハー非常停止回路図

P.󲅸28󲅸 Air󲅸circuit󲅸／󲅸エアー回路図

P.󲅸29󲅸 Air󲅸circuit󲅸／󲅸エアー回路図

P.󲅸30󲅸 Air󲅸circuit󲅸／󲅸エアー回路図󲅸(4M)

P.󲅸31󲅸 Wiring󲅸parts󲅸list󲅸／󲅸配線部品表

Condential & Proprietary

Confidential & Proprietary

PAGE

Rating 6.5KVA MAX.

COMU

See Page 2

COMU

INPUT:

CONTROL BOX

OUTPUT:

CONTROL:1∼ 100V

AC50/60Hz 4.0A(MAX)

MOTOR:3∼ 220V

1∼ AC100V

DRIVER

Main Switch

Terminal

XB11

QS11 40A

3∼

QF11 20A

Main Breaker

TM11 3.77KVA

Transformer

3∼ AC220V

3∼ AC200V

3∼ AC220V

QF31 10A

3∼ AC220V

Filter

Noise

NF11

DC24V

Contactor

3∼ 50/60Hz

200/208/220/240

380/400/416V

TERMIANL

POWER TRANSFORMER

Protector

Circuit

3∼ 3∼ AC220V

CONVEYOR MOTOR

DRIVER

KM10

CH1CH2K2 K1

Safety Relay

EMERGENCY CIRCUIT

AC50/60Hz 9.3A(MAX)

STANDARD

3:2.30KW(TOTAL)

4:3.36KW(TOTAL)

3∼ 200V 0-375Hz

WITH YWF

3:2.30KW(TOTAL)

4:3.36KW(TOTAL)

3∼ 200V 0-375Hz

1:1.90KW(TOTAL)

2:1.90KW(TOTAL)

QF43 4A

QF21 10A

AC100V

QF42 2A

1∼

QF12 15A

Main Breaker

1.75KVA(with UPS)

1.5KVA(STD)

TC11

Transformer

1∼1∼ AC100V1∼

KM51/KM51A

3∼ AC200V

Protector

Circuit

DC48V

Contactor

DC48V1∼ AC220V

QF41 5AGS31 600W 12.5A

KM12/KM12A

KM11/KM11A

Contactor

Power Supply

GS21 600W 27A

POWER CIRCUIT

QF44 4A

DC24V

DC48V

DC24V

DC48V

AC100V

QF22 5A

1∼ AC100V

GS22 300W 12.5A

Power Supply

FIX10

DC24V2

DC24V

DC24V2 DC24V2

COMU

HEAD SERVO UNIT A

HEAD SERVO UNIT B

COMU

DC48V

DC24V

DC48V

DC24V

DC48V

Each Motors

USB MEMORY

CAMERA UNIT SEL.

I/O CONVEYOR

YWF(OPTION)

DC24V

QF53 2A

QF54 2A

See YWF

INTERCONNECTION DIAGRAM

IONIZER ASSY(OPTION)

See Page 3-7

OPERATION PANEL SEL.

COMU

DC24V2

DC48V

DC24V

QF51 3A

CAM

FEEDER

COMU

M19

QF32 Set 1.3A

(1.0-1.6A)

VACUUM PUMP 0.2kW

See Page 10:TYPE 4M

See Page 11:TYPE 4M

HEAD SENSOR,VALVE

Z,R,CZ SERVO MOTOR

See Page 8:TYPE FF

See Page 9:TYPE FF

See Page 17

See Page 16

See Page 13

See Page 12

See Page 14

See Page 15

See Page 19, 20

CC.V3

OVER VIEW

YSH20

Confidential & Proprietary

PAGE

HEAD A

SERVO C/R BOX ASSY A2

PWR SRV CR

RAS SRV CR

□42 MAX 500rpm

AC100V

CAM1(HALF)

CAM2(FULL)

CAM3(HALF)

CAM4(FULL)

TRG1

TRG2

SRVA

SRVB

BRAKE

(LY,LCX,LCY1,LCY2) MO

(LY,LCX,LCY1,LCY2) ENC

(LZ,LX,LE,LA) MO

SERVO BOARD ASSY 1(OPTION)

GOOD

TRG1

TRG2

SRV CMN

GOOD

TRG1

AC100V

(W) M3

(XA,XB,LFX,-) MO

(XA,XB,LFX,-) ENC

GOOD

TRG1

TRG2

SRV CMN

SERVO BOARD ASSY 4

SERVO BOARD ASSY 3

SRV CMN

TRG2

TRG1

GOOD

(YA,YB,LH,W) ENC

BRAKE

(YA) M0

(LH) M2

(YB) M1

BRAKE

SRVA

TRG2

TRG1

CAM4(FULL)

CAM3(HALF)

CAM2(FULL)

CAM1(HALF)

LAN

USB2

USB1

MOUSE

LHP

LHM

LFXP

LFXM

LYM,LCXM,LCY1M,LCY2M

LYP,LCXP,LCY1P,LCY2P

(LZ,LX,LA) ENC

LEPSERIAL I/F BOARD

SRVB

I/O

CN11

(LE) ENC3

SYSTEM

VISION 2 (OPTION)

VISION 1

INTERFACE 1

INTERFACE 2 (OPTION)

I/O

SYSTEM C/R BOX ASSY A1

J0120USB4

USB3

USB4 USB MEMORY

USB4

CAMERA UNIT SEL.

J0521

V1 CAM1

V1 CAM2

V1 CAM3

J0501

J0502

V2 CAM4

J0512V2 CAM2

J1501

J0511

J0522

V2 CAM1

V2 CAM3

V2 TRG1

J0551V1 TRG 1

S3 TRG2

S3 TRG1

EMG

HA SRV XYP

J0402I/F1 SRVB

SRV3 CMN

SRV4 CMN

J0401I/F1 SRVA

SRV2 CMN

SRV1 CMN

J1402I/F2 SRVB

I/F2 SRVA J1401

SRV CMN

TRG2

J0163IF1 GOOD

SRV1 GOOD

SRV2 GOOD

SRV4 GOOD

SRV3 GOOD

IF2 GOOD

IF1 I/O

I/O A I/O AI/O A

J0101

FDR CTRL BOARD

I/O F1-1

J0102

I/O B

CN14

J0103

See YWF

INTERCONNECTION DIAGRAM

J0107

I/O CI/O C

CN27

KGK HEAD I/O B

PAS SRV CRRAS SYS CR J0411

J0410 PWR SRV CRPWR SYS CR

PWR SYS CR

RAS SYS CR

XYAM

HB SRV XYP

HEAD B

XYBM

SERVO3 MO

SRV4 M1

J0141

SERVO UNIT ASSY 2(OPTION)

SRV4 M0

XBP

XAP

J0121PI3

M2 J0142

YAP

YBP

J0122PI4

WP W1P W1PJ0133 WP

W-AXIS 100W

J0027

AC100V

AC220V

ACIN

AC220V J0006

POWER CIRCUIT-1-

YWF (OPTION)

See YWF

INTERCONNECTION DIAGRAM

LHP

J1134

SERVO1 MO J1141

PI1 J1123

LZM,LXM,LAEM

SERVO2 MO J1143

ENC3 J1137

PI2 J1127

J1451SRV2 BRAKE

LZP,LXP,LAP

LZB

CALIB A,B (OPTION)

M05

J0178

J0179

J0177

J0113

J0115

CN1

CN1,I/O ANC ANC A,B (OPTION)

I/O CONVEYOR BOARD

CN23,CN24

I/O TF BOARD

See Page 3

See Page 7

See Page 9

CAMERA UNIT SEL.

J0106

CN2

INTERCONNECTION DIAGRAM

See YWF

WAFER HEAD

J0111 NOTE1

NOTE1 : In the case of 4M HEAD, it connects with J0106

See Page 12

See Page 14

See Page 12

See Page 10:TYPE 4M

See Page 8 :TYPE FF

See Page 9 :TYPE FF

See Page 11:TYPE 4M

See Page 17

KEY

SERIAL2

SERIAL1

VGA

SERIAL1

KEY

OPERATION PANEL SEL.

VGA

See Page 13

PCS/M

CABLE HOST(OPTION)

S/M

PE J0082

CN27

EXT POWER

J0051EXT.PWR

AIR REGULATOR PANEL

BUZZER

J0119

I/O CONVEYOR BOARD

HA01

WIN BUZZER

UPS

J2031,J2032

J0783

See Page 4

POWER CIRCUIT-1-

OPERATION PANEL SEL.

See Page 17

See Page 13

PE J0081

LCD PWR

DC12V

CC.V3

CONTROL BOX

YSH20