YSH20_cwd_je.pdf - 第4页
Confidential & Proprietary P A G E HEAD A SERVO C/R BOX ASSY A2 PWR SRV CR RAS SRV CR □42 MAX 500 rpm AC100V CAM1(HAL F) CAM2(FUL L) CAM3(HAL F) CAM4(FUL L) TRG1 TRG2 SRVA SRVB BRAKE BRAKE (LY,LC X,LCY1,LCY 2) MO (LY…
Confidential & Proprietary
PAGE
Rating 6.5KVA MAX.
COMU
See Page 2
COMU
COMU
COMU
COMU
INPUT:
CONTROL BOX
OUTPUT:
CONTROL:1∼ 100V
AC50/60Hz 4.0A(MAX)
MOTOR:3∼ 220V
1∼ AC100V
DRIVER
Main Switch
Terminal
XB11
QS11 40A
3∼
QF11 20A
Main Breaker
TM11 3.77KVA
Transformer
3∼ AC220V
3∼ AC200V
3∼ AC220V
QF31 10A
3∼ AC220V
Filter
Noise
NF11
DC24V
Contactor
3∼ 50/60Hz
200/208/220/240
380/400/416V
TERMIANL
POWER TRANSFORMER
Protector
Circuit
3∼ 3∼ AC220V
CONVEYOR MOTOR
DRIVER
KM10
CH1CH2K2 K1
Safety Relay
EMERGENCY CIRCUIT
AC50/60Hz 9.3A(MAX)
STANDARD
3:2.30KW(TOTAL)
4:3.36KW(TOTAL)
3∼ 200V 0-375Hz
WITH YWF
3:2.30KW(TOTAL)
4:3.36KW(TOTAL)
3∼ 200V 0-375Hz
1:1.90KW(TOTAL)
2:1.90KW(TOTAL)
QF43 4A
QF21 10A
AC100V
AC100V
QF42 2A
1∼
QF12 15A
Main Breaker
1.75KVA(with UPS)
1.5KVA(STD)
TC11
Transformer
1∼1∼ AC100V1∼
KM51/KM51A
3∼ AC200V
Protector
Circuit
DC48V
Contactor
DC48V1∼ AC220V
QF41 5AGS31 600W 12.5A
KM12/KM12A
KM11/KM11A
Contactor
Power Supply
Power Supply
GS21 600W 27A
POWER CIRCUIT
QF44 4A
DC24V
DC48V
DC48V
DC24V
DC24V
DC24V
DC24V
DC48V
AC100V
QF22 5A
1∼ AC100V
GS22 300W 12.5A
Power Supply
FIX10
DC24V2
DC24V
DC24V2 DC24V2
COMU
HEAD SERVO UNIT A
HEAD SERVO UNIT B
COMU
COMU
DC48V
DC24V
DC48V
DC24V
DC48V
DC48V
Each Motors
USB MEMORY
CAMERA UNIT SEL.
I/O CONVEYOR
YWF(OPTION)
DC24V
DC24V
QF53 2A
QF54 2A
See YWF
INTERCONNECTION DIAGRAM
IONIZER ASSY(OPTION)
See Page 3-7
OPERATION PANEL SEL.
COMU
DC24V2
DC48V
DC24V
DC24V
QF51 3A
CAM
CAM
CAM
FEEDER
COMU
M19
QF32 Set 1.3A
(1.0-1.6A)
VACUUM PUMP 0.2kW
See Page 10:TYPE 4M
See Page 11:TYPE 4M
HEAD SENSOR,VALVE
HEAD SENSOR,VALVE
Z,R,CZ SERVO MOTOR
Z,R,CZ SERVO MOTOR
See Page 8:TYPE FF
See Page 9:TYPE FF
See Page 17
See Page 16
See Page 13
See Page 12
See Page 14
See Page 15
See Page 19, 20
CC.V3
1
OVER VIEW
YSH20
Confidential & Proprietary
PAGE
HEAD A
SERVO C/R BOX ASSY A2
PWR SRV CR
RAS SRV CR
□42 MAX 500rpm
AC100V
CAM1(HALF)
CAM2(FULL)
CAM3(HALF)
CAM4(FULL)
TRG1
TRG2
SRVA
SRVB
BRAKE
BRAKE
(LY,LCX,LCY1,LCY2) MO
(LY,LCX,LCY1,LCY2) ENC
(LZ,LX,LE,LA) MO
SERVO BOARD ASSY 1(OPTION)
GOOD
TRG1
TRG2
SRV CMN
GOOD
TRG1
AC100V
(W) M3
(XA,XB,LFX,-) MO
(XA,XB,LFX,-) ENC
GOOD
TRG1
TRG2
SRV CMN
SERVO BOARD ASSY 4
SERVO BOARD ASSY 3
SRV CMN
TRG2
TRG1
GOOD
(YA,YB,LH,W) ENC
BRAKE
(YA) M0
(LH) M2
(YB) M1
BRAKE
SRVA
TRG2
TRG1
CAM4(FULL)
CAM3(HALF)
CAM2(FULL)
CAM1(HALF)
LAN
USB2
USB1
MOUSE
LHP
LHM
LFXP
LFXM
LYM,LCXM,LCY1M,LCY2M
LYP,LCXP,LCY1P,LCY2P
(LZ,LX,LA) ENC
LEPSERIAL I/F BOARD
SRVB
I/O
CN11
(LE) ENC3
SYSTEM
VISION 2 (OPTION)
VISION 1
INTERFACE 1
INTERFACE 2 (OPTION)
I/O
SYSTEM C/R BOX ASSY A1
J0120USB4
USB3
USB4 USB MEMORY
USB4
CAMERA UNIT SEL.
J0521
V1 CAM1
V1 CAM2
V1 CAM3
J0501
J0502
V2 CAM4
J0512V2 CAM2
J1501
J0511
J0522
V2 CAM1
V2 CAM3
V2 TRG1
J0551V1 TRG 1
S3 TRG2
S3 TRG1
EMG
EMG
HA SRV XYP
J0402I/F1 SRVB
SRV3 CMN
SRV4 CMN
J0401I/F1 SRVA
SRV2 CMN
SRV1 CMN
J1402I/F2 SRVB
I/F2 SRVA J1401
SRV CMN
TRG2
J0163IF1 GOOD
SRV1 GOOD
SRV2 GOOD
SRV4 GOOD
SRV3 GOOD
IF2 GOOD
IF1 I/O
I/O A I/O AI/O A
J0101
FDR CTRL BOARD
I/O F1-1
J0102
I/O B
CN14
J0103
See YWF
INTERCONNECTION DIAGRAM
J0107
I/O CI/O C
CN27
KGK HEAD I/O B
PAS SRV CRRAS SYS CR J0411
J0410 PWR SRV CRPWR SYS CR
PWR SYS CR
RAS SYS CR
XYAM
HB SRV XYP
HEAD B
XYBM
SERVO3 MO
SRV4 M1
J0141
SERVO UNIT ASSY 2(OPTION)
SRV4 M0
XBP
XAP
J0121PI3
M3
WM
M2 J0142
YAP
YBP
J0122PI4
WP W1P W1PJ0133 WP
W-AXIS 100W
J0027
AC100V
AC220V
ACIN
AC220V J0006
POWER CIRCUIT-1-
YWF (OPTION)
See YWF
INTERCONNECTION DIAGRAM
LHP
J1134
SERVO1 MO J1141
PI1 J1123
LZM,LXM,LAEM
SERVO2 MO J1143
ENC3 J1137
PI2 J1127
J1451SRV2 BRAKE
LZP,LXP,LAP
LZB
CALIB A,B (OPTION)
M05
J0178
J0179
J0177
J0113
J0115
CN1
CN1,I/O ANC ANC A,B (OPTION)
I/O CONVEYOR BOARD
CN23,CN24
I/O TF BOARD
See Page 3
See Page 7
See Page 9
CAMERA UNIT SEL.
J0106
CN2
INTERCONNECTION DIAGRAM
See YWF
WAFER HEAD
J0111 NOTE1
NOTE1 : In the case of 4M HEAD, it connects with J0106
See Page 12
See Page 14
See Page 12
See Page 10:TYPE 4M
See Page 8 :TYPE FF
See Page 9 :TYPE FF
See Page 11:TYPE 4M
See Page 17
KEY
SERIAL2
SERIAL1
VGA
SERIAL1
KEY
OPERATION PANEL SEL.
VGA
See Page 13
PCS/M
CABLE HOST(OPTION)
S/M
PE J0082
CN27
EXT POWER
J0051EXT.PWR
AIR REGULATOR PANEL
BUZZER
J0119
I/O CONVEYOR BOARD
HA01
WIN BUZZER
UPS
J2031,J2032
J0783
See Page 4
POWER CIRCUIT-1-
OPERATION PANEL SEL.
See Page 17
See Page 13
PE J0081
LCD PWR
DC12V
CC.V3
2
CONTROL BOX
YSH20
Confidential & Proprietary
PAGE
EL04 COVER LIGHT
EL03 COVER LIGHT
EL02 COVER LIGHT
EL01 COVER LIGHT
LIGHT +24VBLIGHT +24VA
B-STAGE REAR
A-STAGE REAR
B-STAGE FRONT
A-STAGE FRONT
See Page 17
See Page 17
See Page 17
See Page 17
See Page 17
See Page 17
LED LIGHT
LIGHT BR
LIGHT AR
LIGHT BF
LIGHT AF
LIGHT
LIGHT
LIGHT
LIGHT
LED
LED
LED
LED
J0604J0603
J0602
COVER LIGHT ASSY (OPTION)
SYSTEM CONTROL BOX
COM
REMOTE IF BOARDI/O A
See Page 2
CN14
J0102CN14
POWER CIRCUIT -2-
See Page 18
QF45,XT43
XT43
QF45
J0601
+24VF4,+24VB6 CN45
CN45
J2061
TF SET SW
S10
1234 SRV ON
1222 T32
A1
I/O TF BOARDTFCN1
ELAVATION
A1
A2A1
INTERCONNECTION DIAGRAM
See YWF
J1708
84 TF+24E83 TF+24V
POWER CIRCUIT -1-POWER CIRCUIT -1-
QF41
J0173
J0033
HA PWR,HB PWR HEAD SERVO
+48B+48BJ0032
1233 +24C
KM12/KM12A
A2
2/T1
4/T2
6/T3
22
A1
1/L1
3/L2
5/L3
21
33 34
41 42
1221 T32B
A2 0V24
POWER CIRCUIT -1-POWER CIRCUIT -1-
POWER CIRCUIT -1-
QF42
QF31
POWER CIRCUIT -1-
J0041
C/V MOTOR DRIVER
J0041
NF11
J0005
W52
V52
U52
W51
V51
U51J0004
CONV+24E
1154+24C
1122 T32B
A2 0V24
CONV+24V
1153 +24B
1121 T32C
13
A1
53
73
83
21
63
1/L1
3/L2
5/L3
A2
14
2/T1
4/T2
6/T3
22
54
64
74
84
KM11/KM11A
24 +24E
14
34 +24B
13 +24V
23 +24V
33 +24V
A2 0V24
T11 EMG0
T12 EMG22
T22 EMG22
T31
T32
A1 +24V
KM10
CH2 CH1
K1K2
AC
DC
LOGIC
A1
A2
T11
T12
T22
T31
T32
13
23
3334
24
14
4142
J0172
WAFER TABLE
HEATERA61,A62
MGZN EMG DO
ELAVATION
HEAD I/O2 BOARD YWF
WAFER HEAD
LY ORG/OT
J1189
J0162
J0174
THRM EMG
YWF EMG
J0163
J0161
J0176
J0175
See YWF
INTERCONNECTION DIAGRAM
SYSTEM/SERVO CONTOROL BOX
INTERCONNECTION DIAGRAM
See YWF
INTERCONNECTION DIAGRAM
See YWF
HY CN18
J1163
REAR SIDE
REAR EMG SW
TF SET
COVER SW
SQ102
REAR
J1170
SB33
MGZN EMG
R1 EMG
MGZN EMG
R COVER
TF SET
EMG J0168
COVER J0169
FRONT SIDE
HB EMG
See Page2
C/R GOOD
CONTACTOR
EMG3
EMG1
EMG2
CN13
J0164CN13
HEAD B
HEAD A
CN48
CN12
CN11
I/O CONVEYOR BOARD ASSY P025
See Page 8
FRONT 2 EMG SW
FRONT 1 EMG SW
SB31
COVER SW
SQ101
FRONT
SB32
F COVER
F2 EMG
F1 EMG
CN11
EMG J0165
EMG J0166
COVER J0167
See Page 9
CN48
CN12
HA IO
HB IO
CC.V3
3
I/O CONVEYOR -1-
YSH20