X4电路图 - 第19页
1 - 6 9001013 1-010 601LD3 SIPLACE X4 basic module (sh. 6 of 7) Orig. Repl. by. Repl. f. W e i t e r g a b e s o w i e V e r v i e l f ä l t i g u n g d i e s e r U n t e r l a g e , V e r w e r t u n g u n d M i t t e i…
1 - 5
90010131-010601LD3 SIPLACE X4 basic module (sh. 5 of 7)
Orig. Repl. by.Repl. f.
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21 786543
21 786543
A
B
C
D
E
F
A
B
C
D
E
F
Date
Drawn
Checked
StandardName
ModificationStat. Date
Sheet
Designer 9
Item name / Benennung
of
Document No. /
Dokumentennummer:
Copyright reserved
SIEMENS AG
14.11.2001
Tekin
Tekin
SIPLACE X4 basic module
90010131-010601LD3
7
Tekin
Tekin
Tekin
21.06.06
01.09.05
27.07.05
402559
402006
401892
RS06
RS05
RS04
X
1
1
2
X
1
1
3
X
1
1
5
0
3
0
0
2
5
4
1
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0
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0
1
0
0
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1
C
A
N
I
N
0
3
0
1
0
0
5
0
C
A
N
O
U
T
X
1
1
6
PCB
Control
Main
distributor
Sub distributor
A
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P
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a
1
Power supply
X
1
3
2
X
1
3
3
X
1
3
5
0
3
0
0
2
5
3
4
S
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0
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0
0
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3
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S
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0
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1
0
0
5
6
C
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N
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0
3
0
1
0
0
5
7
C
A
N
O
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T
X
1
3
6
X
1
4
2
X
1
4
3
X
1
4
5
0
3
0
0
2
5
4
6
S
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7
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0
3
0
1
0
0
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2
C
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O
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X
1
4
6
(
2
n
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x
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)
Docking unit 2
Docking unit 1
Dock.unit 3
Docking unit 4
0
3
0
1
7
4
4
9
0
3
0
2
1
0
7
1
F
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X
2
1
3
X
2
1
4
X
2
1
5
X
3
f
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X
4
f
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X
5
f
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X
2
f
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03019062
Dock.unit 1
Control
(top)
03019062
Dock.unit 4
Control
(bottom)
0
3
0
1
7
4
4
6
0
3
0
2
1
0
3
1
O
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4
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3
X
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4
X
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5
0
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0
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1
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3
4
V
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6
4
H
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X1fn
X
3
k
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X
4
k
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X
5
k
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X
2
k
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X1kn
X
1
2
2
X
1
2
3
X
1
2
5
0
3
0
0
2
5
3
0
S
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0
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3
C
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0
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0
1
0
0
5
4
C
A
N
O
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T
X
1
2
6
X
3
h
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X
4
h
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X
5
h
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X
2
h
n
0301 9062
Dock.unit 2
Control
(top)
X1gn
X1hn
X
3
g
n
X
4
g
n
X
5
g
n
X
2
g
n
X
3
h
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X
4
h
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X
5
h
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X
2
h
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X
3
g
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X
4
g
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X
5
g
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X
2
g
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0
3
0
2
1
0
7
3
F
C
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X
2
3
3
X
2
3
4
X
2
3
5
0
3
0
2
1
0
3
3
V
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O
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0
3
0
2
1
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6
3
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0
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2
F
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X
2
2
3
X
2
2
4
X
2
2
5
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0
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1
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2
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4
4
8
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0
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7
4
4
7
Wiring, optimized dock.unit
X1fn X1kn
X
2
4
2
X
2
4
2
On/Off Button
Dock.unit 4
Extension kit, PCB input (right)
On/Off button
Dock.unit 1
X
2
1
2
X
2
1
2
Extension kit, PCB input (left)
X
2
3
2
X
2
3
2
On/Off button
Dock.unit 3
Exension kit, PCB output (right)
0302 1056
On/Off button
Dock.unit 2
X
2
2
2
X
2
2
2
Extension kit, PCB output (left)
X1gn
X1hn
X24qa
X24qa
X19qa
X19qa
X24ra
X24ra
X19ra
X19ra
5
3
0
V
-
D
C
/
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C
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2
0
5
1
3
X
2
l
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X
1
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X
4
l
b
X
3
l
b
X
2
l
b
X
1
l
b
X
4
l
b
X
3
l
b
X
1
2
1
X
1
2
1
X
2
2
1
0
3
0
2
0
9
0
2
D
C
/
D
C
c
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v
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03020902-W1
03020902-W2
X
2
1
1
0
3
0
2
0
9
0
1
D
C
/
D
C
c
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X
2
3
1
0
3
0
2
0
9
0
3
D
C
/
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c
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X
1
3
1
X
1
3
1
Power Supply
03020903-W2
03020903-W1
X
1
1
1
X
1
1
1
03020901-W1
03020901-W2
X
2
4
1
03020904-W2
X141
X141
03020904-W1
0
3
0
2
0
9
0
4
D
C
/
D
C
c
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v
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SIPLACE X Series
0302 1056
0302 1052
0302 1053
0301 9062
Dock.unit 3
Control
(bottom)
03002492
Power Supply
0300 2493
Power Supply
0300 2491
P
o
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S
u
p
p
l
y
0
3
0
0
2
4
9
4
X
3
f
n
X
4
f
n
X
5
f
n
X
2
f
n
X
3
k
n
X
4
k
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X
5
k
n
X
2
k
n
0302 1051
0302 1054
0302 1056
0302 1056
See page 3-11
See page 3-15
See page 4-1
See page 5-24
See page 4-19
1 - 6
90010131-010601LD3 SIPLACE X4 basic module (sh. 6 of 7)
Orig. Repl. by.Repl. f.
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21 786543
21 786543
A
B
C
D
E
F
A
B
C
D
E
F
Date
Drawn
Checked
StandardName
ModificationStat. Date
Sheet
Designer 9
Item name / Benennung
of
Document No. /
Dokumentennummer:
Copyright reserved
SIEMENS AG
14.11.2001
Tekin
Tekin
SIPLACE X4 basic module
90010131-010601LD3
7
Tekin
Tekin
Tekin
21.06.06
01.09.05
27.07.05
402559
402006
401892
RS06
RS05
RS04
X05_1sq
X4cb X8cb X9cb
X1cbX2cbX3cb
Main Distributor
0304 6225
X1cbX2cbX3cb
X4caX5caX6caX7caX8ca X40ca
CAN busTest Test screen
X1caX2caX3ca X60ca X61ca
X12ca
G
a
n
t
r
y
3
X
3
q
c
V
i
s
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n
D
C
/
D
C
c
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v
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t
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0
3
0
0
2
2
8
0
(
q
c
)
X
5
0
c
a
X
9
0
c
a
X
4
q
c
X
5
q
a
X
4
q
a
Power
supply
Illumination
X
4
q
a
X
3
q
c
X
5
q
a
X21
X22
X
1
0
X
1
1
X
1
2
Power supply
00354 626
Carrier cable 1=3 and 2=4
0
3
0
0
9
8
0
0
0
3
0
0
9
8
0
2
G
a
n
t
r
y
X
m
o
t
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r
0300 9790
0300 9810
S/Z2
motor
Gantry interface
00363 330 (cb)
0
3
0
4
0
9
7
7
-
W
2
Head interface
0300 0901 (cc)
X4ccX5ccX6ccX7ccX8cc
X motor
Tab
(X1uo) (X3uo) (X5uo) (X1up) (X3up) (X5up)
X4ccX5ccX6ccX7ccX8cc
X4caX5caX6caX7caX8ca
X1caX2caX3ca X60ca X61ca
X
5
0
c
a
X
9
0
c
a
X4cb X8cb
6
Hotlink-Filter
0301 0670 (cf)
X9ca
X9ca
X2cfX1cf X5cfX6cfX4cf
X2cfX1cf X5cfX6cfX4cf
Digital vision board
03004051 (cu)
X9cu X24cu X25cuX22cu X23cu
PCB camera
digital
0303 0762
X8cu X20cu
X8cu X20cu
X
1
3
c
u
X
9
c
c
X9cu X24cu X25cuX22cu X23cu
To Head adapter
Axis unit
0304 2047
Carrier cable interface 1/3
0301 0612 (ca)
X11caX22ca X21ca X23ca X24ca X26ca X25ca
X12ca X11caX22ca X21ca X23ca X24ca X26ca X25ca
X13ca X14ca X15ca X16ca
X13ca X14ca X15ca X16ca
0
3
0
0
9
8
0
3
0
3
0
0
9
8
0
4
0
3
0
0
9
8
0
5
0
3
0
0
9
8
0
1
G
a
n
t
r
y
Y
m
o
t
o
r
0
3
0
0
9
8
1
1
0
3
0
0
9
8
1
2
0
3
0
0
9
8
1
3
0
3
0
0
9
8
1
4
0
3
0
0
9
8
1
5
0
3
0
0
9
8
1
6
A
c
t
u
a
l
v
a
l
u
e
R
e
s
/
D
P
2
a
x
i
s
A
c
t
u
a
l
v
a
l
u
e
D
P
1
a
x
i
s
A
c
t
u
a
l
v
a
l
u
e
Z
1
a
x
i
s
A
c
t
u
a
l
v
a
l
u
e
S
/
Z
2
a
x
i
s
A
c
t
u
a
l
v
a
l
u
e
Y
a
x
i
s
A
c
t
u
a
l
v
a
l
u
e
X
a
x
i
s
X06_1sq X07_1sq X08_1sq X11_1sq X12_1sq
X05_1sq X06_1sq X07_1sq X08_1sq X11_1sq X12_1sq
X05_3sq X06_3sq
(X4ur) (X4ut)
X05_3sq X06_3sq
X21
X22
C
a
r
r
i
e
r
c
a
b
l
e
Y
-
M
o
t
o
r
C
a
r
r
i
e
r
c
a
b
l
e
Y
-
M
o
t
o
r
C
a
r
r
i
e
r
c
a
b
l
e
Y
-
M
o
t
o
r
Z1
motor
DP2
motor
DP1
motor
Test access
0300 3448
X
1
2
X
1
0
X
1
1
0300 9807
0300 9786-W1, W2, W3
0300 9786-W4, W5
0
3
0
0
9
7
8
2
0
3
0
0
9
7
8
3
0
3
0
0
9
7
8
5
0
3
0
0
9
7
8
3
X02_1sq X02_1sq X03_1sq X04_1sq X09_1sq X10_1sq X01_3sq X02_3sq
(X1to) (X3to) (X5to) (X1tp) (X3tp) (X5tp) (X4tr) (X4tt)
C
a
r
r
i
e
r
c
a
b
l
e
X
-
M
o
t
o
r
C
a
r
r
i
e
r
c
a
b
l
e
S
/
Z
2
-
M
o
t
o
r
C
a
r
r
i
e
r
c
a
b
l
e
Z
1
/
D
P
1
-
M
o
t
o
r
C
a
r
r
i
e
r
c
a
b
l
e
D
P
1
/
D
P
2
-
M
o
t
o
r
C
a
r
r
i
e
r
c
a
b
l
e
X
-
M
o
t
o
r
Temperature
sensor
X11cc X12cc
X11cc X12cc
X motor
0
3
0
0
3
3
6
1
-
W
1
Motor X axis
Scanning head
X axis
X24cc X15cc
0
3
0
2
0
5
8
8
X15cc
X22cc
0
3
0
4
0
9
7
7
-
W
1
0
3
0
0
6
7
6
7
-
W
2
Motor Y axis
0
3
0
0
3
3
6
1
-
W
2
Temperature
sensor
Y motor
0
3
0
0
6
7
6
7
-
W
1
Test
Y tracksingnals
Scanning head
Y axis
X10cb
0
3
0
1
7
7
5
4
X10cb
Y tracksignals
X11cb
Y motor
encoder
X
1
3
X
1
3
X13ba X14ba X15ba X16ba
Computer unit
0304 8274
X3df
X
1
p
s
C
A
M
0
C
A
M
1
H
o
t
l
i
n
k
b
o
a
r
d
X
1
p
s
X
0
p
s
X
0
p
s
X3df
0300 9818
Camera bus
0300 9809
0300 9808
X3bf
X3bf
Hotlink filter
0301 0670 (bf)
G
a
n
t
r
y
2
X
5
0
b
a
X
9
0
b
a
X
4
q
c
X
6
q
a
X
5
0
b
a
X
9
0
b
a
X
6
q
a
ganrty 2/3
0
3
0
3
8
0
9
3
0
3
0
3
8
0
9
2
0
3
0
3
8
0
9
1
0
3
0
0
9
7
8
0
G
a
n
t
r
y
X
m
o
t
o
r
0
3
0
0
9
7
8
1
G
a
n
t
r
y
Y
m
o
t
o
r
0
3
0
0
9
7
9
1
A
c
t
u
a
l
v
a
l
u
e
R
e
s
/
D
P
2
a
x
i
s
A
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a
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D
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1
a
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A
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a
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Z
1
a
x
i
s
A
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a
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v
a
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S
/
Z
2
a
x
i
s
A
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a
l
v
a
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e
Y
a
x
i
s
A
c
t
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a
l
v
a
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u
e
X
a
x
i
s
X02_1sq X02_1sq X03_1sq X04_1sq X09_1sq X10_1sq X01_3sq X02_3sq
0
3
0
0
9
7
9
2
0
3
0
0
9
7
9
3
0
3
0
0
9
7
9
4
0
3
0
0
9
7
9
5
0
3
0
0
9
7
9
6
X12ba X11baX22ba X21ba X23ba X24ba X26ba X25ba
X12ba X11baX22ba X21ba X23ba X24ba X26ba X25ba
0
3
0
3
8
0
9
6
0
3
0
3
8
0
9
5
0
3
0
3
8
0
9
4
0
3
0
3
8
0
9
8
0
3
0
3
8
0
9
7
0
3
0
3
8
0
9
9
X4bb X8bb
X9cb
X1bbX2bbX3bb
X1bbX2bbX3bb
X40b
CAN busTest Test screen
Gantry interface
0300 6531 (bb)
Head interface
0300 0901 (cc)
X motor
Tab
X4bcX5bcX6bcX7bcX8bc
X4baX5baX6baX7baX8ba
X1baX2baX3ba X60ba X61ba
X4bb X8bb
X9baX2bfX1bf X5bf
X6bf
X4bf
Digital vision board
03004051 (bu)
PCB camera
digital
0303 0762
X8bu X20bu
X9bu X24bu X25buX22bu X23bu
To Head adapter
Carrier cable interface 2/4
0301 0622 (ba)
C
a
r
r
i
e
r
c
a
b
l
e
Y
-
M
o
t
o
r
C
a
r
r
i
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r
c
a
b
l
e
Y
-
M
o
t
o
r
C
a
r
r
i
e
r
c
a
b
l
e
Y
-
M
o
t
o
r
Test access
0300 3448
C
a
r
r
i
e
r
c
a
b
l
e
X
-
M
o
t
o
r
C
a
r
r
i
e
r
c
a
b
l
e
S
/
Z
2
-
M
o
t
o
r
C
a
r
r
i
e
r
c
a
b
l
e
Z
1
/
D
P
1
-
M
o
t
o
r
C
a
r
r
i
e
r
c
a
b
l
e
D
P
1
/
D
P
2
-
M
o
t
o
r
C
a
r
r
i
e
r
c
a
b
l
e
X
-
M
o
t
o
r
Temperature
sensor
X11bc X12bc
X motor
0
3
0
0
3
3
6
1
-
W
1
Motor X axis
Scanning head
X axis
X24bc
0
3
0
2
0
5
8
8
X15bcX22bc
0
3
0
0
6
7
6
7
-
W
2
Motor Y axis
0
3
0
0
3
3
6
1
-
W
2
Temperature
sensor
Y motor
0
3
0
0
6
7
6
7
-
W
1
Test
Y tracksingnals
Scanning head
Y axis
X10bb
0
3
0
1
7
7
5
4
X10bb
Y tracksignals
X11bb
Y motor
encoder
0
3
0
3
8
0
8
3
0
3
0
3
8
0
8
2
0
3
0
3
8
0
8
1
0
3
0
3
8
0
8
6
0
3
0
3
8
0
8
5
0
3
0
3
8
0
8
4
0
3
0
3
8
0
8
8
0
3
0
3
8
0
8
7
0
3
0
3
8
0
8
9
X
1
3
b
u
X
9
b
c
Power
supply
Illumination
0300 9789
0300 9788
X2bfX1bf X5bfX6bfX4bf X4baX5baX6baX7baX8baX9ba
X1baX2baX3ba X60ba X61ba
X13ba X14ba X15ba X16ba
S/Z2
motor
Z1
motor
DP2
motor
DP1
motor
X9bu X24bu X25buX22bu X23bu
X8bu X20bu
X4bcX5bcX6bcX7bcX8bc
X11bc X12bc
X15bc
0300 9798
Camera bus
0
3
0
4
0
9
7
7
-
W
2
0
3
0
4
0
9
7
7
-
W
1
See page 4-19
See page 5-41
See page 3-7
See page 5-32
See page 3-11
See page 5-20
See page 5-28
See page 5-37
See page 4-7
See page 5-37
See page 5-28
See page 5-42
See page 5-39
1 - 7
90010131-010601LD3 SIPLACE X4 basic module (sh. 7 of 7)
Orig. Repl. by.Repl. f.
W
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21 786543
21 786543
A
B
C
D
E
F
A
B
C
D
E
F
Date
Drawn
Checked
StandardName
ModificationStat. Date
Sheet
Designer 9
Item name / Benennung
of
Document No. /
Dokumentennummer:
Copyright reserved
SIEMENS AG
14.11.2001
Tekin
Tekin
SIPLACE X4 basic module
90010131-010601LD3
7
Tekin
Tekin
Tekin
21.06.06
01.09.05
27.07.05
402559
402006
401892
RS06
RS05
RS04 7
X4db X8db X9db
X1dbX2dbX3db
Sub distributor
0304 6226
X40da
CAN busTest Test screen
G
a
n
t
r
y
4
V
i
s
i
o
n
D
C
d
i
s
t
r
i
b
u
t
o
r
0
3
0
0
5
9
2
0
(
r
c
)
X
5
0
d
a
X
9
0
d
a
X
6
r
a
X
4
r
a
Power
supply
Illumination
X
4
r
a
X
4
r
c
X
6
r
a
X31
X32
X
1
0
X
1
1
X
1
2
Power supply
00354 626
Carrier cable 1=3 and 2=4
0
3
0
0
9
8
2
0
0
3
0
0
9
8
2
2
G
a
n
t
r
y
X
m
o
t
o
r
0300 9790
0300 9830
S/Z2
motor
Gantry interface
0300 6531 (db)
0
3
0
4
0
9
7
7
-
W
2
Head interface
0300 0901 (dc)
X4dcX5dcX6dcX7dcX8dc
X motor
Tab
(X1vo) (X3vo) (X5vo) (X1vp) (X3vp) (X5vp)
X4daX5daX6daX7daX8da
X1daX2daX3da X60da X61da
X
5
0
d
a
X
9
0
d
a
X9da
X3df
X2cfX1df X5dfX6dfX4df
Digital vision board
03004051 (du)
X9du X24du X25duX22du X23du
PCB camera
digital
0303 0762
X8du X20du
X
1
3
d
u
X
9
d
c
To Head adapter
Axis unit
0304 2047
Carrier cable interface 2/4
0301 0622 (da)
X12da X11daX22da X21aa X23da X24da X26da X25da X13da X14da X15da X16da
0
3
0
0
9
8
2
3
0
3
0
0
9
8
2
4
0
3
0
0
9
8
2
5
0
3
0
0
9
8
2
1
G
a
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t
r
y
Y
m
o
t
o
r
0
3
0
0
9
8
3
1
0
3
0
0
9
8
3
2
0
3
0
0
9
8
3
3
0
3
0
0
9
8
3
4
0
3
0
0
9
8
3
5
0
3
0
0
9
8
3
6
A
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a
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v
a
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u
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e
s
/
D
P
2
a
x
i
s
A
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1
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1
a
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A
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v
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S
/
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2
a
x
i
s
A
c
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v
a
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Y
a
x
i
s
A
c
t
u
a
l
v
a
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u
e
X
a
x
i
s
X05_1tq X06_1tq X07_1tq X08_1tq X11_1tq X12_1tq
(X4vr) (X4vt)
X05_3tq X06_3tq
X31
X32
C
a
r
r
i
e
r
c
a
b
l
e
Y
-
M
o
t
o
r
C
a
r
r
i
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r
c
a
b
l
e
Y
-
M
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r
C
a
r
r
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r
c
a
b
l
e
Y
-
M
o
t
o
r
Z1
motor
DP2
motor
DP1
motor
Test access
0300 3448
X
1
2
X
1
0
X
1
1
0300 9827
0300 9766-W1, W2, W3
0300 9766-W4, W5
0
3
0
0
9
7
6
2
0
3
0
0
9
7
6
3
0
3
0
0
9
7
6
5
0
3
0
0
9
7
6
3
X02_1tq X02_1tq X03_1tq X04_1tq X09_1tq X10_1tq X01_3tq X02_3tq
(X1so) (X3so) (X5so) (X1sp) (X3sp) (X5sp) (X4sr) (X4st)
C
a
r
r
i
e
r
c
a
b
l
e
X
-
M
o
t
o
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C
a
r
r
i
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r
c
a
b
l
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S
/
Z
2
-
M
o
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C
a
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a
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Z
1
/
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P
1
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a
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a
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D
P
1
/
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2
-
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a
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X
-
M
o
t
o
r
Temperature
sensor
X11dc X12dc
X motor
0
3
0
0
3
3
6
1
-
W
1
Motor X axis
Scanning head
X axis
X24dc X15dc
0
3
0
2
0
5
8
8
X22dc
0
3
0
4
0
9
7
7
-
W
1
0
3
0
0
6
7
6
7
-
W
2
Motor Y axis
0
3
0
0
3
3
6
1
-
W
2
Temperature
sensor
Y motor
0
3
0
0
6
7
6
7
-
W
1
Test
Y tracksingnals
Scanning head
Y axis
X10db
0
3
0
1
7
7
5
4
Y tracksignals
X11db
Y motor
encoder
X
1
4
X
1
4
X13aa X14aa X15aa X16aa
X3af
X3af
Hotlink filter
0301 0670 (af)
G
a
n
t
r
y
1
X
5
0
a
a
X
9
0
a
a
X
3
r
c
X
5
r
a
X
5
r
a
ganrty 1/4
0
3
0
3
8
0
9
3
0
3
0
3
8
0
9
2
0
3
0
3
8
0
9
1
0
3
0
0
9
7
6
0
G
a
n
t
r
y
X
m
o
t
o
r
0
3
0
0
9
7
6
1
G
a
n
t
r
y
Y
m
o
t
o
r
0
3
0
0
9
7
7
1
A
c
t
u
a
l
v
a
l
u
e
R
e
s
/
D
P
2
a
x
i
s
A
c
t
u
a
l
v
a
l
u
e
D
P
1
a
x
i
s
A
c
t
u
a
l
v
a
l
u
e
Z
1
a
x
i
s
A
c
t
u
a
l
v
a
l
u
e
S
/
Z
2
a
x
i
s
A
c
t
u
a
l
v
a
l
u
e
Y
a
x
i
s
A
c
t
u
a
l
v
a
l
u
e
X
a
x
i
s
0
3
0
0
9
7
7
2
0
3
0
0
9
7
7
3
0
3
0
0
9
7
7
4
0
3
0
0
9
7
7
5
0
3
0
0
9
7
7
6
X12aa X11aaX22aa X21aa X23aa X24aa X26aa X25aa
0
3
0
3
8
0
9
6
0
3
0
3
8
0
9
5
0
3
0
3
8
0
9
4
0
3
0
3
8
0
9
8
0
3
0
3
8
0
9
7
0
3
0
3
8
0
9
9
X9ab
X1abX2abX3ab
X40aa
CAN busTest Test screen
Gantry interface
00363 330 (ab)
0
3
0
4
0
9
7
7
-
W
2
Head interface
0300 0901 (ac)
X motor
Tab
X4acX5acX6acX7acX8ac
X4aaX5aaX6aaX7aaX8aa
X4ab X8ab
X9aa
X2afX1af X5afX6afX4af
Digital vision board
03004051 (au)
PCB camera
digital
0303 0762
X8au X20au
X9au X24au X25auX22au X23au
To Head adapter
Carrier cable interface 1/3
0301 0612 (aa)
C
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c
a
b
l
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Y
-
M
o
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C
a
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r
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c
a
b
l
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Y
-
M
o
t
o
r
C
a
r
r
i
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c
a
b
l
e
Y
-
M
o
t
o
r
Test access
0300 3448
C
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a
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X
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t
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a
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Z
2
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2
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a
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c
a
b
l
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X
-
M
o
t
o
r
Temperature
sensor
X11ac X12ac
X motor
0
3
0
0
3
3
6
1
-
W
1
Motor X axis
Scanning head
X axis
X24ac
0
3
0
2
0
5
8
8
X15acX22ac
0
3
0
4
0
9
7
7
-
W
1
0
3
0
0
6
7
6
7
-
W
2
Motor Y axis
0
3
0
0
3
3
6
1
-
W
2
Temperature
sensor
Y motor
0
3
0
0
6
7
6
7
-
W
1
Test
Y tracksingnals
Scanning head
Y axis
0
3
0
1
7
7
5
4
X10ab
Y tracksignals
X11ab
Y motor
encoder
0
3
0
3
8
0
8
3
0
3
0
3
8
0
8
2
0
3
0
3
8
0
8
1
0
3
0
3
8
0
8
6
0
3
0
3
8
0
8
5
0
3
0
3
8
0
8
4
0
3
0
3
8
0
8
8
0
3
0
3
8
0
8
7
0
3
0
3
8
0
8
9
X
1
3
a
u
X
9
a
c
Power
supply
Illumination
X1aaX2aaX3aa X60aa X61aa
S/Z2
motor
Z1
motor
DP2
motor
DP1
motor
X9au X24au X25auX22au X23au
X8au X20au
X2afX1af X5afX6afX4af
X11ac X12ac X15ac
X4acX5acX6acX7acX8ac
X4ab X8ab
X10ab
X1abX2abX3ab
X1aaX2aaX3aa X60aa X61aa
X
5
0
a
a
X
9
0
a
a
X13aa X14aa X15aa X16aaX12aa X11aaX22aa X21aa X23aa X24aa X26aa X25aa
X4aaX5aaX6aaX7aaX8aaX9aa
X05_1tq X06_1tq X07_1tq X08_1tq X11_1tq X12_1tq X05_3tq X06_3tq
X02_1tq X02_1tq X03_1tq X04_1tq X09_1tq X10_1tq X01_3tq X02_3tq
X4db X8db X9db
X10db X11db
X1dbX2dbX3dbX9du X24du X25duX22du X23du
X8du X20du
X11dc X12dc X24dc X15dc
X4dcX5dcX6dcX7dcX8dc
Hotlink filter
0301 0670 (df)
X3df
X22da X21aa
X8daX9daX2cfX1df X5dfX6dfX4df X4daX5daX6daX7da
X23da X24da X26da X25da X12da X11da
X1daX2daX3da X60da X61da
X13da X14da X15da X16da
X
3
r
c
X
4
r
c
0300 9768
0300 9769
0300 9829
0300 9828
Computer unit
0304 8274
X
1
p
r
C
A
M
0
C
A
M
1
H
o
t
l
i
n
k
b
o
a
r
d
X
0
p
r
0300 9778
Camera bus
X
1
p
r
X
0
p
r
0300 9838
Camera bus
See page 5-42
See page 5-41
See page 4-7
See page 3-7
See page 5-39
See page 3-15
See page 5-20
See page 5-28
See page 5-37
See page 5-39
See page 5-28
See page 5-37
See page 4-19