5OM-1610-002_w - 第190页
5OM-1610 5-3 101 1-002(13AAF) -X2200 -X12102 -X12410 -X12201 -X22501 -X22507 -X1E39 -X13601 -M22 -X12501 -X3601 -B2101 -B2102 -B2202 -E39 -U21 -U22 Beam Relay Panel Connection Diagram_Robot Cable 2
5OM-1610
5-2
1011-002A(13AAE)
-X2100
-X2300
-X231P1
-X12301
-X1311A
φ6 Air Tube
φ8 Air Tube
-X1311B
-M21
-M23
-X131P1
-X311A
φ6 Air Tube
φ8 Air Tube
-X311B
-U23
Beam Relay Panel Connection Diagram_Robot Cable 1
5OM-1610
5-31011-002(13AAF)
-X2200
-X12102
-X12410
-X12201
-X22501
-X22507
-X1E39
-X13601
-M22
-X12501
-X3601
-B2101
-B2102
-B2202
-E39
-U21
-U22
Beam Relay Panel Connection Diagram_Robot Cable 2
5OM-1610
5-4
1011-002G(01300-6)
L122 L122
L222 L222
L121 L121
L121 L121
L221 L221
L110 L110
L210 L210
L310 L310
L100 L100
L200 L200
L300 L300
L221 L221
L100
L100
L200
L200
L300
L300
X1300B1(R),(F)
XG2101,XG2201REED-K100
<TB:P1>
REED-K100
REED-K100
X1300B1(R),(F)
1 2 3
SP1
1
2
3
4
L300
L200
L100
533
10B
F203 F202 F201
TB:P1
TB:P1(L110)
TB:P1(L210)
TB:P1(L310)
TB:P1
TB:P1(L110)
TB:P1(L210)
TB:P1(L310)
X1300B1
X1300B1
TB:P1
TB:P1(L121)
TB:P1(L221)
REED-K100
XG2101
TB:P1
TB:P1(L122)
TB:P1(L222)
TB:P1
TB:P1(L122)
TB:P1(L222)
XG2201
X10520-10
X10520-9
A21,A22,A23(R) #L11
A21,A22,A23(F) #L11
A21,A22,A23(R) #L21
A21,A22,A23(F) #L21
NOISE FILTER:Z02
Q206-1,3
Q201-1,3,5
K10-1,3,5
K28-1,3
K28-2,4
1
2
3
4
1
2
3
4
External Unit Bundled Connector (R)
External Unit Bundled Connector (F)
OP: Coplanarity Detection Power Supply
CPU 1,CPU 3 Power Supply
CPU 2 Power Supply
Side Panel L