5OM-1610-002_w - 第192页
5OM-1610 5-5 101 1-002G(01300-7) Q201 1 3 5 2 4 6 Q206 1 3 2 4 Q204 1 3 2 4 1 2 3 4 5 6 21 22 A1 A2 K29 L100 L200 L300 L100 L200 L120 L220 L110 L210 L310 L120 L220 L121 L221 1 2 3 4 5 6 21 22 A1 A2 K28 L130 L230 L330 L13…
5OM-1610
5-4
1011-002G(01300-6)
L122 L122
L222 L222
L121 L121
L121 L121
L221 L221
L110 L110
L210 L210
L310 L310
L100 L100
L200 L200
L300 L300
L221 L221
L100
L100
L200
L200
L300
L300
X1300B1(R),(F)
XG2101,XG2201REED-K100
<TB:P1>
REED-K100
REED-K100
X1300B1(R),(F)
1 2 3
SP1
1
2
3
4
L300
L200
L100
533
10B
F203 F202 F201
TB:P1
TB:P1(L110)
TB:P1(L210)
TB:P1(L310)
TB:P1
TB:P1(L110)
TB:P1(L210)
TB:P1(L310)
X1300B1
X1300B1
TB:P1
TB:P1(L121)
TB:P1(L221)
REED-K100
XG2101
TB:P1
TB:P1(L122)
TB:P1(L222)
TB:P1
TB:P1(L122)
TB:P1(L222)
XG2201
X10520-10
X10520-9
A21,A22,A23(R) #L11
A21,A22,A23(F) #L11
A21,A22,A23(R) #L21
A21,A22,A23(F) #L21
NOISE FILTER:Z02
Q206-1,3
Q201-1,3,5
K10-1,3,5
K28-1,3
K28-2,4
1
2
3
4
1
2
3
4
External Unit Bundled Connector (R)
External Unit Bundled Connector (F)
OP: Coplanarity Detection Power Supply
CPU 1,CPU 3 Power Supply
CPU 2 Power Supply
Side Panel L
5OM-1610
5-51011-002G(01300-7)
Q201
1 3 5
2 4 6
Q206
1 3
2 4
Q204
1 3
2 4
1
2
3
4
5
6
21
22
A1
A2
K29
L100
L200
L300
L100
L200
L120
L220
L110
L210
L310
L120
L220
L121
L221
1
2
3
4
5
6
21
22
A1
A2
K28
L130
L230
L330
L131
L231
L331
L122
L222
24A2
10A
24A1
534
1
2
3
4
5
6
21
22
A1
A2
K10
K3-34
L140
L240
L340
334
10A
K38-A22
417
405B
Q205
1 3 5
2 4 6
L130
L230
L330
14
713
X10520-8
13
10B
X10520-7
X10520-1
M66
XG01
A3
A2
A1
L120
L220
L140
L240
L340
Q206-2
Q206-4
B3
B2
B1
L110
L210
L310
L121
L221
L110
L210
L310
L110
L210
L310
U07:X27163-1
K33A-13
K33A-1,3,5
U07:X2723-2
TB:DC1(10A)
Vacuum Pump
G01,G02,G04,G07 Power Supply
TB:P1(L122,L222)
TB:P1(L121,L221)
TB:P1(L100,L200)
TB:P1(L110,L210, L310)
TB:P1(L100,L200, L300)
10B503A
L120
L220
XG01
TB:DC1(24A1)
TB:DC1(24A2)
Side Panel C 1
5OM-1610
5-6
1011-002G(01300-7)
Side Panel C 2
Q221R
1 3 5
2 4 6
Q222R
1 3 5
2 4 6
Q223R
1 3 5
2 4 6
L116
L216
L316
L117
L217
L317
L118
L218
L318
L112
L212
L312
13
14
10B
802
13
14
803
802
13
14
803
514
X10520-3
Q221F
1 3 5
2 4 6
Q222F
1 3 5
2 4 6
Q223F
1 3 5
2 4 6
L113
L213
L313
L114
L214
L314
L115
L215
L315
L112
L212
L312
13
14
10B
805
13
14
806
805
13
14
806
515
X10520-5
X10520-6
X10520-4
X10520
6
5
4
3
2
1
10B
512
Q201-14/AXaR(Red)
10B
514
Q221R-13
Q223R-14
10B
515
Q221F-13
Q223F-14
7
10B
Q205-13
8
713
Q205-14
9
10B
10
533
X10520
A21(X)Main Power:F
(L113, L213, L313)
A22(Y1)Main Power:F
(L114, L214, L314)
A23(Y2)Main Power:F
(L115, L215, L315)
A21(X)
Main Power:R
(L116, L216, L316)
A22(Y1)Main Power:R
(L117, L217, L317)
A23(Y2)Main Power:R
(L118, L218, L318)
K33B-2,4,6
K33B-2,4,6
K33B-14
F201-3
F201-4
HLS PCB Collective Section